ATE652T1 - METHOD OF ETCHING COPPER OR COPPER ALLOY SURFACES. - Google Patents
METHOD OF ETCHING COPPER OR COPPER ALLOY SURFACES.Info
- Publication number
- ATE652T1 ATE652T1 AT79104575T AT79104575T ATE652T1 AT E652 T1 ATE652 T1 AT E652T1 AT 79104575 T AT79104575 T AT 79104575T AT 79104575 T AT79104575 T AT 79104575T AT E652 T1 ATE652 T1 AT E652T1
- Authority
- AT
- Austria
- Prior art keywords
- copper
- etching solution
- etching
- oxidizing agent
- cathode
- Prior art date
Links
- 238000005530 etching Methods 0.000 title abstract 7
- 229910000881 Cu alloy Inorganic materials 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000010949 copper Substances 0.000 abstract 5
- 239000000243 solution Substances 0.000 abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 4
- 229910052802 copper Inorganic materials 0.000 abstract 4
- 239000007800 oxidant agent Substances 0.000 abstract 3
- 238000005868 electrolysis reaction Methods 0.000 abstract 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract 1
- 239000003929 acidic solution Substances 0.000 abstract 1
- RUTXIHLAWFEWGM-UHFFFAOYSA-H iron(3+) sulfate Chemical compound [Fe+3].[Fe+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RUTXIHLAWFEWGM-UHFFFAOYSA-H 0.000 abstract 1
- 229910000360 iron(III) sulfate Inorganic materials 0.000 abstract 1
- 230000008929 regeneration Effects 0.000 abstract 1
- 238000011069 regeneration method Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/46—Regeneration of etching compositions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Crushing And Grinding (AREA)
- Manufacture And Refinement Of Metals (AREA)
Abstract
Method of etching of surfaces of copper or copper alloys by way of an acidic solution containing an oxidizing agent. After removal of the copper surface, the etching solution is passed for regeneration of the oxidizing agent through an electrolysis cell having an anode and a cathode, with copper being deposited on the cathode. The etching solution is maintained free of chloride ions and contains as the oxidizing agent ferric sulfate in a concentration of up to about 140 g of Fe/1 etching solution, whereby the copper content of the etching solution is adjusted to at least 10 g Cu per liter etching solution, while the current density in the electrolysis cell is maintained at at least 2A/dm2.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2850542A DE2850542C2 (en) | 1978-11-22 | 1978-11-22 | Process for etching surfaces made of copper or copper alloys |
| EP79104575A EP0011800B1 (en) | 1978-11-22 | 1979-11-19 | Etching process for copper and copper alloy surfaces |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE652T1 true ATE652T1 (en) | 1982-02-15 |
Family
ID=6055278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT79104575T ATE652T1 (en) | 1978-11-22 | 1979-11-19 | METHOD OF ETCHING COPPER OR COPPER ALLOY SURFACES. |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US4265722A (en) |
| EP (1) | EP0011800B1 (en) |
| JP (1) | JPS5573872A (en) |
| AT (1) | ATE652T1 (en) |
| AU (1) | AU527609B2 (en) |
| BE (1) | BE893883Q (en) |
| CA (1) | CA1152939A (en) |
| DE (1) | DE2850542C2 (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4416725A (en) * | 1982-12-30 | 1983-11-22 | International Business Machines Corporation | Copper texturing process |
| DE3539886A1 (en) * | 1985-11-11 | 1987-05-14 | Hoellmueller Maschbau H | METHOD AND DEVICE FOR ETCHING AN AT LEAST PARTLY OF METAL, PREFERABLY COPPER, EXISTING AGENT |
| US4879045A (en) * | 1986-01-13 | 1989-11-07 | Eggerichs Terry L | Method and apparatus for electromagnetically treating a fluid |
| US5531874A (en) * | 1994-06-17 | 1996-07-02 | International Business Machines Corporation | Electroetching tool using localized application of channelized flow of electrolyte |
| GB2293390A (en) * | 1994-09-20 | 1996-03-27 | British Tech Group | Simultaneous etchant regeneration and metal deposition by electrodialysis |
| DE19850530A1 (en) * | 1998-11-03 | 2000-05-25 | Eilenburger Elektrolyse & Umwelttechnik Gmbh | Circulation process for pickling copper and copper alloys |
| US6656370B1 (en) * | 2000-10-13 | 2003-12-02 | Lenora Toscano | Method for the manufacture of printed circuit boards |
| DE10059743A1 (en) * | 2000-12-01 | 2002-06-20 | Rolf Hempelmann | Catalyst separation process |
| SE519898C2 (en) * | 2001-09-10 | 2003-04-22 | Obducat Ab | Ways to etch copper on card and device and electrolyte for carrying out the method |
| DE10326767B4 (en) * | 2003-06-13 | 2006-02-02 | Atotech Deutschland Gmbh | A method of regenerating ferrous etchant solutions for use in etching or pickling copper or copper alloys, and an apparatus for performing the same |
| US20050067378A1 (en) * | 2003-09-30 | 2005-03-31 | Harry Fuerhaupter | Method for micro-roughening treatment of copper and mixed-metal circuitry |
| CN103924243A (en) * | 2013-01-11 | 2014-07-16 | 上海飞凯光电材料股份有限公司 | Etching solution composition |
| EP2754732B1 (en) * | 2013-01-15 | 2015-03-11 | ATOTECH Deutschland GmbH | Aqueous composition for etching of copper and copper alloys |
| WO2020004034A1 (en) | 2018-06-28 | 2020-01-02 | 古河電気工業株式会社 | Copper alloy sheet, copper alloy sheet manufacturing method, and connector using copper alloy sheet |
| CN108866572A (en) * | 2018-08-27 | 2018-11-23 | 苏碧云 | A kind of iron displacement copper electrolysis cells |
| CN111809184B (en) * | 2020-07-15 | 2022-03-04 | 深圳市祺鑫环保科技有限公司 | Method for recycling regenerated seed liquid |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3033793A (en) * | 1958-08-13 | 1962-05-08 | Photo Engravers Res Inc | Powderless etching of copper photoengraving plates |
| US3622478A (en) * | 1960-11-14 | 1971-11-23 | Gen Electric | Continuous regeneration of ferric sulfate pickling bath |
| SU438729A1 (en) * | 1970-07-17 | 1975-01-23 | Предприятие П/Я А-7125 | The method of regeneration of sulphate and chloride pickling solutions of iron |
| US3974050A (en) * | 1971-10-12 | 1976-08-10 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Method of and apparatus for processing the surface of bodies |
| US3788915A (en) * | 1972-02-09 | 1974-01-29 | Shipley Co | Regeneration of spent etchant |
| US4153531A (en) * | 1976-08-21 | 1979-05-08 | Kernforschungsanlage Julich Gesellschaft Mit Beschrankter Haftung | Apparatus for electrochemically processing metallic surfaces |
| DE2641905C2 (en) * | 1976-09-17 | 1986-03-20 | Geb. Bakulina Galina Aleksandrovna Batova | Process for the regeneration of used etching solutions |
| DE2655137C2 (en) * | 1976-12-04 | 1978-06-08 | Kernforschungsanlage Juelich Gmbh, 5170 Juelich | Process for the electrochemical processing of metallic surfaces |
-
1978
- 1978-11-22 DE DE2850542A patent/DE2850542C2/en not_active Expired
-
1979
- 1979-11-19 AT AT79104575T patent/ATE652T1/en not_active IP Right Cessation
- 1979-11-19 EP EP79104575A patent/EP0011800B1/en not_active Expired
- 1979-11-20 US US06/096,137 patent/US4265722A/en not_active Expired - Lifetime
- 1979-11-22 JP JP15077979A patent/JPS5573872A/en active Granted
- 1979-11-22 CA CA000340377A patent/CA1152939A/en not_active Expired
- 1979-11-22 AU AU53093/79A patent/AU527609B2/en not_active Ceased
-
1982
- 1982-07-20 BE BE0/208628A patent/BE893883Q/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPS636632B2 (en) | 1988-02-10 |
| EP0011800A1 (en) | 1980-06-11 |
| BE893883Q (en) | 1982-11-16 |
| AU527609B2 (en) | 1983-03-10 |
| AU5309379A (en) | 1980-05-29 |
| CA1152939A (en) | 1983-08-30 |
| DE2850542C2 (en) | 1982-07-01 |
| US4265722A (en) | 1981-05-05 |
| JPS5573872A (en) | 1980-06-03 |
| EP0011800B1 (en) | 1982-02-03 |
| DE2850542A1 (en) | 1980-06-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| REN | Ceased due to non-payment of the annual fee |