ATE515372T1 - Abrichtwerkzeuge und -techniken für chemisch- mechanisches planarisieren - Google Patents
Abrichtwerkzeuge und -techniken für chemisch- mechanisches planarisierenInfo
- Publication number
- ATE515372T1 ATE515372T1 AT07814967T AT07814967T ATE515372T1 AT E515372 T1 ATE515372 T1 AT E515372T1 AT 07814967 T AT07814967 T AT 07814967T AT 07814967 T AT07814967 T AT 07814967T AT E515372 T1 ATE515372 T1 AT E515372T1
- Authority
- AT
- Austria
- Prior art keywords
- abrasive particles
- tools
- bonded
- bond
- cmp
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US84641606P | 2006-09-22 | 2006-09-22 | |
US11/857,499 US20080271384A1 (en) | 2006-09-22 | 2007-09-19 | Conditioning tools and techniques for chemical mechanical planarization |
PCT/US2007/079154 WO2008036892A1 (en) | 2006-09-22 | 2007-09-21 | Conditioning tools and techniques for chemical mechanical planarization |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE515372T1 true ATE515372T1 (de) | 2011-07-15 |
Family
ID=38858981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07814967T ATE515372T1 (de) | 2006-09-22 | 2007-09-21 | Abrichtwerkzeuge und -techniken für chemisch- mechanisches planarisieren |
Country Status (8)
Country | Link |
---|---|
US (2) | US20080271384A1 (de) |
EP (1) | EP2083967B1 (de) |
KR (1) | KR101140243B1 (de) |
CN (2) | CN101563188B (de) |
AT (1) | ATE515372T1 (de) |
MY (1) | MY152583A (de) |
TW (2) | TW201141663A (de) |
WO (1) | WO2008036892A1 (de) |
Families Citing this family (72)
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US9868100B2 (en) | 1997-04-04 | 2018-01-16 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9199357B2 (en) | 1997-04-04 | 2015-12-01 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9238207B2 (en) | 1997-04-04 | 2016-01-19 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9409280B2 (en) | 1997-04-04 | 2016-08-09 | Chien-Min Sung | Brazed diamond tools and methods for making the same |
US9221154B2 (en) | 1997-04-04 | 2015-12-29 | Chien-Min Sung | Diamond tools and methods for making the same |
US9463552B2 (en) | 1997-04-04 | 2016-10-11 | Chien-Min Sung | Superbrasvie tools containing uniformly leveled superabrasive particles and associated methods |
US8622787B2 (en) | 2006-11-16 | 2014-01-07 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US8398466B2 (en) | 2006-11-16 | 2013-03-19 | Chien-Min Sung | CMP pad conditioners with mosaic abrasive segments and associated methods |
US8393934B2 (en) | 2006-11-16 | 2013-03-12 | Chien-Min Sung | CMP pad dressers with hybridized abrasive surface and related methods |
US9724802B2 (en) | 2005-05-16 | 2017-08-08 | Chien-Min Sung | CMP pad dressers having leveled tips and associated methods |
US9138862B2 (en) | 2011-05-23 | 2015-09-22 | Chien-Min Sung | CMP pad dresser having leveled tips and associated methods |
US20140120724A1 (en) * | 2005-05-16 | 2014-05-01 | Chien-Min Sung | Composite conditioner and associated methods |
US8678878B2 (en) * | 2009-09-29 | 2014-03-25 | Chien-Min Sung | System for evaluating and/or improving performance of a CMP pad dresser |
CN102825547A (zh) * | 2007-08-23 | 2012-12-19 | 圣戈班磨料磨具有限公司 | 用于下一代氧化物/金属cmp的优化的cmp修整器设计 |
US9011563B2 (en) | 2007-12-06 | 2015-04-21 | Chien-Min Sung | Methods for orienting superabrasive particles on a surface and associated tools |
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SG178605A1 (en) * | 2009-09-01 | 2012-04-27 | Saint Gobain Abrasives Inc | Chemical mechanical polishing conditioner |
US20110073094A1 (en) * | 2009-09-28 | 2011-03-31 | 3M Innovative Properties Company | Abrasive article with solid core and methods of making the same |
CN103221180A (zh) * | 2010-09-21 | 2013-07-24 | 铼钻科技股份有限公司 | 具有基本平坦颗粒尖端的超研磨工具及其相关方法 |
CN103329253B (zh) * | 2011-05-23 | 2016-03-30 | 宋健民 | 具有平坦化尖端的化学机械研磨垫修整器 |
CN102990529A (zh) * | 2011-09-09 | 2013-03-27 | 深圳嵩洋微电子技术有限公司 | 化学机械抛光垫双面修整盘 |
EP2797715A4 (de) | 2011-12-30 | 2016-04-20 | Saint Gobain Ceramics | Geformte schleifpartikel und verfahren zu ihrer herstellung |
WO2013106597A1 (en) | 2012-01-10 | 2013-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having complex shapes and methods of forming same |
US9138861B2 (en) * | 2012-02-15 | 2015-09-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | CMP pad cleaning apparatus |
US9242342B2 (en) * | 2012-03-14 | 2016-01-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Manufacture and method of making the same |
WO2013177446A1 (en) | 2012-05-23 | 2013-11-28 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and methods of forming same |
CN102814746B (zh) * | 2012-07-09 | 2015-01-14 | 南京航空航天大学 | 一种磨料优化排布烧结金刚石工具及其制造方法 |
EP2906392A4 (de) * | 2012-10-15 | 2016-07-13 | Saint Gobain Abrasives Inc | Schleifpartikel mit besonderen formen und verfahren zur formung solcher partikel |
CN103878375B (zh) * | 2012-12-20 | 2016-01-20 | 北京有色金属研究总院 | 一种定位排列的超硬工具刀头的制备方法 |
CN103962974B (zh) * | 2013-01-31 | 2017-08-04 | 盖茨优霓塔传动系统(苏州)有限公司 | 磨轮 |
US10160092B2 (en) * | 2013-03-14 | 2018-12-25 | Cabot Microelectronics Corporation | Polishing pad having polishing surface with continuous protrusions having tapered sidewalls |
PL2978566T3 (pl) | 2013-03-29 | 2024-07-15 | Saint-Gobain Abrasives, Inc. | Cząstki ścierne o określonych kształtach i sposoby formowania takich cząstek |
TWI589404B (zh) * | 2013-06-28 | 2017-07-01 | 聖高拜磨料有限公司 | 基於向日葵圖案之經塗佈的研磨製品 |
TWI548486B (zh) * | 2013-07-29 | 2016-09-11 | The method of manufacturing a dresser of the polishing pad sapphire discs | |
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WO2015160854A1 (en) | 2014-04-14 | 2015-10-22 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
CN104117933B (zh) * | 2014-06-20 | 2017-02-15 | 广东工业大学 | 平顶化金刚石钎焊制品及其制备方法和应用 |
TWI523718B (zh) * | 2014-08-21 | 2016-03-01 | 周振嘉 | 應用於超音波加工的工具單元 |
EP3209461A4 (de) * | 2014-10-21 | 2018-08-22 | 3M Innovative Properties Company | Schleifvorformen, verfahren zur herstellung eines schleifartikels und gebundener schleifartikel |
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TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
US10196551B2 (en) | 2015-03-31 | 2019-02-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
CA2988012C (en) | 2015-06-11 | 2021-06-29 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
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EP3455320A4 (de) | 2016-05-10 | 2019-11-20 | Saint-Gobain Ceramics&Plastics, Inc. | Schleifpartikel und verfahren zur formung davon |
EP4071224A3 (de) | 2016-05-10 | 2023-01-04 | Saint-Gobain Ceramics and Plastics, Inc. | Verfahren zur formung von schleifpartikeln |
CN106493652B (zh) * | 2016-12-20 | 2018-06-08 | 江苏索力德机电科技股份有限公司 | 一种细粒度钎焊超硬磨料工具的制备方法 |
CN106607778B (zh) * | 2016-12-21 | 2019-01-22 | 江苏索力德机电科技股份有限公司 | 一种实现均布地貌的单层超硬磨料工具制备工艺 |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
CN106926148B (zh) * | 2017-02-08 | 2020-07-14 | 上海交通大学 | 利用化学气相沉积制备单层金刚石磨料工具的方法 |
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US11213927B2 (en) * | 2017-12-28 | 2022-01-04 | Entregis, Inc. | CMP polishing pad conditioner |
KR20210137580A (ko) * | 2019-04-09 | 2021-11-17 | 엔테그리스, 아이엔씨. | 디스크를 위한 세그먼트 설계 |
CN110052962A (zh) * | 2019-04-25 | 2019-07-26 | 西安奕斯伟硅片技术有限公司 | 一种抛光垫修整器、加工装置及方法 |
EP4081369A4 (de) | 2019-12-27 | 2024-04-10 | Saint-Gobain Ceramics & Plastics Inc. | Schleifartikel und verfahren zur formung davon |
CN111441030B (zh) * | 2020-05-22 | 2021-03-26 | 南京航空航天大学 | 一种多层cvd金刚石锥阵列抛光工具的制备方法 |
CN113524058B (zh) * | 2021-07-12 | 2022-05-03 | 华侨大学 | 一种无模板随炉钎焊的单层金刚石磨粒有序排布钎焊方法 |
CN113529154A (zh) * | 2021-07-26 | 2021-10-22 | 江苏三超金刚石工具有限公司 | 金刚石有序排布的研磨修整器的制备方法 |
KR20240060700A (ko) * | 2021-09-29 | 2024-05-08 | 엔테그리스, 아이엔씨. | 폴리머 백킹 플레이트를 갖는 패드 컨디셔너 |
CN113977467A (zh) * | 2021-10-29 | 2022-01-28 | 江苏韦尔博新材料科技有限公司 | 一种用于化学机械抛光的钎焊金刚石修整器的制备方法 |
CN115870877A (zh) * | 2023-03-08 | 2023-03-31 | 长鑫存储技术有限公司 | 研磨垫及其制备方法 |
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-
2007
- 2007-09-19 US US11/857,499 patent/US20080271384A1/en not_active Abandoned
- 2007-09-21 TW TW100128067A patent/TW201141663A/zh unknown
- 2007-09-21 MY MYPI20091159 patent/MY152583A/en unknown
- 2007-09-21 TW TW96135272A patent/TWI469202B/zh not_active IP Right Cessation
- 2007-09-21 KR KR1020097008134A patent/KR101140243B1/ko active IP Right Grant
- 2007-09-21 WO PCT/US2007/079154 patent/WO2008036892A1/en active Application Filing
- 2007-09-21 CN CN2007800399414A patent/CN101563188B/zh not_active Expired - Fee Related
- 2007-09-21 EP EP07814967A patent/EP2083967B1/de not_active Not-in-force
- 2007-09-21 CN CN2013101875788A patent/CN103252722A/zh active Pending
- 2007-09-21 AT AT07814967T patent/ATE515372T1/de not_active IP Right Cessation
-
2011
- 2011-11-21 US US13/301,276 patent/US20120060426A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP2083967B1 (de) | 2011-07-06 |
CN101563188A (zh) | 2009-10-21 |
TW200849360A (en) | 2008-12-16 |
TWI469202B (zh) | 2015-01-11 |
CN103252722A (zh) | 2013-08-21 |
EP2083967A1 (de) | 2009-08-05 |
US20080271384A1 (en) | 2008-11-06 |
US20120060426A1 (en) | 2012-03-15 |
KR20090082360A (ko) | 2009-07-30 |
WO2008036892A1 (en) | 2008-03-27 |
TW201141663A (en) | 2011-12-01 |
KR101140243B1 (ko) | 2012-04-26 |
CN101563188B (zh) | 2013-06-19 |
MY152583A (en) | 2014-10-31 |
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