JPH04343318A - Torsional vibrator - Google Patents

Torsional vibrator

Info

Publication number
JPH04343318A
JPH04343318A JP14271091A JP14271091A JPH04343318A JP H04343318 A JPH04343318 A JP H04343318A JP 14271091 A JP14271091 A JP 14271091A JP 14271091 A JP14271091 A JP 14271091A JP H04343318 A JPH04343318 A JP H04343318A
Authority
JP
Japan
Prior art keywords
plate member
5b
comb
torsional vibrator
holding members
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14271091A
Inventor
Wataru Nakagawa
Michihiko Tsuruoka
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP14271091A priority Critical patent/JPH04343318A/en
Publication of JPH04343318A publication Critical patent/JPH04343318A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide the torsional vibrator of a thin type which can be driven by a low voltage and at a high speed, and by which a large deflection angle is obtained.
CONSTITUTION: The torsional vibrator is provided with a sheet-like plate member 1 having a first and a second movable electrodes of a comb-teeth shape laminated through an insulating film, holding members 3a, 3b joined to the plate member 1 and a substrate 7 on a shaft passing through the centroid of this plate member 1, and fixed electrodes 5a, 5b (5b is omitted from showing it in the figure) of a comb-teeth shape, which are engaged to comb teeth of the plate member 1 and have sufficient thickness, comparing with the plate member 1, and by impressing a voltage between a first and a second movable electrodes and the fixed electrodes 5a, 5b, the plate member 1 becomes rotatable in the periphery of the holding members 3a, 3b.
COPYRIGHT: (C)1992,JPO&Japio
JP14271091A 1991-05-20 1991-05-20 Torsional vibrator Pending JPH04343318A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14271091A JPH04343318A (en) 1991-05-20 1991-05-20 Torsional vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14271091A JPH04343318A (en) 1991-05-20 1991-05-20 Torsional vibrator

Publications (1)

Publication Number Publication Date
JPH04343318A true JPH04343318A (en) 1992-11-30

Family

ID=15321775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14271091A Pending JPH04343318A (en) 1991-05-20 1991-05-20 Torsional vibrator

Country Status (1)

Country Link
JP (1) JPH04343318A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6744173B2 (en) * 2000-03-24 2004-06-01 Analog Devices, Inc. Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6817725B2 (en) 2002-06-11 2004-11-16 Fujitsu Limited Micro mirror unit and method of making the same
EP1538476A1 (en) * 2003-12-02 2005-06-08 Samsung Electronics Co., Ltd. Micro mirror
KR100682961B1 (en) * 2006-01-20 2007-02-08 삼성전자주식회사 Rotational micro mirror
US7220009B2 (en) 2003-12-12 2007-05-22 Canon Kabushiki Kaisha Optical deflector
JP2008129069A (en) * 2006-11-16 2008-06-05 Denso Corp Two-dimensional light scanning device
US7445723B2 (en) 2001-08-24 2008-11-04 Samsung Electronics Co., Ltd. Optical scanner and method of fabricating the same
JP2010198035A (en) * 2010-04-26 2010-09-09 Fujitsu Ltd Micro mirror element

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6753638B2 (en) * 2000-02-03 2004-06-22 Calient Networks, Inc. Electrostatic actuator for micromechanical systems
US6744173B2 (en) * 2000-03-24 2004-06-01 Analog Devices, Inc. Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
US7445723B2 (en) 2001-08-24 2008-11-04 Samsung Electronics Co., Ltd. Optical scanner and method of fabricating the same
US6817725B2 (en) 2002-06-11 2004-11-16 Fujitsu Limited Micro mirror unit and method of making the same
US7145712B2 (en) 2002-06-11 2006-12-05 Fujitsu Limited Micro mirror unit and method of making the same
US7459331B2 (en) 2002-06-11 2008-12-02 Fujitsu Limited Micro mirror unit and method of making the same
US7185994B2 (en) 2003-12-02 2007-03-06 Samsung Electronics Co., Ltd. Micro mirror and method for fabricating the same
EP1538476A1 (en) * 2003-12-02 2005-06-08 Samsung Electronics Co., Ltd. Micro mirror
US7301692B2 (en) 2003-12-02 2007-11-27 Samsung Electronics Co., Ltd. Micro mirror and method for fabricating the same
US7220009B2 (en) 2003-12-12 2007-05-22 Canon Kabushiki Kaisha Optical deflector
KR100682961B1 (en) * 2006-01-20 2007-02-08 삼성전자주식회사 Rotational micro mirror
JP2008129069A (en) * 2006-11-16 2008-06-05 Denso Corp Two-dimensional light scanning device
JP2010198035A (en) * 2010-04-26 2010-09-09 Fujitsu Ltd Micro mirror element

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