ATE557406T1 - Strukturierte elektretstrukturen und verfahren zur herstellung von strukturierten elektretstrukturen - Google Patents

Strukturierte elektretstrukturen und verfahren zur herstellung von strukturierten elektretstrukturen

Info

Publication number
ATE557406T1
ATE557406T1 AT09782931T AT09782931T ATE557406T1 AT E557406 T1 ATE557406 T1 AT E557406T1 AT 09782931 T AT09782931 T AT 09782931T AT 09782931 T AT09782931 T AT 09782931T AT E557406 T1 ATE557406 T1 AT E557406T1
Authority
AT
Austria
Prior art keywords
electrical structures
dielectric
structured electrical
patterned
producing
Prior art date
Application number
AT09782931T
Other languages
English (en)
Inventor
Vladimir Leonov
Original Assignee
Imec
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imec filed Critical Imec
Application granted granted Critical
Publication of ATE557406T1 publication Critical patent/ATE557406T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G7/00—Capacitors in which the capacitance is varied by non-mechanical means; Processes of their manufacture
    • H01G7/02—Electrets, i.e. having a permanently-polarised dielectric
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/01—Electrostatic transducers characterised by the use of electrets
    • H04R19/016—Electrostatic transducers characterised by the use of electrets for microphones

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Micromachines (AREA)
  • Laminated Bodies (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
AT09782931T 2008-09-12 2009-09-11 Strukturierte elektretstrukturen und verfahren zur herstellung von strukturierten elektretstrukturen ATE557406T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US9659808P 2008-09-12 2008-09-12
PCT/EP2009/061825 WO2010029161A1 (en) 2008-09-12 2009-09-11 Patterned electret structures and methods for manufacturing patterned electret structures

Publications (1)

Publication Number Publication Date
ATE557406T1 true ATE557406T1 (de) 2012-05-15

Family

ID=41319553

Family Applications (1)

Application Number Title Priority Date Filing Date
AT09782931T ATE557406T1 (de) 2008-09-12 2009-09-11 Strukturierte elektretstrukturen und verfahren zur herstellung von strukturierten elektretstrukturen

Country Status (5)

Country Link
US (1) US8975791B2 (de)
EP (1) EP2335258B1 (de)
JP (1) JP5474977B2 (de)
AT (1) ATE557406T1 (de)
WO (1) WO2010029161A1 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2959833B1 (fr) * 2010-05-07 2015-06-12 Inst Nat Sciences Appliq Procede de nano-structure topographique et electrique d'un film mince de polymere electret et film mince de polymere electret obtenu
JP2012085515A (ja) * 2010-09-16 2012-04-26 Murata Mfg Co Ltd エレクトレットの帯電装置及びエレクトレットの帯電方法、振動発電装置
JP5931457B2 (ja) * 2012-01-17 2016-06-08 学校法人 関西大学 エレクトレットの製造方法、エレクトレット、発電装置
JP5627130B2 (ja) 2012-08-30 2014-11-19 アオイ電子株式会社 正イオンを含有したエレクトレットの形成方法
JP6140961B2 (ja) * 2012-09-25 2017-06-07 東邦化成株式会社 微細エレクトレットパターンの製造方法及びその検査方法
JP2014107890A (ja) * 2012-11-26 2014-06-09 Panasonic Corp エレクトレット素子およびそれを用いた振動発電器
JP6221420B2 (ja) * 2013-07-02 2017-11-01 株式会社リコー 静電電動機
DE102013217312B4 (de) * 2013-08-30 2016-06-30 Robert Bosch Gmbh Kapazitives MEMS-Bauelement mit einer druckempfindlichen Membran
DE102014208645A1 (de) * 2014-05-08 2015-11-12 Robert Bosch Gmbh Verfahren zur Herstellung eines mehrschichtigen Elektret-Bauteils
CN104058364B (zh) * 2014-06-13 2016-03-23 杭州电子科技大学 一种图形化薄膜驻极体的制备方法
JP2017099208A (ja) * 2015-11-27 2017-06-01 日本電信電話株式会社 エレクトレットおよびエレクトレットの製造方法
WO2018115226A1 (en) * 2016-12-22 2018-06-28 Koninklijke Philips N.V. Systems and methods of operation of capacitive radio frequency micro-electromechanical switches
US20190035562A1 (en) 2017-05-26 2019-01-31 Flash Power Capacitors, Llc High energy density capacitor system and method
WO2018218164A1 (en) 2017-05-26 2018-11-29 Flash Power Capacitors, Llc High energy density capacitor and wireless charging system
EP3631825A4 (de) * 2017-05-26 2021-03-17 Flash Power Capacitors, LLC Kondensator mit hoher energiedichte und drahtloses ladesystem
WO2019161256A2 (en) 2018-02-15 2019-08-22 The Charles Stark Draper Laboratory, Inc. Electrostatic motor
CN113576574A (zh) * 2021-07-28 2021-11-02 中国科学院深圳先进技术研究院 一种神经套管的制备方法、装置、电子设备及存储介质

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5632772B2 (de) 1973-10-22 1981-07-30
JPH06214440A (ja) 1993-01-18 1994-08-05 Dainippon Printing Co Ltd 電荷保持媒体を用いた静電印刷システム
BE1007902A3 (nl) * 1993-12-23 1995-11-14 Philips Electronics Nv Schakelelement met geheugen voorzien van schottky tunnelbarriere.
US6870939B2 (en) * 2001-11-28 2005-03-22 Industrial Technology Research Institute SMT-type structure of the silicon-based electret condenser microphone
JP2006108502A (ja) * 2004-10-07 2006-04-20 Sony Corp 微小コンデンサおよびその製造方法、ならびに電子機器
US20060214535A1 (en) * 2005-03-22 2006-09-28 Salmon Peter C Energy converter utilizing electrostatics
JP2008021787A (ja) * 2006-07-12 2008-01-31 Matsushita Electric Ind Co Ltd エレクトレット及びその製造方法、並びにエレクトレットを備えたコンデンサを有する音響感応装置
JP4390796B2 (ja) * 2006-10-30 2009-12-24 三洋電機株式会社 エレクトレット素子および静電動作装置

Also Published As

Publication number Publication date
US20110163615A1 (en) 2011-07-07
JP5474977B2 (ja) 2014-04-16
JP2012502493A (ja) 2012-01-26
EP2335258B1 (de) 2012-05-09
US8975791B2 (en) 2015-03-10
EP2335258A1 (de) 2011-06-22
WO2010029161A1 (en) 2010-03-18

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