ATE468547T1 - Antriebsmechanismus - Google Patents

Antriebsmechanismus

Info

Publication number
ATE468547T1
ATE468547T1 AT06006174T AT06006174T ATE468547T1 AT E468547 T1 ATE468547 T1 AT E468547T1 AT 06006174 T AT06006174 T AT 06006174T AT 06006174 T AT06006174 T AT 06006174T AT E468547 T1 ATE468547 T1 AT E468547T1
Authority
AT
Austria
Prior art keywords
driving member
electro
drive mechanism
conversion element
driving
Prior art date
Application number
AT06006174T
Other languages
English (en)
Inventor
Mitsuo Manabe
Original Assignee
Fujinon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujinon Corp filed Critical Fujinon Corp
Application granted granted Critical
Publication of ATE468547T1 publication Critical patent/ATE468547T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67766—Mechanical parts of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Robotics (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Vending Machines For Individual Products (AREA)
  • Vehicle Body Suspensions (AREA)
  • Control Of Position Or Direction (AREA)
  • Automatic Disk Changers (AREA)
  • Steering Control In Accordance With Driving Conditions (AREA)
AT06006174T 2005-03-31 2006-03-24 Antriebsmechanismus ATE468547T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005103065 2005-03-31
JP2005234518 2005-08-12
JP2006026247A JP4931425B2 (ja) 2005-03-31 2006-02-02 駆動装置

Publications (1)

Publication Number Publication Date
ATE468547T1 true ATE468547T1 (de) 2010-06-15

Family

ID=36603684

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06006174T ATE468547T1 (de) 2005-03-31 2006-03-24 Antriebsmechanismus

Country Status (7)

Country Link
US (1) US20060238074A1 (de)
EP (1) EP1708287B1 (de)
JP (1) JP4931425B2 (de)
KR (1) KR100777634B1 (de)
AT (1) ATE468547T1 (de)
DE (1) DE602006014317D1 (de)
TW (1) TWI315932B (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4931425B2 (ja) * 2005-03-31 2012-05-16 富士フイルム株式会社 駆動装置
JP2007049874A (ja) * 2005-08-12 2007-02-22 Fujinon Corp アクチュエータ
JP2007049878A (ja) * 2005-08-12 2007-02-22 Fujinon Corp アクチュエータ
JP2007104761A (ja) * 2005-09-30 2007-04-19 Fujinon Corp アクチュエータ
JP2007267488A (ja) * 2006-03-28 2007-10-11 Fujinon Corp 駆動装置、それに用いられる電気機械変換素子、撮像装置、及び携帯電話
JP2008245467A (ja) * 2007-03-28 2008-10-09 Fujinon Corp 駆動装置
JP2008253021A (ja) * 2007-03-29 2008-10-16 Fujinon Corp 駆動装置
KR20080093882A (ko) * 2007-04-17 2008-10-22 미쓰미덴기가부시기가이샤 구동 장치
JP2009025404A (ja) 2007-07-17 2009-02-05 Fujinon Corp 駆動装置
US8044555B2 (en) 2007-07-17 2011-10-25 Fujinon Corporation Driving apparatus
CN102176645A (zh) 2007-07-17 2011-09-07 富士胶片株式会社 驱动装置
US20090072664A1 (en) * 2007-09-14 2009-03-19 Kazuaki Nagata Driving apparatus
EP2233740A4 (de) * 2008-01-23 2013-05-22 Konica Minolta Opto Inc Antriebsmechanismus und antriebsvorrichtung
KR20110030702A (ko) 2008-07-25 2011-03-23 히다치 막셀 가부시키가이샤 구동장치, 화상취득장치 및 전자기기
KR102481180B1 (ko) * 2020-09-21 2022-12-23 포항공과대학교 산학협력단 나노미터 수준의 분해능을 가지는 압전모터

Family Cites Families (40)

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US4089190A (en) * 1976-04-14 1978-05-16 Union Carbide Corporation Carbon fiber drive shaft
DE3542839A1 (de) * 1985-12-04 1987-06-11 Bbc Brown Boveri & Cie Thermoelektrischer generator mit einer nuklearen waermequelle
US5025198A (en) * 1989-02-24 1991-06-18 The Carborundum Company Torque coupling system for graphite impeller shafts
US5557157A (en) * 1989-11-30 1996-09-17 Canon Kabushiki Kaisha Vibration driven motor
US5154109A (en) * 1990-12-17 1992-10-13 Allied-Signal Inc. Composite piston assembly
DE69211880T2 (de) * 1991-04-02 1996-11-07 Matsushita Electric Ind Co Ltd Ultraschallmotor mit schwingendem Körper und dadurch angetriebener bewegender Körper
JPH06123830A (ja) * 1992-10-13 1994-05-06 Minolta Camera Co Ltd 圧電アクチュエータを用いた駆動機構
JPH06141565A (ja) * 1992-10-28 1994-05-20 Nikon Corp 超音波モータのロータ
US5459397A (en) * 1992-11-23 1995-10-17 Spillman, Jr.; William B. Speed sensor for rotatable shaft using shaft mounted antenna
US5384085A (en) * 1993-09-02 1995-01-24 Berkley, Inc. Method of making graphite composite shafts
JPH07274546A (ja) * 1994-03-29 1995-10-20 Minolta Co Ltd 電気−機械変換素子を使用した駆動装置
US5589723A (en) * 1994-03-29 1996-12-31 Minolta Co., Ltd. Driving apparatus using transducer
JPH0843872A (ja) * 1994-08-03 1996-02-16 Minolta Co Ltd 電気−機械変換素子を使用したレンズ駆動装置
DE19506407B4 (de) * 1995-02-23 2006-08-10 Karl-Heinz Wiltzer Verfahren und Vorrichtung zur Herstellung von hochviskosen oder hochstabilisierten, reaktionsstabilen Polyamiden und zur kontinuierlichen Entmonomerisierung von Polyamiden
US5912525A (en) * 1996-03-21 1999-06-15 Nikon Corporation Vibration actuator
US5864743A (en) * 1996-11-06 1999-01-26 Materials And Electrochemical Research (Mer) Corporation Multi-channel structures and processes for making structures using carbon filler
US6114799A (en) * 1997-02-10 2000-09-05 Minolta Co., Ltd. Driving mechanism
JP3717271B2 (ja) * 1997-04-11 2005-11-16 光洋精工株式会社 可変速プーリの偏心リング
US6404104B1 (en) * 1997-11-27 2002-06-11 Canon Kabushiki Kaisha Vibration type actuator and vibration type driving apparatus
US6067421A (en) * 1998-01-16 2000-05-23 Ricoh Company, Ltd. Camera focus adjusting device for moving an imaging unit
JP3171187B2 (ja) * 1999-03-30 2001-05-28 ミノルタ株式会社 圧電アクチュエータ
JP2000287467A (ja) * 1999-03-31 2000-10-13 Minolta Co Ltd 圧電アクチュエータのサーボ制御装置
JP2001045774A (ja) * 1999-07-28 2001-02-16 Canon Inc 電気−機械エネルギー変換素子を振動源とする振動体、この振動体を駆動源とする振動波駆動装置、振動波駆動装置を有する装置およびこの振動体を搬送源とする搬送装置
JP4470258B2 (ja) * 2000-01-20 2010-06-02 コニカミノルタホールディングス株式会社 駆動装置
JP2001268951A (ja) * 2000-03-23 2001-09-28 Minolta Co Ltd 駆動装置
JP4144171B2 (ja) * 2000-09-14 2008-09-03 コニカミノルタホールディングス株式会社 電気−機械変換素子を用いた駆動装置
JP4154851B2 (ja) * 2000-10-31 2008-09-24 コニカミノルタホールディングス株式会社 駆動装置
JP2002218773A (ja) * 2001-01-22 2002-08-02 Minolta Co Ltd 駆動装置
DE10297112T5 (de) * 2001-08-13 2004-07-01 Thomas Industries, Inc., Sheboygan Taumelkolbenpumpe mit Kohlenstoffgraphitzylinder
JP2003139193A (ja) * 2001-11-02 2003-05-14 Nok Corp 防振支持脚
JP2003324979A (ja) * 2002-05-02 2003-11-14 Sony Corp 駆動機構
JP2004056914A (ja) * 2002-07-19 2004-02-19 Minolta Co Ltd 駆動装置、その駆動装置を備えるレンズユニット及び撮影装置
US6907850B2 (en) * 2003-06-03 2005-06-21 Hardie D. Creel Internal combustion engine and method of enhancing engine performance
US20050203513A1 (en) * 2003-09-24 2005-09-15 Tae-Ahn Jahng Spinal stabilization device
US8435173B2 (en) * 2003-10-06 2013-05-07 Olympus Corporation Endoscope
JP4062293B2 (ja) * 2004-09-16 2008-03-19 コニカミノルタホールディングス株式会社 駆動装置
EP1992974B1 (de) * 2005-01-12 2016-01-06 Trimble Jena GmbH Positionierungsvorrichtung
JP4931425B2 (ja) * 2005-03-31 2012-05-16 富士フイルム株式会社 駆動装置
JP4936511B2 (ja) * 2005-03-31 2012-05-23 富士フイルム株式会社 駆動装置、撮影装置及び携帯電話
JP4931183B2 (ja) * 2005-03-31 2012-05-16 富士フイルム株式会社 駆動装置

Also Published As

Publication number Publication date
DE602006014317D1 (de) 2010-07-01
EP1708287A2 (de) 2006-10-04
US20060238074A1 (en) 2006-10-26
KR100777634B1 (ko) 2007-11-21
TW200644398A (en) 2006-12-16
JP2007074889A (ja) 2007-03-22
TWI315932B (en) 2009-10-11
JP4931425B2 (ja) 2012-05-16
KR20060106702A (ko) 2006-10-12
EP1708287B1 (de) 2010-05-19
EP1708287A3 (de) 2007-02-28

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Legal Events

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