DE602005023129D1 - Kleiner piezoelektrischer oder elektrostriktiver linearmotor - Google Patents
Kleiner piezoelektrischer oder elektrostriktiver linearmotorInfo
- Publication number
- DE602005023129D1 DE602005023129D1 DE602005023129T DE602005023129T DE602005023129D1 DE 602005023129 D1 DE602005023129 D1 DE 602005023129D1 DE 602005023129 T DE602005023129 T DE 602005023129T DE 602005023129 T DE602005023129 T DE 602005023129T DE 602005023129 D1 DE602005023129 D1 DE 602005023129D1
- Authority
- DE
- Germany
- Prior art keywords
- linear motor
- electrostrictive
- piezoelectric
- small piezoelectric
- movable shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/025—Inertial sliding motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2004-0014050A KR100443638B1 (ko) | 2004-03-02 | 2004-03-02 | 소형 압전/전왜 초음파 리니어모터 |
KR1020040040895A KR100443639B1 (ko) | 2004-06-04 | 2004-06-04 | 소형 압전/전왜 초음파 리니어모터 |
PCT/KR2005/000353 WO2005083874A1 (en) | 2004-03-02 | 2005-02-04 | Small piezoelectric or electrostrictive linear motor |
Publications (1)
Publication Number | Publication Date |
---|---|
DE602005023129D1 true DE602005023129D1 (de) | 2010-10-07 |
Family
ID=34914604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE602005023129T Active DE602005023129D1 (de) | 2004-03-02 | 2005-02-04 | Kleiner piezoelektrischer oder elektrostriktiver linearmotor |
Country Status (6)
Country | Link |
---|---|
US (2) | US7498719B2 (de) |
EP (1) | EP1721382B1 (de) |
JP (1) | JP2007516688A (de) |
AT (1) | ATE479201T1 (de) |
DE (1) | DE602005023129D1 (de) |
WO (1) | WO2005083874A1 (de) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100698438B1 (ko) * | 2005-05-18 | 2007-03-22 | 한국과학기술연구원 | 변위 확대 기구를 갖는 압전 선형 모터 |
KR100768513B1 (ko) * | 2006-04-17 | 2007-10-18 | 주식회사 아이노바 | 향상된 변위를 제공하는 선형 압전 모터 |
KR100817470B1 (ko) | 2006-10-24 | 2008-03-31 | 한국과학기술연구원 | 압전 선형 모터 |
EP2122702B1 (de) * | 2007-01-18 | 2015-08-26 | Newport Corporation | Optische justierungsanbringungen mit einem piezoelektrischen trägheitstreiber |
JP2008259345A (ja) * | 2007-04-06 | 2008-10-23 | Shicoh Engineering Co Ltd | リニア駆動装置、レンズ駆動装置、カメラ及びカメラ付き携帯電話 |
CN101556366B (zh) * | 2008-04-09 | 2010-09-29 | 鸿富锦精密工业(深圳)有限公司 | 变焦镜头驱动装置 |
JP5544504B2 (ja) * | 2008-05-09 | 2014-07-09 | 新シコー科技株式会社 | リニア駆動装置、レンズ駆動装置、カメラ及びカメラ付き携帯電話 |
JP2009276422A (ja) * | 2008-05-13 | 2009-11-26 | Mitsumi Electric Co Ltd | 駆動装置 |
JP2010246277A (ja) * | 2009-04-07 | 2010-10-28 | Shicoh Engineering Co Ltd | リニア駆動装置 |
JP5540188B2 (ja) * | 2009-10-29 | 2014-07-02 | 新シコー科技株式会社 | リニア駆動装置 |
WO2011107982A1 (en) | 2010-03-01 | 2011-09-09 | Noa Habas | Visual and tactile display |
US8482868B2 (en) * | 2010-07-15 | 2013-07-09 | Newport Corporation | Optical adjustable mounts with absolute position feedback |
JP5447693B2 (ja) * | 2010-12-24 | 2014-03-19 | 株式会社村田製作所 | 加速度センサ |
JP5742856B2 (ja) | 2011-02-07 | 2015-07-01 | 株式会社村田製作所 | 変位部材、駆動部材、アクチュエータ及び駆動装置 |
WO2012127420A2 (en) | 2011-03-21 | 2012-09-27 | Ipu Industries Ltd. | An implatable prosthetic valve controllable with a piezoelectric mems actuator |
US9395011B2 (en) | 2012-10-14 | 2016-07-19 | Ipu Industries Ltd. | Proportional valve controlled with a piezoelectric linear actuator |
JP5540249B1 (ja) * | 2013-04-01 | 2014-07-02 | 新シコー科技株式会社 | 振動装置及び電子機器 |
RU2654014C2 (ru) * | 2013-05-07 | 2018-05-15 | Конинклейке Филипс Н.В. | Линейный цифровой пропорциональный пьезоэлектрический клапан |
JP6155460B2 (ja) * | 2013-06-06 | 2017-07-05 | 新シコー科技株式会社 | 駆動部材、リニア駆動装置、カメラ装置及び電子機器 |
DE102013211630A1 (de) | 2013-06-20 | 2014-12-24 | Robert Bosch Gmbh | Elektroakustischer Wandler |
US9312790B2 (en) | 2013-09-13 | 2016-04-12 | Physik Instrumente (Pi) Gmbh & Co. Kg | Compact versatile stick-slip piezoelectric motor |
JP5685703B1 (ja) * | 2013-09-20 | 2015-03-18 | 新シコー科技株式会社 | リニア駆動装置、リニア駆動装置を用いた電子機器及び身体装着品 |
JP5686330B2 (ja) * | 2014-02-25 | 2015-03-18 | 新シコー科技株式会社 | リニア駆動装置、レンズ駆動装置、カメラ及びカメラ付き携帯電話 |
US20170030474A1 (en) * | 2014-04-07 | 2017-02-02 | I.P.U. Industries Ltd | Pinch valve |
US9425711B2 (en) | 2014-04-15 | 2016-08-23 | Newport Corporation | Integral preload mechanism for piezoelectric actuator |
JP2016046407A (ja) * | 2014-08-25 | 2016-04-04 | 新シコー科技株式会社 | 圧電アクチュエータ、リニア駆動装置及び電子機器 |
WO2016123265A1 (en) | 2015-01-29 | 2016-08-04 | Newport Corporation | Integrated picomotor mount |
US11169231B2 (en) | 2017-11-23 | 2021-11-09 | Qonetec Ag | NMR probe head with piezoelectric actuators |
CN108199612A (zh) * | 2018-02-26 | 2018-06-22 | 盐城工学院 | 一种双驱动足型直线压电电机及电激励方法 |
JP7254285B2 (ja) * | 2019-04-23 | 2023-04-10 | 株式会社サタケ | 圧電式バルブ及び該圧電式バルブの製造方法 |
JP7193804B2 (ja) * | 2019-06-05 | 2022-12-21 | 株式会社サタケ | 圧電アクチュエータ、圧電式バルブ、及び圧電アクチュエータの製造方法 |
KR20210155633A (ko) * | 2020-06-16 | 2021-12-23 | 엘지이노텍 주식회사 | 초음파 리니어 모터 및 이의 구동 방법 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3949247A (en) * | 1972-03-10 | 1976-04-06 | Siemens Aktiengesellschaft | Mounting arrangement for a piezoelectric element |
JPS63283478A (ja) * | 1987-05-14 | 1988-11-21 | Marcon Electronics Co Ltd | 超音波モ−タ |
JPH02188169A (ja) * | 1989-01-13 | 1990-07-24 | Sony Corp | 超音波モータ |
JPH03178581A (ja) * | 1989-12-06 | 1991-08-02 | Sumitomo Metal Ind Ltd | 超音波リニアモータ |
US5225941A (en) * | 1990-07-03 | 1993-07-06 | Canon Kabushiki Kaisha | Driving device |
EP0591885B1 (de) * | 1992-10-06 | 1998-01-28 | Matsushita Electric Industrial Co., Ltd. | Piezoelektrische Kopfbetätigungsvorrichtung |
US5490015A (en) * | 1993-03-04 | 1996-02-06 | Olympus Optical Co., Ltd. | Actuator apparatus |
JPH0843872A (ja) * | 1994-08-03 | 1996-02-16 | Minolta Co Ltd | 電気−機械変換素子を使用したレンズ駆動装置 |
US5632841A (en) * | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
US5565726A (en) * | 1995-04-13 | 1996-10-15 | Toda; Kohji | Ultrasonic vibrating actuator |
JP3523488B2 (ja) * | 1998-03-31 | 2004-04-26 | 京セラ株式会社 | 超音波リニアモータおよびこれを用いた駆動装置 |
KR100483804B1 (ko) * | 2002-03-22 | 2005-04-20 | 한국과학기술연구원 | 압전 선형초음파모터 |
JP3832396B2 (ja) * | 2002-07-17 | 2006-10-11 | コニカミノルタフォトイメージング株式会社 | 駆動装置、位置制御装置およびカメラ |
-
2005
- 2005-02-04 JP JP2006541050A patent/JP2007516688A/ja active Pending
- 2005-02-04 AT AT05726601T patent/ATE479201T1/de not_active IP Right Cessation
- 2005-02-04 WO PCT/KR2005/000353 patent/WO2005083874A1/en not_active Application Discontinuation
- 2005-02-04 US US10/578,922 patent/US7498719B2/en active Active
- 2005-02-04 EP EP05726601A patent/EP1721382B1/de active Active
- 2005-02-04 DE DE602005023129T patent/DE602005023129D1/de active Active
-
2009
- 2009-01-22 US US12/357,438 patent/US20090127974A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2005083874A1 (en) | 2005-09-09 |
EP1721382B1 (de) | 2010-08-25 |
EP1721382A4 (de) | 2007-04-18 |
US20090127974A1 (en) | 2009-05-21 |
US7498719B2 (en) | 2009-03-03 |
EP1721382A1 (de) | 2006-11-15 |
ATE479201T1 (de) | 2010-09-15 |
US20070120442A1 (en) | 2007-05-31 |
JP2007516688A (ja) | 2007-06-21 |
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