ATE513196T1 - Unterdruck-messgerät - Google Patents

Unterdruck-messgerät

Info

Publication number
ATE513196T1
ATE513196T1 AT06707346T AT06707346T ATE513196T1 AT E513196 T1 ATE513196 T1 AT E513196T1 AT 06707346 T AT06707346 T AT 06707346T AT 06707346 T AT06707346 T AT 06707346T AT E513196 T1 ATE513196 T1 AT E513196T1
Authority
AT
Austria
Prior art keywords
emitter
emitter layer
gate
anode
voltage
Prior art date
Application number
AT06707346T
Other languages
English (en)
Inventor
Wolfram Knapp
Martin Wueest
Original Assignee
Inficon Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh filed Critical Inficon Gmbh
Application granted granted Critical
Publication of ATE513196T1 publication Critical patent/ATE513196T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J19/00—Details of vacuum tubes of the types covered by group H01J21/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Cold Cathode And The Manufacture (AREA)
AT06707346T 2005-03-04 2006-03-01 Unterdruck-messgerät ATE513196T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP05004855A EP1698878A1 (de) 2005-03-04 2005-03-04 Elektrodenanordnung und Druckmessvorrichtung
PCT/EP2006/001864 WO2006094687A1 (en) 2005-03-04 2006-03-01 Vacuum measuring gauge

Publications (1)

Publication Number Publication Date
ATE513196T1 true ATE513196T1 (de) 2011-07-15

Family

ID=34934078

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06707346T ATE513196T1 (de) 2005-03-04 2006-03-01 Unterdruck-messgerät

Country Status (8)

Country Link
US (1) US7352187B2 (de)
EP (2) EP1698878A1 (de)
JP (1) JP5080283B2 (de)
KR (1) KR101291993B1 (de)
CN (1) CN101133308B (de)
AT (1) ATE513196T1 (de)
TW (1) TWI395935B (de)
WO (1) WO2006094687A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7629604B2 (en) * 2005-11-10 2009-12-08 Schlumberger Technology Corporation Nano-based device and method
US7429863B2 (en) * 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
CH698896B1 (de) 2006-08-29 2009-11-30 Inficon Gmbh Massenspektrometer.
US7456634B2 (en) * 2006-10-26 2008-11-25 Brooks Automation, Inc. Method and apparatus for shielding feedthrough pin insulators in an ionization gauge operating in harsh environments
CN100501362C (zh) * 2007-02-08 2009-06-17 厦门大学 真空传感器
CN101266180A (zh) 2007-03-16 2008-09-17 清华大学 电离规
CN101303955B (zh) * 2007-05-09 2010-05-26 清华大学 离子源组件
CN101303264B (zh) * 2007-05-09 2010-05-26 清华大学 电离规
CN101952703A (zh) * 2007-12-19 2011-01-19 布鲁克机械公司 具有电子倍增器冷发射源的离子计
EP2252869B1 (de) 2008-02-21 2018-12-12 MKS Instruments, Inc. Ionisierungsmessgerät mit für hochdruckbetrieb ausgelegten betriebsparametern und geometrie
CN101576423B (zh) * 2008-05-07 2010-12-29 清华大学 电离规
WO2010033427A1 (en) * 2008-09-19 2010-03-25 Brooks Automation, Inc. Ionization gauge with emission current and bias potential control
CN101750461B (zh) * 2008-12-19 2012-05-23 中国科学院大连化学物理研究所 一种表面热离子化检测器
JP5249112B2 (ja) * 2009-03-31 2013-07-31 株式会社アンペール 冷陰極電離真空計及び圧力測定方法
JP5669411B2 (ja) * 2009-04-09 2015-02-12 キヤノンアネルバ株式会社 冷陰極電離真空計及びそれを備えた真空処理装置並びに放電開始補助電極
WO2011040625A1 (ja) * 2009-09-29 2011-04-07 有限会社真空実験室 イオン源を有する真空計測装置
JPWO2011099238A1 (ja) * 2010-02-12 2013-06-13 株式会社アルバック トランスデューサ型真空計
US9136794B2 (en) 2011-06-22 2015-09-15 Research Triangle Institute, International Bipolar microelectronic device
WO2014014742A1 (en) * 2012-07-17 2014-01-23 Fergenson David Phillip System for and techniques of manufacturing a monolithic analytical instrument
US20140183349A1 (en) * 2012-12-27 2014-07-03 Schlumberger Technology Corporation Ion source using spindt cathode and electromagnetic confinement
US9362078B2 (en) 2012-12-27 2016-06-07 Schlumberger Technology Corporation Ion source using field emitter array cathode and electromagnetic confinement
US8866068B2 (en) 2012-12-27 2014-10-21 Schlumberger Technology Corporation Ion source with cathode having an array of nano-sized projections
CH707685A1 (de) * 2013-03-06 2014-09-15 Inficon Gmbh Ionisations-Vakuummesszelle mit Abschirmvorrichtung.
JP6111129B2 (ja) * 2013-04-18 2017-04-05 有限会社真空実験室 逆マグネトロン型冷陰極電離真空装置
TWI795918B (zh) 2015-01-15 2023-03-11 美商Ｍｋｓ儀器公司 製造測量裝置之方法
US10132707B2 (en) * 2015-07-09 2018-11-20 Mks Instruments, Inc. Devices and methods for feedthrough leakage current detection and decontamination in ionization gauges
US9927317B2 (en) * 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
US10605687B2 (en) * 2016-02-29 2020-03-31 General Electric Company Spark gap device and method of measurement of X-ray tube vacuum pressure
JP6932892B2 (ja) * 2017-07-10 2021-09-08 株式会社アルバック 三極管型電離真空計及び圧力測定方法
CN107941416A (zh) * 2017-12-29 2018-04-20 李涛 检测真空度用的连接端子
JP7036675B2 (ja) * 2018-06-11 2022-03-15 株式会社アルバック Ｂａ型電離真空計及びその感度異常検知方法、並びにｂａ型電離真空計を用いた圧力測定方法
JP6772391B2 (ja) * 2018-06-18 2020-10-21 株式会社アルバック 電離真空計及び制御装置
WO2021052599A1 (de) * 2019-09-20 2021-03-25 Inficon ag Verfahren zu bestimmung eines drucks und drucksensor

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR591498A (fr) * 1924-01-16 1925-07-04 Westinghouse Electric & Mfg Co Dispositif à décharge thermionique d'ions positifs
GB771799A (en) * 1952-07-29 1957-04-03 Standard Telephones Cables Ltd Improvements in or relating to ionisation manometers
FR1236351A (fr) * 1958-09-25 1960-07-15 Thomson Houston Comp Francaise Pompe ionique
DE1473445B2 (de) * 1961-12-06 1970-06-25 Geophysics Corp. of America, Bedford, Mass. (V.St.A.) Kaltkathoden-Vakuummeter
US3343781A (en) * 1965-04-28 1967-09-26 Gen Electric Ionic pump
GB1148440A (en) * 1965-10-18 1969-04-10 Micro Tek Instr Corp Apparatus and method for ionization detection
US3510712A (en) * 1967-10-20 1970-05-05 Varian Associates Electron orbiting getter vacuum pump employing a time varying magnetic field
US3604970A (en) * 1968-10-14 1971-09-14 Varian Associates Nonelectron emissive electrode structure utilizing ion-plated nonemissive coatings
US3743876A (en) * 1969-10-07 1973-07-03 Canadian Patents Dev Hot-cathode ionization gauge having electrode means for shaping the electric field in the vicinity of the cathode
GB1504741A (en) * 1975-01-28 1978-03-22 Radiochemical Centre Ltd Iron-55- a source for use in ionisation chambers
GB1535314A (en) * 1975-02-06 1978-12-13 Boc International Ltd Vacuum gauges
DE2810736A1 (de) * 1978-03-13 1979-09-27 Max Planck Gesellschaft Feldemissionskathode sowie herstellungsverfahren und verwendung hierfuer
FR2454696A1 (fr) * 1979-04-18 1980-11-14 Anvar Dispositif du genre orbitron, muni de plateaux d'extremite
US4975656A (en) * 1989-03-31 1990-12-04 Litton Systems, Inc. Enhanced secondary electron emitter
US5296817A (en) * 1990-04-11 1994-03-22 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5128617A (en) * 1990-04-11 1992-07-07 Granville-Phillips Company Ionization vacuum gauge with emission of electrons in parallel paths
US5422573A (en) * 1990-04-11 1995-06-06 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5198772A (en) * 1991-03-12 1993-03-30 Mks Instruments, Inc. Removable discharge initiating means for cold cathode discharge ionization gauge
GB9111747D0 (en) * 1991-05-31 1991-07-24 Boc Group Plc Improvements relating to vacuum pumps
FR2679653B1 (fr) * 1991-07-23 1993-09-24 Commissariat Energie Atomique Vacumetre a ionisation.
JP3069975B2 (ja) * 1991-09-06 2000-07-24 アネルバ株式会社 電離真空計
KR940016393A (ko) * 1992-12-24 1994-07-23 양승택 이온전류를 이용한 진공게이지(Gauge)
DE69411620T2 (de) * 1993-04-28 1999-02-04 The Fredericks Co., Huntingdon Valley, Pa. Ionisationswandler mit sich gegenuberliegenden Magneten
FR2714966B1 (fr) * 1994-01-11 1996-02-16 Commissariat Energie Atomique Jauge à ionisation munie d'une cathode à micropointes.
AU7367098A (en) * 1997-05-09 1998-11-27 Fredericks Company, The Bayard-alpert vacuum gauge with neutralization of x-ray effect
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3896686B2 (ja) * 1998-03-27 2007-03-22 双葉電子工業株式会社 真空外周器の真空方法
JP2000260298A (ja) * 1999-03-05 2000-09-22 Sony Corp 冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置
JP3414668B2 (ja) * 1999-03-29 2003-06-09 株式会社東芝 電界放出型冷陰極装置の製造方法
JP4493139B2 (ja) * 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP2002367555A (ja) * 2001-04-05 2002-12-20 Yaskawa Electric Corp アルミニウム合金製真空装置
WO2003005943A2 (en) * 2001-07-12 2003-01-23 Hill-Rom Services, Inc. Control of vacuum level rate of change
JP2003162955A (ja) * 2001-11-27 2003-06-06 Sony Corp 冷陰極電界電子放出素子及びその製造方法、並びに、冷陰極電界電子放出表示装置
US6914374B2 (en) * 2002-01-09 2005-07-05 Hewlett-Packard Development Company, L.P. Planar electron emitter apparatus with improved emission area and method of manufacture
KR100935822B1 (ko) * 2002-05-14 2010-01-08 아사히 가라스 가부시키가이샤 글라스, 그 제조방법, 및 ｆｅｄ 장치
KR100507607B1 (ko) * 2003-05-13 2005-08-10 한국표준과학연구원 탄소나노튜브를 이용한 진공게이지
ITTO20030626A1 (it) * 2003-08-08 2005-02-09 Varian Spa Vacuometro a ionizzazione.

Also Published As

Publication number Publication date
JP2008537998A (ja) 2008-10-02
CN101133308B (zh) 2011-08-03
TW200639385A (en) 2006-11-16
US20060202701A1 (en) 2006-09-14
KR20070115933A (ko) 2007-12-06
TWI395935B (zh) 2013-05-11
US7352187B2 (en) 2008-04-01
WO2006094687A1 (en) 2006-09-14
EP1698878A1 (de) 2006-09-06
EP1853890A1 (de) 2007-11-14
EP1853890B1 (de) 2011-06-15
KR101291993B1 (ko) 2013-08-09
JP5080283B2 (ja) 2012-11-21
CN101133308A (zh) 2008-02-27

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