ATE538504T1 - Integrale thermische kompensation für einen elektromechanischen aktuator - Google Patents

Integrale thermische kompensation für einen elektromechanischen aktuator

Info

Publication number
ATE538504T1
ATE538504T1 AT04811531T AT04811531T ATE538504T1 AT E538504 T1 ATE538504 T1 AT E538504T1 AT 04811531 T AT04811531 T AT 04811531T AT 04811531 T AT04811531 T AT 04811531T AT E538504 T1 ATE538504 T1 AT E538504T1
Authority
AT
Austria
Prior art keywords
cma
motion
amplifying mechanism
cte
thermal expansion
Prior art date
Application number
AT04811531T
Other languages
English (en)
Inventor
Jeffery Moler
Aaron Dickey
Keith Thornhill
Original Assignee
Viking Technologies Lc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viking Technologies Lc filed Critical Viking Technologies Lc
Application granted granted Critical
Publication of ATE538504T1 publication Critical patent/ATE538504T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H02N2/043—Mechanical transmission means, e.g. for stroke amplification
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Control Of Position Or Direction (AREA)
AT04811531T 2003-11-20 2004-11-18 Integrale thermische kompensation für einen elektromechanischen aktuator ATE538504T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52380803P 2003-11-20 2003-11-20
PCT/US2004/038828 WO2005053045A2 (en) 2003-11-20 2004-11-18 Integral thermal compensation for an electro-mechanical actuator

Publications (1)

Publication Number Publication Date
ATE538504T1 true ATE538504T1 (de) 2012-01-15

Family

ID=34632827

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04811531T ATE538504T1 (de) 2003-11-20 2004-11-18 Integrale thermische kompensation für einen elektromechanischen aktuator

Country Status (9)

Country Link
US (2) US7126259B2 (de)
EP (1) EP1685605B1 (de)
JP (1) JP4740870B2 (de)
KR (1) KR100849155B1 (de)
CN (1) CN100583481C (de)
AT (1) ATE538504T1 (de)
BR (1) BRPI0416808A (de)
MX (1) MXPA06005699A (de)
WO (1) WO2005053045A2 (de)

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US7939990B2 (en) * 2009-01-30 2011-05-10 Integrated Device Technology, Inc. Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
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WO2011006028A2 (en) 2009-07-10 2011-01-13 Viking At, Llc Small scale smart material actuator and energy harvesting apparatus
WO2011006164A2 (en) 2009-07-10 2011-01-13 Viking At, Llc Mountable arm smart material actuator and energy harvesting apparatus
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WO2011103324A2 (en) * 2010-02-17 2011-08-25 Viking At, Llc Smart material actuator capable of operating in three dimensions
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US20130108475A1 (en) * 2011-10-26 2013-05-02 Viking At, Llc Actuator-Driven Pinch Pump
WO2014074828A1 (en) * 2012-11-08 2014-05-15 Viking At, Llc Compressor having a graphite piston in a glass cylinder
WO2015100280A1 (en) 2013-12-24 2015-07-02 Viking At, Llc Mechanically amplified smart material actuator utilizing layered web assembly
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IT201600132144A1 (it) * 2016-12-29 2018-06-29 St Microelectronics Srl Dispositivo attuatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
US10996419B2 (en) 2017-07-31 2021-05-04 Newport Corporation Thermal compensating optical component mount and related devices
EP3502711B1 (de) * 2017-12-21 2021-08-25 Universität der Bundeswehr München Verfahren zur thermomechanischen stabilisierung einer vorrichtung, steuerungseinheit, thermomechanisches steuerungssystem und vorrichtung
IT201800002364A1 (it) 2018-02-02 2019-08-02 St Microelectronics Srl Dispositivo micro-manipolatore micro-elettro-meccanico con comando piezoelettrico, mobile nel piano
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Also Published As

Publication number Publication date
KR100849155B1 (ko) 2008-07-30
BRPI0416808A (pt) 2007-01-09
JP2007512713A (ja) 2007-05-17
US20060017349A1 (en) 2006-01-26
WO2005053045A3 (en) 2005-08-04
EP1685605B1 (de) 2011-12-21
CN100583481C (zh) 2010-01-20
CN1902767A (zh) 2007-01-24
EP1685605A2 (de) 2006-08-02
MXPA06005699A (es) 2007-05-23
JP4740870B2 (ja) 2011-08-03
WO2005053045A2 (en) 2005-06-09
US7126259B2 (en) 2006-10-24
US20050146248A1 (en) 2005-07-07
KR20060101775A (ko) 2006-09-26

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