AU2002355553A1 - An electromechanical switch and method of fabrication - Google Patents

An electromechanical switch and method of fabrication

Info

Publication number
AU2002355553A1
AU2002355553A1 AU2002355553A AU2002355553A AU2002355553A1 AU 2002355553 A1 AU2002355553 A1 AU 2002355553A1 AU 2002355553 A AU2002355553 A AU 2002355553A AU 2002355553 A AU2002355553 A AU 2002355553A AU 2002355553 A1 AU2002355553 A1 AU 2002355553A1
Authority
AU
Australia
Prior art keywords
fabrication
electromechanical switch
electromechanical
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002355553A
Inventor
Mehmet Ozgur
Michael Pedersen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corp for National Research Initiatives
Original Assignee
Corp for National Research Initiatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corp for National Research Initiatives filed Critical Corp for National Research Initiatives
Publication of AU2002355553A1 publication Critical patent/AU2002355553A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
AU2002355553A 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication Abandoned AU2002355553A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US31022301P 2001-08-07 2001-08-07
US60/310,223 2001-08-07
US20819302A 2002-07-31 2002-07-31
US10/208,193 2002-07-31
PCT/US2002/024927 WO2003015128A2 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Publications (1)

Publication Number Publication Date
AU2002355553A1 true AU2002355553A1 (en) 2003-02-24

Family

ID=26902982

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002355553A Abandoned AU2002355553A1 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Country Status (2)

Country Link
AU (1) AU2002355553A1 (en)
WO (1) WO2003015128A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE382188T1 (en) 2003-10-31 2008-01-15 Nxp Bv MICROELECTROMECHANICAL HIGH FREQUENCY SYSTEMS AND METHOD FOR PRODUCING SUCH SYSTEMS
EP1808046B1 (en) * 2004-10-27 2010-09-22 Epcos Ag Reduction of air damping in mems device
JP5976319B2 (en) * 2008-09-12 2016-08-23 エックスバイオテク，インコーポレイテッドＸｂｉｏｔｅｃｈ，Ｉｎｃ． Targeting pathogenic monocytes
US8570705B2 (en) 2010-01-15 2013-10-29 Wispry, Inc. MEMS sprung cantilever tunable capacitors and methods
DE102010013611A1 (en) * 2010-03-22 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hybrid actuator element e.g. electrostatic actuator, for actuating high temperature prevail or aggressive fluid in fluid system, has deflection element and housing part that comprise sintering layers, and arms made of ceramic layers
US8916996B2 (en) * 2011-07-29 2014-12-23 General Electric Company Electrical distribution system
CN103943420B (en) * 2014-04-15 2017-06-23 清华大学 MEMS relay, cantilever switch and forming method thereof
CN104064407B (en) * 2014-06-12 2016-04-20 清华大学 Micro electro-mechanical system switch
CN114758928A (en) * 2017-07-24 2022-07-15 中北大学 Straight plate type practical radio frequency MEMS switch
CN107424875B (en) * 2017-07-24 2020-06-09 中北大学 Cross single-pole triple-throw switch
CN108648964B (en) * 2018-06-15 2020-06-09 中北大学 Radio frequency MEMS switch based on electrode structure on non-release hole

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch

Also Published As

Publication number Publication date
WO2003015128A3 (en) 2003-09-25
WO2003015128A2 (en) 2003-02-20

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase