ATE523895T1 - Verfahren zur herstellung von integrierten mems- schaltungen - Google Patents

Verfahren zur herstellung von integrierten mems- schaltungen

Info

Publication number
ATE523895T1
ATE523895T1 AT08733380T AT08733380T ATE523895T1 AT E523895 T1 ATE523895 T1 AT E523895T1 AT 08733380 T AT08733380 T AT 08733380T AT 08733380 T AT08733380 T AT 08733380T AT E523895 T1 ATE523895 T1 AT E523895T1
Authority
AT
Austria
Prior art keywords
integrated mems
producing integrated
mems circuits
circuits
nozzle plate
Prior art date
Application number
AT08733380T
Other languages
English (en)
Inventor
Gregory John Mcavoy
Kia Silverbrook
Emma Rose Kerr
Misty Bagnat
Vincent Patrick Lawlor
Original Assignee
Silverbrook Res Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Res Pty Ltd filed Critical Silverbrook Res Pty Ltd
Application granted granted Critical
Publication of ATE523895T1 publication Critical patent/ATE523895T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14032—Structure of the pressure chamber
    • B41J2/1404—Geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1606—Coating the nozzle area or the ink chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14459—Matrix arrangement of the pressure chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/15—Moving nozzle or nozzle plate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
AT08733380T 2007-06-15 2008-04-22 Verfahren zur herstellung von integrierten mems- schaltungen ATE523895T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/763,444 US7605009B2 (en) 2007-03-12 2007-06-15 Method of fabrication MEMS integrated circuits
PCT/AU2008/000553 WO2008151354A1 (en) 2007-06-15 2008-04-22 Method of fabrication mems integrated circuits

Publications (1)

Publication Number Publication Date
ATE523895T1 true ATE523895T1 (de) 2011-09-15

Family

ID=40130784

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08733380T ATE523895T1 (de) 2007-06-15 2008-04-22 Verfahren zur herstellung von integrierten mems- schaltungen

Country Status (4)

Country Link
US (3) US7605009B2 (de)
EP (1) EP2158603B1 (de)
AT (1) ATE523895T1 (de)
WO (1) WO2008151354A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8029097B2 (en) * 2008-11-26 2011-10-04 Silverbrook Research Pty Ltd Inkjet nozzle assembly having moving roof structure and sealing bridge
US8342650B2 (en) * 2009-07-24 2013-01-01 Zamtec Ltd Printhead having polysilsesquioxane coating on ink ejection face
US20110018937A1 (en) * 2009-07-24 2011-01-27 Silverbrook Research Pty Ltd Printhead having ink ejection face complementing ink or other features of printhead
EP2490898B1 (de) * 2009-07-24 2016-07-13 Memjet Technology Limited Druckkopf mit polysilsesquioxanbeschichtung auf der tintenausstossfläche
US8425004B2 (en) * 2009-07-24 2013-04-23 Zamtec Ltd Printhead having polymer incorporating nanoparticles coated on ink ejection face
US8883614B1 (en) * 2013-05-22 2014-11-11 Applied Materials, Inc. Wafer dicing with wide kerf by laser scribing and plasma etching hybrid approach
US9335367B2 (en) 2013-08-27 2016-05-10 International Business Machines Corporation Implementing low temperature wafer test
US10556317B2 (en) 2016-03-03 2020-02-11 P.R. Hoffman Machine Products Inc. Polishing machine wafer holder
TW202114873A (zh) * 2019-06-03 2021-04-16 愛爾蘭商滿捷特科技公司 處理ｍｅｍｓ晶圓的方法

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2003A (en) * 1841-03-12 Improvement in horizontal windivhlls
US2004A (en) * 1841-03-12 Improvement in the manner of constructing and propelling steam-vessels
US5136310A (en) 1990-09-28 1992-08-04 Xerox Corporation Thermal ink jet nozzle treatment
US6019457A (en) 1991-01-30 2000-02-01 Canon Information Systems Research Australia Pty Ltd. Ink jet print device and print head or print apparatus using the same
JP3143308B2 (ja) 1994-01-31 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
DE4407839A1 (de) 1994-03-09 1995-09-14 Eastman Kodak Co Verfahren zur Beeinflußung des Benetzungswinkels der Düsenaustrittsfläche von Tintendruckköpfen
JPH09507804A (ja) 1994-11-14 1997-08-12 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ インクジェット記録装置及びインクジェット記録ヘッド
US5812158A (en) * 1996-01-18 1998-09-22 Lexmark International, Inc. Coated nozzle plate for ink jet printing
US5706041A (en) * 1996-03-04 1998-01-06 Xerox Corporation Thermal ink-jet printhead with a suspended heating element in each ejector
EP0882593A1 (de) 1997-06-05 1998-12-09 Xerox Corporation Verfahren zur Herstellung einer hydrophoben/hydrophilen Stirnseite eines Farbstrahldruckkopfes
US6260953B1 (en) 1997-07-15 2001-07-17 Silverbrook Research Pty Ltd Surface bend actuator vented ink supply ink jet printing mechanism
US6062679A (en) 1997-08-28 2000-05-16 Hewlett-Packard Company Printhead for an inkjet cartridge and method for producing the same
FR2768817B1 (fr) * 1997-09-19 1999-12-10 Cis Bio Int Methode homogene pour la detection et/ou la determination de l'activite phosphorylante d'un materiel biologique
US6260114B1 (en) * 1997-12-30 2001-07-10 Mcmz Technology Innovations, Llc Computer cache memory windowing
US6151045A (en) 1999-01-22 2000-11-21 Lexmark International, Inc. Surface modified nozzle plate
US6345880B1 (en) * 1999-06-04 2002-02-12 Eastman Kodak Company Non-wetting protective layer for ink jet print heads
US6302523B1 (en) 1999-07-19 2001-10-16 Xerox Corporation Ink jet printheads
US6425971B1 (en) * 2000-05-10 2002-07-30 Silverbrook Research Pty Ltd Method of fabricating devices incorporating microelectromechanical systems using UV curable tapes
CN100398321C (zh) * 2000-05-24 2008-07-02 西尔弗布鲁克研究有限公司 具有外装喷嘴控制器的喷墨喷嘴组件
JP3616872B2 (ja) * 2000-09-14 2005-02-02 住友電気工業株式会社 ダイヤモンドウエハのチップ化方法
US7022546B2 (en) * 2000-12-05 2006-04-04 Analog Devices, Inc. Method and device for protecting micro electromechanical systems structures during dicing of a wafer
US6409312B1 (en) 2001-03-27 2002-06-25 Lexmark International, Inc. Ink jet printer nozzle plate and process therefor
WO2003015890A1 (en) 2001-08-20 2003-02-27 President And Fellows Of Harvard College Fluidic arrays and method of using
US6573156B1 (en) * 2001-12-13 2003-06-03 Omm, Inc. Low defect method for die singulation and for structural support for handling thin film devices
JP2004004299A (ja) 2002-05-31 2004-01-08 Renesas Technology Corp 電子装置の製造方法
US7052117B2 (en) * 2002-07-03 2006-05-30 Dimatix, Inc. Printhead having a thin pre-fired piezoelectric layer
KR100468859B1 (ko) 2002-12-05 2005-01-29 삼성전자주식회사 일체형 잉크젯 프린트헤드 및 그 제조방법
ITTO20021099A1 (it) 2002-12-19 2004-06-20 Olivetti I Jet Spa Processo di rivestimento protettivo di microcircuiti idraulici rispetto a liquidi aggressivi. particolarmente per una testina di stampa a getto d'inchiostro.
KR100474851B1 (ko) 2003-01-15 2005-03-09 삼성전자주식회사 잉크 토출 방법 및 이를 채용한 잉크젯 프린트헤드
WO2005007413A1 (en) 2003-07-22 2005-01-27 Canon Kabushiki Kaisha Ink jet head and its manufacture method
JP2005150235A (ja) * 2003-11-12 2005-06-09 Three M Innovative Properties Co 半導体表面保護シート及び方法
US7448734B2 (en) 2004-01-21 2008-11-11 Silverbrook Research Pty Ltd Inkjet printer cartridge with pagewidth printhead
US7163640B2 (en) * 2004-05-21 2007-01-16 Hewlett-Packard Development Company, L.P. Methods and systems for laser processing
JP2005342808A (ja) * 2004-05-31 2005-12-15 Oki Electric Ind Co Ltd Ｍｅｍｓデバイスの製造方法
WO2006105581A1 (en) * 2005-04-04 2006-10-12 Silverbrook Research Pty Ltd Printhead assembly suitable for redirecting ejected ink droplets
US7328976B2 (en) * 2005-04-04 2008-02-12 Silverbrook Research Pty Ltd. Hydrophobically coated printhead
US7600856B2 (en) 2006-12-12 2009-10-13 Eastman Kodak Company Liquid ejector having improved chamber walls
FR2912148B1 (fr) 2007-02-07 2009-04-10 Arkema France Materiau polymere de type styrene / anhydride, greffe ayant des proprietes ameliorees
US7976132B2 (en) * 2007-03-12 2011-07-12 Silverbrook Research Pty Ltd Printhead having moving roof structure and mechanical seal
US7669967B2 (en) * 2007-03-12 2010-03-02 Silverbrook Research Pty Ltd Printhead having hydrophobic polymer coated on ink ejection face
US7938974B2 (en) * 2007-03-12 2011-05-10 Silverbrook Research Pty Ltd Method of fabricating printhead using metal film for protecting hydrophobic ink ejection face
US7794613B2 (en) 2007-03-12 2010-09-14 Silverbrook Research Pty Ltd Method of fabricating printhead having hydrophobic ink ejection face
KR101318443B1 (ko) 2009-05-29 2013-10-16 엘지디스플레이 주식회사 입체영상 표시장치

Also Published As

Publication number Publication date
US7605009B2 (en) 2009-10-20
US7986039B2 (en) 2011-07-26
US20110228007A1 (en) 2011-09-22
US8672454B2 (en) 2014-03-18
EP2158603A1 (de) 2010-03-03
EP2158603A4 (de) 2010-12-01
US20100090296A1 (en) 2010-04-15
US20080227229A1 (en) 2008-09-18
WO2008151354A1 (en) 2008-12-18
EP2158603B1 (de) 2011-09-07

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