ATE66241T1 - Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium. - Google Patents

Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium.

Info

Publication number
ATE66241T1
ATE66241T1 AT87402083T AT87402083T ATE66241T1 AT E66241 T1 ATE66241 T1 AT E66241T1 AT 87402083 T AT87402083 T AT 87402083T AT 87402083 T AT87402083 T AT 87402083T AT E66241 T1 ATE66241 T1 AT E66241T1
Authority
AT
Austria
Prior art keywords
polishing
cerium
organic glass
polishing composition
composition
Prior art date
Application number
AT87402083T
Other languages
English (en)
Inventor
Francis Tastu
Pierre Melard
Original Assignee
Rhone Poulenc Chimie
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rhone Poulenc Chimie filed Critical Rhone Poulenc Chimie
Application granted granted Critical
Publication of ATE66241T1 publication Critical patent/ATE66241T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Catalysts (AREA)
  • Surface Treatment Of Glass (AREA)
AT87402083T 1986-09-26 1987-09-18 Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium. ATE66241T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8613443A FR2604443A1 (fr) 1986-09-26 1986-09-26 Composition de polissage a base de cerium destinee au polissage des verres organiques
EP87402083A EP0266233B1 (de) 1986-09-26 1987-09-18 Verfahren zur Polierung von organischen Gläsern mit einer Polierzusammensetzung auf der Basis von Cerium

Publications (1)

Publication Number Publication Date
ATE66241T1 true ATE66241T1 (de) 1991-08-15

Family

ID=9339291

Family Applications (1)

Application Number Title Priority Date Filing Date
AT87402083T ATE66241T1 (de) 1986-09-26 1987-09-18 Verfahren zur polierung von organischen glaesern mit einer polierzusammensetzung auf der basis von cerium.

Country Status (10)

Country Link
US (1) US4769073A (de)
EP (1) EP0266233B1 (de)
JP (1) JPS63169262A (de)
AT (1) ATE66241T1 (de)
AU (1) AU601495B2 (de)
BR (1) BR8704936A (de)
DE (1) DE3772151D1 (de)
ES (1) ES2025681T3 (de)
FR (1) FR2604443A1 (de)
PT (1) PT85796B (de)

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US4470726A (en) * 1982-10-04 1984-09-11 Halliburton Company Leg closure
FR2624519A1 (fr) * 1987-12-09 1989-06-16 Rhone Poulenc Chimie Composition de polissage perfectionnee a base de cerium et son procede de preparation
JPH01257563A (ja) * 1988-04-08 1989-10-13 Showa Denko Kk アルミニウム磁気ディスク研磨用組成物
JPH0284485A (ja) * 1988-09-20 1990-03-26 Showa Denko Kk アルミニウム磁気ディスク研磨用組成物
US5136818A (en) * 1990-10-01 1992-08-11 The United States Of America As Represented By The Secretary Of The Navy Method of polishing optical fiber
US5106394A (en) * 1990-10-01 1992-04-21 The United States Of America As Represented By The Secretary Of The Navy Fiber optic polishing system
US5264010A (en) * 1992-04-27 1993-11-23 Rodel, Inc. Compositions and methods for polishing and planarizing surfaces
DE69629431T2 (de) * 1995-03-15 2004-07-01 Hoya Corp. Verfahren zur herstellung eines niederschlags aus metalloxid
JP3359479B2 (ja) * 1995-11-07 2002-12-24 三井金属鉱業株式会社 研磨材、その製造方法及び研磨方法
KR100360787B1 (ko) * 1996-02-07 2003-01-29 히다치 가세고교 가부시끼가이샤 산화세륨연마제,반도체칩및반도체장치,그들의제조법및기판의연마법
US5897675A (en) * 1996-04-26 1999-04-27 Degussa Aktiengesellschaft Cerium oxide-metal/metalloid oxide mixture
US5962343A (en) * 1996-07-30 1999-10-05 Nissan Chemical Industries, Ltd. Process for producing crystalline ceric oxide particles and abrasive
US5759917A (en) * 1996-12-30 1998-06-02 Cabot Corporation Composition for oxide CMP
SG72802A1 (en) * 1997-04-28 2000-05-23 Seimi Chem Kk Polishing agent for semiconductor and method for its production
DE59802570D1 (de) * 1997-09-26 2002-01-31 Infineon Technologies Ag Poliermittel und die verwendung dieses poliermittels zum planarisieren eines halbleitersubstrats
US6435947B2 (en) 1998-05-26 2002-08-20 Cabot Microelectronics Corporation CMP polishing pad including a solid catalyst
US6177026B1 (en) 1998-05-26 2001-01-23 Cabot Microelectronics Corporation CMP slurry containing a solid catalyst
EP0969057A1 (de) * 1998-07-03 2000-01-05 International Business Machines Corporation Doppelwertige Seltenerdadditive für Polierschlämme
JP3983949B2 (ja) * 1998-12-21 2007-09-26 昭和電工株式会社 研磨用酸化セリウムスラリー、その製造法及び研磨方法
KR20010077710A (ko) * 2000-02-08 2001-08-20 구자홍 디스플레이 패널의 면세정용 연마제
EA003909B1 (ru) * 2000-05-16 2003-10-30 Мицуи Майнинг Энд Смелтинг Ко., Лтд. Абразив на основе церия, исходный материал для него и способы их получения
US6454821B1 (en) 2000-06-21 2002-09-24 Praxair S. T. Technology, Inc. Polishing composition and method
US6437336B1 (en) 2000-08-15 2002-08-20 Crismatec Scintillator crystals and their applications and manufacturing process
US7887714B2 (en) * 2000-12-25 2011-02-15 Nissan Chemical Industries, Ltd. Cerium oxide sol and abrasive
CN1746255B (zh) * 2001-02-20 2010-11-10 日立化成工业株式会社 抛光剂及基片的抛光方法
US7077880B2 (en) * 2004-01-16 2006-07-18 Dupont Air Products Nanomaterials Llc Surface modified colloidal abrasives, including stable bimetallic surface coated silica sols for chemical mechanical planarization
US7513920B2 (en) * 2002-02-11 2009-04-07 Dupont Air Products Nanomaterials Llc Free radical-forming activator attached to solid and used to enhance CMP formulations
US20030162398A1 (en) 2002-02-11 2003-08-28 Small Robert J. Catalytic composition for chemical-mechanical polishing, method of using same, and substrate treated with same
TWI314949B (en) * 2002-09-06 2009-09-21 Seimi Chem Kk Polishing compound for insulating film for semiconductor integrated circuit and method for producing semiconductor integrated circuit
US20040217006A1 (en) * 2003-03-18 2004-11-04 Small Robert J. Residue removers for electrohydrodynamic cleaning of semiconductors
WO2006105020A1 (en) 2005-03-25 2006-10-05 Dupont Air Products Nanomaterials Llc Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers
US7467988B2 (en) * 2005-04-08 2008-12-23 Ferro Corporation Slurry composition and method for polishing organic polymer-based ophthalmic substrates
US7294044B2 (en) * 2005-04-08 2007-11-13 Ferro Corporation Slurry composition and method for polishing organic polymer-based ophthalmic substrates
WO2011054193A1 (zh) * 2009-11-06 2011-05-12 Wang Chen 一种化学机械抛光液
US10508220B2 (en) * 2015-07-10 2019-12-17 Ferro Corporation Slurry composition and additives and method for polishing organic polymer-based ophthalmic substrates
KR101900543B1 (ko) * 2015-10-02 2018-09-20 삼성에스디아이 주식회사 유기막 ｃｍｐ 슬러리 조성물 및 이를 이용한 연마방법
JP6753518B2 (ja) * 2017-03-27 2020-09-09 日立化成株式会社 研磨液、研磨液セット、添加液及び研磨方法
CN116891596B (zh) * 2023-07-25 2024-04-05 铨盛聚碳科技股份有限公司 一种含有稀土磺酸盐插层无机物的阻燃剂以及制备方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3097083A (en) * 1959-07-02 1963-07-09 American Potash & Chem Corp Polishing composition and process of forming same
DE1263955B (de) * 1962-04-11 1968-03-21 Libbey Owens Ford Glass Co Verfahren zum Polieren einer Glasoberflaeche
US3262766A (en) * 1963-11-21 1966-07-26 Grace W R & Co Rare-earth oxides for polishing glass
US3768989A (en) * 1968-08-19 1973-10-30 N Goetzinger Process for the preparation of a rare earth oxide polishing composition
EP0031204B1 (de) * 1979-11-29 1984-06-06 Rhone-Poulenc Industries Verfahren zum Polieren mineralischer und organischer Werkstoffe
FR2472601A1 (fr) * 1979-12-27 1981-07-03 Rhone Poulenc Ind Procede de fabrication de compositions de polissage a base de cerium
FR2545830B1 (fr) * 1983-05-13 1986-01-03 Rhone Poulenc Spec Chim Nouvelle composition de polissage a base de cerium et son procede de fabrication
FR2549846B1 (fr) * 1983-07-29 1986-12-26 Rhone Poulenc Spec Chim Nouvelle composition de polissage a base de cerium et son procede de fabrication

Also Published As

Publication number Publication date
EP0266233B1 (de) 1991-08-14
PT85796B (pt) 1990-08-31
JPS63169262A (ja) 1988-07-13
PT85796A (fr) 1987-10-01
ES2025681T3 (es) 1992-04-01
AU7904487A (en) 1988-03-31
BR8704936A (pt) 1988-05-17
US4769073A (en) 1988-09-06
AU601495B2 (en) 1990-09-13
FR2604443A1 (fr) 1988-04-01
EP0266233A1 (de) 1988-05-04
DE3772151D1 (de) 1991-09-19

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee