ATE526359T1 - Verfahren zur herstellung eines nanoporösen dielektrischen films - Google Patents

Verfahren zur herstellung eines nanoporösen dielektrischen films

Info

Publication number
ATE526359T1
ATE526359T1 AT04754861T AT04754861T ATE526359T1 AT E526359 T1 ATE526359 T1 AT E526359T1 AT 04754861 T AT04754861 T AT 04754861T AT 04754861 T AT04754861 T AT 04754861T AT E526359 T1 ATE526359 T1 AT E526359T1
Authority
AT
Austria
Prior art keywords
precursor material
matrix precursor
porogen
producing
dielectric film
Prior art date
Application number
AT04754861T
Other languages
English (en)
Inventor
Jason Niu
Jerry Hahnfeld
John Lyons
James Sedon
Craig Silvis
Original Assignee
Dow Global Technologies Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Global Technologies Llc filed Critical Dow Global Technologies Llc
Application granted granted Critical
Publication of ATE526359T1 publication Critical patent/ATE526359T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J9/00—Working-up of macromolecular substances to porous or cellular articles or materials; After-treatment thereof
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L65/00—Compositions of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Compositions of derivatives of such polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/28—Polymers of vinyl aromatic compounds
    • B01D71/281—Polystyrene
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D165/00—Coating compositions based on macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Coating compositions based on derivatives of such polymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/28—Polymers of vinyl aromatic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/44—Polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, not provided for in a single one of groups B01D71/26-B01D71/42
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2365/00—Characterised by the use of macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain; Derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2425/00—Characterised by the use of homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Derivatives of such polymers
    • C08J2425/02—Homopolymers or copolymers of hydrocarbons
    • C08J2425/04—Homopolymers or copolymers of styrene
    • C08J2425/06—Polystyrene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
    • C08L25/02—Homopolymers or copolymers of hydrocarbons
    • C08L25/04—Homopolymers or copolymers of styrene
    • C08L25/06—Polystyrene
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L25/00—Compositions of, homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Compositions of derivatives of such polymers
    • C08L25/02—Homopolymers or copolymers of hydrocarbons
    • C08L25/04—Homopolymers or copolymers of styrene
    • C08L25/08—Copolymers of styrene
AT04754861T 2004-06-10 2004-06-10 Verfahren zur herstellung eines nanoporösen dielektrischen films ATE526359T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2004/018390 WO2006001790A1 (en) 2004-06-10 2004-06-10 Method of forming a nanoporous dielectric film

Publications (1)

Publication Number Publication Date
ATE526359T1 true ATE526359T1 (de) 2011-10-15

Family

ID=34957992

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04754861T ATE526359T1 (de) 2004-06-10 2004-06-10 Verfahren zur herstellung eines nanoporösen dielektrischen films

Country Status (8)

Country Link
US (1) US20080090007A1 (de)
EP (1) EP1758953B1 (de)
JP (1) JP5160890B2 (de)
KR (1) KR101123436B1 (de)
CN (1) CN1968998B (de)
AT (1) ATE526359T1 (de)
TW (1) TWI384027B (de)
WO (1) WO2006001790A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2062275A2 (de) 2006-09-12 2009-05-27 University of Florida Research Foundation, Incorporated Nanoröhrchen-elektroden für kontaktanwendungen mit grossem oberflächenbereich
CN101139081B (zh) * 2007-08-10 2010-05-19 中国科学院上海技术物理研究所 具有纳米孔及其复合结构的纳米线材料的制备方法
KR20120023715A (ko) 2009-04-30 2012-03-13 유니버시티 오브 플로리다 리서치 파운데이션, 인크. 공기 캐소드 기반의 단일 벽 탄소 나노튜브
CN101613485B (zh) * 2009-06-23 2011-07-27 扬州大学 一种基于生物相容高分子的超多孔材料的制备方法
EP2652822A4 (de) 2010-12-17 2014-07-30 Univ Florida Wasserstoffoxidation und erzeugung über kohlenstoffschichten
AU2012240367A1 (en) 2011-04-04 2013-11-07 University Of Florida Research Foundation, Inc. Nanotube dispersants and dispersant free nanotube films therefrom
KR20160088346A (ko) 2013-11-20 2016-07-25 유니버시티 오브 플로리다 리서치 파운데이션, 아이엔씨. 탄소-함유 물질 상에서의 이산화탄소 환원
US11230503B2 (en) * 2017-06-27 2022-01-25 General Electric Company Resin for production of porous ceramic stereolithography and methods of its use
CN110285739B (zh) * 2019-06-14 2020-04-07 清华大学 一种亚微米级液膜的厚度的测量方法

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US5965679A (en) * 1996-09-10 1999-10-12 The Dow Chemical Company Polyphenylene oligomers and polymers
US6093636A (en) * 1998-07-08 2000-07-25 International Business Machines Corporation Process for manufacture of integrated circuit device using a matrix comprising porous high temperature thermosets
US6313185B1 (en) * 1998-09-24 2001-11-06 Honeywell International Inc. Polymers having backbones with reactive groups employed in crosslinking as precursors to nanoporous thin film structures
EP1141128B1 (de) * 1998-11-24 2006-04-12 Dow Global Technologies Inc. Eine zusammensetzung enthaltend einen vernetzbaren matrixpercursor und eine porenstruktur bildendes material und eine daraus hergestellte poröse matrix
US6156812A (en) * 1999-04-09 2000-12-05 Honeywell International Inc. Nanoporous material fabricated using polymeric template strands
US6172128B1 (en) * 1999-04-09 2001-01-09 Honeywell International Inc. Nanoporous polymers crosslinked via cyclic structures
US6420441B1 (en) * 1999-10-01 2002-07-16 Shipley Company, L.L.C. Porous materials
US6342454B1 (en) * 1999-11-16 2002-01-29 International Business Machines Corporation Electronic devices with dielectric compositions and method for their manufacture
US6359091B1 (en) * 1999-11-22 2002-03-19 The Dow Chemical Company Polyarylene compositions with enhanced modulus profiles
US6402103B1 (en) * 2000-06-30 2002-06-11 Cynthia Beret Hulett Coffee filter holder
US20030006477A1 (en) * 2001-05-23 2003-01-09 Shipley Company, L.L.C. Porous materials
WO2003068825A2 (en) * 2002-02-15 2003-08-21 Dow Global Technologies Inc. Multifunctional monomers and their use in making cross-linked polymers and porous films
US20030165625A1 (en) * 2002-02-15 2003-09-04 So Ying Hung Method of making a nanoporous film
US7635741B2 (en) * 2002-02-15 2009-12-22 Dow Global Technologies Inc. Multifunctional monomers and their use in making cross-linked polymers and porous films
WO2003089583A2 (en) * 2002-04-16 2003-10-30 Origene Technologies, Inc. Tissue specific genes and gene clusters
KR100532915B1 (ko) * 2002-10-29 2005-12-02 삼성전자주식회사 단당류계 또는 올리고당류계 포로젠을 포함하는 다공성층간 절연막을 형성하기 위한 조성물
US6818285B2 (en) * 2002-12-31 2004-11-16 International Business Machines Corporation Composition and method to achieve reduced thermal expansion in polyarylene networks
US7368483B2 (en) * 2002-12-31 2008-05-06 International Business Machines Corporation Porous composition of matter, and method of making same
WO2004073824A2 (en) * 2003-02-20 2004-09-02 Dow Global Technologies Inc. Method of synthesis of polyarylenes and the polyarylenes made by such method
US20070027280A1 (en) * 2003-04-02 2007-02-01 Hahnfeld Jerry L Multifunctional substituted monomers and polyarylene compositions therefrom
WO2004089862A2 (en) * 2003-04-02 2004-10-21 Dow Global Technologies Inc. Multifunctional unsymmetrically substituted monomers and polyarylene compositions therefrom
US20040253442A1 (en) * 2003-06-11 2004-12-16 Ervin Mubarekyan Method of forming a nanoporous film and compositions useful in such methods
US20070037894A1 (en) * 2003-09-19 2007-02-15 Hahnfeld Jerry L Multifunctional menomers and polyarylene compsotions therefrom
WO2005030830A1 (en) * 2003-09-19 2005-04-07 Dow Global Technologies Inc. Multifunctional monomers containing bound poragens and polyarylene compositions therefrom
US7626059B2 (en) * 2003-10-21 2009-12-01 Dow Global Technologies Inc. Multifunctional ethynyl substituted monomers and polyarylene compositions therefrom
US7475232B2 (en) * 2005-07-19 2009-01-06 International Business Machines Corporation Performance of an in-order processor by no longer requiring a uniform completion point across different execution pipelines

Also Published As

Publication number Publication date
CN1968998B (zh) 2011-04-13
EP1758953A1 (de) 2007-03-07
US20080090007A1 (en) 2008-04-17
CN1968998A (zh) 2007-05-23
JP5160890B2 (ja) 2013-03-13
JP2008502786A (ja) 2008-01-31
EP1758953B1 (de) 2011-09-28
WO2006001790A1 (en) 2006-01-05
KR20070031326A (ko) 2007-03-19
TW200609294A (en) 2006-03-16
KR101123436B1 (ko) 2012-03-28
TWI384027B (zh) 2013-02-01

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