AU2002355553A1 - An electromechanical switch and method of fabrication - Google Patents
An electromechanical switch and method of fabricationInfo
- Publication number
- AU2002355553A1 AU2002355553A1 AU2002355553A AU2002355553A AU2002355553A1 AU 2002355553 A1 AU2002355553 A1 AU 2002355553A1 AU 2002355553 A AU2002355553 A AU 2002355553A AU 2002355553 A AU2002355553 A AU 2002355553A AU 2002355553 A1 AU2002355553 A1 AU 2002355553A1
- Authority
- AU
- Australia
- Prior art keywords
- fabrication
- electromechanical switch
- electromechanical
- switch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
- H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
- H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US31022301P | 2001-08-07 | 2001-08-07 | |
US60/310,223 | 2001-08-07 | ||
US20819302A | 2002-07-31 | 2002-07-31 | |
US10/208,193 | 2002-07-31 | ||
PCT/US2002/024927 WO2003015128A2 (en) | 2001-08-07 | 2002-08-07 | An electromechanical switch and method of fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2002355553A1 true AU2002355553A1 (en) | 2003-02-24 |
Family
ID=26902982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2002355553A Abandoned AU2002355553A1 (en) | 2001-08-07 | 2002-08-07 | An electromechanical switch and method of fabrication |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU2002355553A1 (en) |
WO (1) | WO2003015128A2 (en) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE382188T1 (en) | 2003-10-31 | 2008-01-15 | Nxp Bv | MICROELECTROMECHANICAL HIGH FREQUENCY SYSTEMS AND METHOD FOR PRODUCING SUCH SYSTEMS |
EP1808046B1 (en) * | 2004-10-27 | 2010-09-22 | Epcos Ag | Reduction of air damping in mems device |
JP5976319B2 (en) * | 2008-09-12 | 2016-08-23 | エックスバイオテク,インコーポレイテッドXbiotech,Inc. | Targeting pathogenic monocytes |
US8570705B2 (en) | 2010-01-15 | 2013-10-29 | Wispry, Inc. | MEMS sprung cantilever tunable capacitors and methods |
DE102010013611A1 (en) * | 2010-03-22 | 2011-09-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Hybrid actuator element e.g. electrostatic actuator, for actuating high temperature prevail or aggressive fluid in fluid system, has deflection element and housing part that comprise sintering layers, and arms made of ceramic layers |
US8916996B2 (en) * | 2011-07-29 | 2014-12-23 | General Electric Company | Electrical distribution system |
CN103943420B (en) * | 2014-04-15 | 2017-06-23 | 清华大学 | MEMS relay, cantilever switch and forming method thereof |
CN104064407B (en) * | 2014-06-12 | 2016-04-20 | 清华大学 | Micro electro-mechanical system switch |
CN114758928A (en) * | 2017-07-24 | 2022-07-15 | 中北大学 | Straight plate type practical radio frequency MEMS switch |
CN107424875B (en) * | 2017-07-24 | 2020-06-09 | 中北大学 | Cross single-pole triple-throw switch |
CN108648964B (en) * | 2018-06-15 | 2020-06-09 | 中北大学 | Radio frequency MEMS switch based on electrode structure on non-release hole |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4570139A (en) * | 1984-12-14 | 1986-02-11 | Eaton Corporation | Thin-film magnetically operated micromechanical electric switching device |
US5051643A (en) * | 1990-08-30 | 1991-09-24 | Motorola, Inc. | Electrostatically switched integrated relay and capacitor |
US6127744A (en) * | 1998-11-23 | 2000-10-03 | Raytheon Company | Method and apparatus for an improved micro-electrical mechanical switch |
-
2002
- 2002-08-07 AU AU2002355553A patent/AU2002355553A1/en not_active Abandoned
- 2002-08-07 WO PCT/US2002/024927 patent/WO2003015128A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
WO2003015128A3 (en) | 2003-09-25 |
WO2003015128A2 (en) | 2003-02-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |