WO2004083328A3 - Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles - Google Patents

Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles Download PDF

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Publication number
WO2004083328A3
WO2004083328A3 PCT/US2004/007468 US2004007468W WO2004083328A3 WO 2004083328 A3 WO2004083328 A3 WO 2004083328A3 US 2004007468 W US2004007468 W US 2004007468W WO 2004083328 A3 WO2004083328 A3 WO 2004083328A3
Authority
WO
WIPO (PCT)
Prior art keywords
chemical
abrasive particles
planarization process
mechanical planarization
slurry compositions
Prior art date
Application number
PCT/US2004/007468
Other languages
French (fr)
Other versions
WO2004083328A2 (en
Inventor
Sharad Mathur
Hamad Moini
Ivan Petrovic
Original Assignee
Engelhard Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Engelhard Corp filed Critical Engelhard Corp
Priority to JP2006507090A priority Critical patent/JP2007525815A/en
Priority to EP04719748A priority patent/EP1620517A2/en
Publication of WO2004083328A2 publication Critical patent/WO2004083328A2/en
Publication of WO2004083328A3 publication Critical patent/WO2004083328A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
    • H01L21/321—After treatment
    • H01L21/32115—Planarisation
    • H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09G—POLISHING COMPOSITIONS; SKI WAXES
    • C09G1/00—Polishing compositions
    • C09G1/02—Polishing compositions containing abrasives or grinding agents
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
    • H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
    • H01L21/7684—Smoothing; Planarisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31051—Planarisation of the insulating layers
    • H01L21/31053—Planarisation of the insulating layers involving a dielectric removal step

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Materials Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A chemical-mechanical abrasive composition for use in semiconductor processing uses abrasive particles having a non-spherical morphology.
PCT/US2004/007468 2003-03-17 2004-03-11 Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles WO2004083328A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006507090A JP2007525815A (en) 2003-03-17 2004-03-11 Slurry compositions for use in chemical-mechanical planarization processes
EP04719748A EP1620517A2 (en) 2003-03-17 2004-03-11 Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US10/ 2002-05-28
US45521603P 2003-03-17 2003-03-17
US60/455,216 2003-03-17
US50944503P 2003-10-08 2003-10-08
US60/509,445 2003-10-08
US10/792,738 US20040216388A1 (en) 2003-03-17 2004-03-05 Slurry compositions for use in a chemical-mechanical planarization process

Publications (2)

Publication Number Publication Date
WO2004083328A2 WO2004083328A2 (en) 2004-09-30
WO2004083328A3 true WO2004083328A3 (en) 2004-11-11

Family

ID=33314230

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/007468 WO2004083328A2 (en) 2003-03-17 2004-03-11 Slurry compositions for use in a chemical-mechanical planarization process having non-spherical abrasive particles

Country Status (5)

Country Link
US (1) US20040216388A1 (en)
EP (1) EP1620517A2 (en)
JP (1) JP2007525815A (en)
KR (1) KR20050111391A (en)
WO (1) WO2004083328A2 (en)

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US7087529B2 (en) * 2003-10-02 2006-08-08 Amcol International Corporation Chemical-mechanical polishing (CMP) slurry and method of planarizing surfaces
US7223156B2 (en) 2003-11-14 2007-05-29 Amcol International Corporation Method chemical-mechanical polishing and planarizing corundum, GaAs, GaP and GaAs/GaP alloy surfaces
US7919815B1 (en) * 2005-02-24 2011-04-05 Saint-Gobain Ceramics & Plastics, Inc. Spinel wafers and methods of preparation
US20060283093A1 (en) * 2005-06-15 2006-12-21 Ivan Petrovic Planarization composition
TW200724633A (en) * 2005-09-30 2007-07-01 Saint Gobain Ceramics Polishing slurries and methods for utilizing same
CN101374922B (en) * 2006-01-25 2013-06-12 Lg化学株式会社 CMP slurry and method for polishing semiconductor wafer using the same
CN101573420A (en) * 2006-12-04 2009-11-04 巴斯夫欧洲公司 Planarization composition for metal surfaces comprising an alumina hydrate abrasive
US9343330B2 (en) * 2006-12-06 2016-05-17 Cabot Microelectronics Corporation Compositions for polishing aluminum/copper and titanium in damascene structures
WO2010039571A1 (en) 2008-09-30 2010-04-08 The Procter & Gamble Company Liquid hard surface cleaning composition
WO2010039574A1 (en) 2008-09-30 2010-04-08 The Procter & Gamble Company Liquid hard surface cleaning composition
ES2582573T3 (en) 2008-09-30 2016-09-13 The Procter & Gamble Company Hard surface liquid cleaning compositions
KR101279971B1 (en) 2008-12-31 2013-07-05 제일모직주식회사 CMP slurry composition for polishing copper barrier layer, polishing method using the composition, and semiconductor device manifactured by the method
US7763577B1 (en) * 2009-02-27 2010-07-27 Uwiz Technology Co., Ltd. Acidic post-CMP cleaning composition
US20100258143A1 (en) * 2009-04-13 2010-10-14 Microchip Technology Incorporated Scrubber clean before oxide chemical mechanical polish (cmp) for reduced microscratches and improved yields
JP5658277B2 (en) 2009-12-22 2015-01-21 ザ プロクター アンド ギャンブルカンパニー Liquid cleaning and / or cleansing composition
WO2011087739A1 (en) * 2009-12-22 2011-07-21 The Procter & Gamble Company Liquid cleaning and/or cleansing composition
WO2011133438A1 (en) 2010-04-21 2011-10-27 The Procter & Gamble Company Liquid cleaning and/or cleansing composition
JP5702469B2 (en) 2010-09-21 2015-04-15 ザ プロクター アンド ギャンブルカンパニー Liquid cleaning composition
WO2012040143A1 (en) 2010-09-21 2012-03-29 The Procter & Gamble Company Liquid cleaning composition
EP2431451A1 (en) 2010-09-21 2012-03-21 The Procter & Gamble Company Liquid detergent composition with abrasive particles
CA2839953C (en) 2011-06-20 2017-02-14 The Procter & Gamble Company Liquid cleaning and/or cleansing composition
MX338952B (en) 2011-06-20 2016-05-05 Procter & Gamble Liquid cleaning and/or cleansing composition.
EP2537917A1 (en) 2011-06-20 2012-12-26 The Procter & Gamble Company Liquid detergent composition with abrasive particles
US8852643B2 (en) 2011-06-20 2014-10-07 The Procter & Gamble Company Liquid cleaning and/or cleansing composition
KR20130090209A (en) * 2012-02-03 2013-08-13 삼성전자주식회사 Apparatus and method for treating substrate
ES2577147T3 (en) 2012-10-15 2016-07-13 The Procter & Gamble Company Liquid detergent composition with abrasive particles
PL3004304T3 (en) * 2013-05-31 2018-04-30 Unilever N.V. Composition for cleaning of hard surfaces
US11781039B2 (en) * 2016-12-26 2023-10-10 Fujimi Incorporated Polishing composition and polishing method
CN114539813A (en) * 2020-11-18 2022-05-27 华为技术有限公司 Non-spherical silica particles, preparation method thereof and polishing solution

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WO2003064551A1 (en) * 2002-01-25 2003-08-07 Ekc Technology, Inc. Compositions and methods for chemical-mechanical planarization o f noble-metal-featured substrates. these treated substrates
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Also Published As

Publication number Publication date
WO2004083328A2 (en) 2004-09-30
JP2007525815A (en) 2007-09-06
EP1620517A2 (en) 2006-02-01
KR20050111391A (en) 2005-11-24
US20040216388A1 (en) 2004-11-04

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