ATE533340T1 - Verfahren und vorrichtung zur akkuraten auftragung von strukturen auf ein substrat - Google Patents
Verfahren und vorrichtung zur akkuraten auftragung von strukturen auf ein substratInfo
- Publication number
- ATE533340T1 ATE533340T1 AT10152312T AT10152312T ATE533340T1 AT E533340 T1 ATE533340 T1 AT E533340T1 AT 10152312 T AT10152312 T AT 10152312T AT 10152312 T AT10152312 T AT 10152312T AT E533340 T1 ATE533340 T1 AT E533340T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- provision
- processing head
- lighting
- scanning
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/12—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns
- H05K3/1241—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing
- H05K3/125—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using thick film techniques, e.g. printing techniques to apply the conductive material or similar techniques for applying conductive paste or ink patterns by ink-jet printing or drawing by dispensing by ink-jet printing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J11/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form
- B41J11/0015—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, for supporting or handling copy material in sheet or web form for treating before, during or after printing or for uniform coating or laminating the copy material before or after printing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0079—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
- H10K71/611—Forming conductive regions or layers, e.g. electrodes using printing deposition, e.g. ink jet printing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0266—Marks, test patterns or identification means
- H05K1/0269—Marks, test patterns or identification means for visual or optical inspection
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/013—Inkjet printing, e.g. for printing insulating material or resist
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/16—Inspection; Monitoring; Aligning
- H05K2203/163—Monitoring a manufacturing process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL1026013A NL1026013C2 (nl) | 2004-04-23 | 2004-04-23 | Werkwijze en inrichting voor het nauwkeurig aanbrengen van structuren op een substraat. |
NL1026880A NL1026880C1 (nl) | 2004-04-23 | 2004-08-19 | Werkwijze en inrichting voor het nauwkeurig aanbrengen van structuren op een substraat. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE533340T1 true ATE533340T1 (de) | 2011-11-15 |
Family
ID=34965607
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05736360T ATE458388T1 (de) | 2004-04-23 | 2005-04-22 | Verfahren und vorrichtung zum präzisen aufbringen von strukturen auf ein substrat |
AT10152312T ATE533340T1 (de) | 2004-04-23 | 2005-04-22 | Verfahren und vorrichtung zur akkuraten auftragung von strukturen auf ein substrat |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05736360T ATE458388T1 (de) | 2004-04-23 | 2005-04-22 | Verfahren und vorrichtung zum präzisen aufbringen von strukturen auf ein substrat |
Country Status (11)
Country | Link |
---|---|
US (1) | US8231931B2 (de) |
EP (2) | EP2178352B1 (de) |
JP (1) | JP2007534170A (de) |
KR (1) | KR101157286B1 (de) |
CN (2) | CN102933038B (de) |
AT (2) | ATE458388T1 (de) |
DE (1) | DE602005019403D1 (de) |
ES (1) | ES2339572T3 (de) |
NL (2) | NL1026013C2 (de) |
TW (2) | TWI332811B (de) |
WO (1) | WO2005104637A1 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110148985A1 (en) * | 2009-12-23 | 2011-06-23 | Ulvac, Inc. | Parallel motion system for industrial printing |
CN102120387B (zh) * | 2010-01-08 | 2013-05-08 | 广东正业科技股份有限公司 | 全印制电子及电路板喷墨打印设备 |
KR20140112605A (ko) * | 2013-03-11 | 2014-09-24 | 삼성디스플레이 주식회사 | 유기 패턴 검사 방법 |
WO2018197531A1 (de) * | 2017-04-28 | 2018-11-01 | Schmid Rhyner Ag | Vorrichtung und verfahren zum erzeugen einer texturierten beschichtung |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3832176A (en) | 1973-04-06 | 1974-08-27 | Eastman Kodak Co | Novel photoresist article and process for its use |
US4674174A (en) | 1984-10-17 | 1987-06-23 | Kabushiki Kaisha Toshiba | Method for forming a conductor pattern using lift-off |
US5932012A (en) * | 1995-06-23 | 1999-08-03 | Hitachi Techno Engineering Co., Ltd. | Paste applicator having positioning means |
US6354700B1 (en) * | 1997-02-21 | 2002-03-12 | Ncr Corporation | Two-stage printing process and apparatus for radiant energy cured ink |
JP4003273B2 (ja) * | 1998-01-19 | 2007-11-07 | セイコーエプソン株式会社 | パターン形成方法および基板製造装置 |
GB2350321A (en) * | 1999-05-27 | 2000-11-29 | Patterning Technologies Ltd | Method of forming a masking or spacer pattern on a substrate using inkjet droplet deposition |
US6165658A (en) * | 1999-07-06 | 2000-12-26 | Creo Ltd. | Nonlinear image distortion correction in printed circuit board manufacturing |
JP2001337461A (ja) | 2000-05-25 | 2001-12-07 | Dainippon Screen Mfg Co Ltd | 描画装置 |
EP1223615A1 (de) * | 2001-01-10 | 2002-07-17 | Eidgenössische Technische Hochschule Zürich | Verfahren zur Herstellung einer Struktur unter Verwendung von Nanopartikeln |
CN1289207C (zh) * | 2001-06-01 | 2006-12-13 | 利特斯公司 | 可互换的微型沉积头装置和方法 |
US20020192577A1 (en) * | 2001-06-15 | 2002-12-19 | Bernard Fay | Automated overlay metrology system |
JP2003156853A (ja) * | 2001-11-20 | 2003-05-30 | Pentax Corp | 露光装置および露光方法 |
ITUD20010220A1 (it) * | 2001-12-27 | 2003-06-27 | New System Srl | Sistema per la realizzazione di una stratificazione di materiale elettronicamente interattivo |
JP2004012902A (ja) * | 2002-06-07 | 2004-01-15 | Fuji Photo Film Co Ltd | 描画装置及びこの描画装置を用いた描画方法 |
JP2004126181A (ja) | 2002-10-02 | 2004-04-22 | Fuji Photo Film Co Ltd | 露光システム |
-
2004
- 2004-04-23 NL NL1026013A patent/NL1026013C2/nl not_active IP Right Cessation
- 2004-08-19 NL NL1026880A patent/NL1026880C1/nl not_active IP Right Cessation
-
2005
- 2005-04-22 EP EP10152312A patent/EP2178352B1/de not_active Not-in-force
- 2005-04-22 AT AT05736360T patent/ATE458388T1/de not_active IP Right Cessation
- 2005-04-22 ES ES05736360T patent/ES2339572T3/es active Active
- 2005-04-22 DE DE602005019403T patent/DE602005019403D1/de active Active
- 2005-04-22 US US11/578,247 patent/US8231931B2/en active Active
- 2005-04-22 JP JP2007509412A patent/JP2007534170A/ja active Pending
- 2005-04-22 WO PCT/NL2005/000298 patent/WO2005104637A1/en active Application Filing
- 2005-04-22 KR KR1020067021981A patent/KR101157286B1/ko active IP Right Grant
- 2005-04-22 CN CN201210441745.2A patent/CN102933038B/zh not_active Expired - Fee Related
- 2005-04-22 AT AT10152312T patent/ATE533340T1/de active
- 2005-04-22 EP EP05736360A patent/EP1757175B1/de not_active Not-in-force
- 2005-04-22 CN CN2005800125063A patent/CN1947479B/zh not_active Expired - Fee Related
- 2005-04-25 TW TW094113134A patent/TWI332811B/zh not_active IP Right Cessation
- 2005-04-25 TW TW099122827A patent/TWI347811B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL1026013C2 (nl) | 2005-10-25 |
CN102933038A (zh) | 2013-02-13 |
EP1757175B1 (de) | 2010-02-17 |
CN1947479B (zh) | 2013-04-03 |
US20080158282A1 (en) | 2008-07-03 |
ATE458388T1 (de) | 2010-03-15 |
EP2178352A3 (de) | 2010-09-08 |
ES2339572T3 (es) | 2010-05-21 |
KR20070046026A (ko) | 2007-05-02 |
EP2178352A2 (de) | 2010-04-21 |
US8231931B2 (en) | 2012-07-31 |
TWI332811B (en) | 2010-11-01 |
JP2007534170A (ja) | 2007-11-22 |
CN1947479A (zh) | 2007-04-11 |
KR101157286B1 (ko) | 2012-06-15 |
TW200610465A (en) | 2006-03-16 |
CN102933038B (zh) | 2016-08-31 |
WO2005104637A1 (en) | 2005-11-03 |
EP2178352B1 (de) | 2011-11-09 |
DE602005019403D1 (de) | 2010-04-01 |
NL1026880C1 (nl) | 2005-10-25 |
EP1757175A1 (de) | 2007-02-28 |
TW201038160A (en) | 2010-10-16 |
TWI347811B (en) | 2011-08-21 |
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