ATE450054T1 - Transistor-gate-elektrode mit leiter- materialschicht und herstellungsverfahren - Google Patents

Transistor-gate-elektrode mit leiter- materialschicht und herstellungsverfahren

Info

Publication number
ATE450054T1
ATE450054T1 AT04815678T AT04815678T ATE450054T1 AT E450054 T1 ATE450054 T1 AT E450054T1 AT 04815678 T AT04815678 T AT 04815678T AT 04815678 T AT04815678 T AT 04815678T AT E450054 T1 ATE450054 T1 AT E450054T1
Authority
AT
Austria
Prior art keywords
gate electrode
conductor material
manufacturing
material layer
transistor gate
Prior art date
Application number
AT04815678T
Other languages
English (en)
Inventor
Anand Murphy
Boyan Boyanov
Suman Datta
Brian Doyle
Been-Yih Jin
Shaofeng Yu
Robert Chau
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE450054T1 publication Critical patent/ATE450054T1/de

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/1025—Channel region of field-effect devices
    • H01L29/1029—Channel region of field-effect devices of field-effect transistors
    • H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
    • H01L29/1054—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure with a variation of the composition, e.g. channel with strained layer for increasing the mobility
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823814—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
    • H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/8238—Complementary field-effect transistors, e.g. CMOS
    • H01L21/823857—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate insulating layers, e.g. different gate insulating layer thicknesses, particular gate insulator materials or particular gate insulator implants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
    • H01L29/66568—Lateral single gate silicon transistors
    • H01L29/66636—Lateral single gate silicon transistors with source or drain recessed by etching or first recessed by etching and then refilled
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/78—Field effect transistors with field effect produced by an insulated gate
    • H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
    • H01L29/7848—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate the means being located in the source/drain region, e.g. SiGe source and drain
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Film Transistor (AREA)
  • Junction Field-Effect Transistors (AREA)
AT04815678T 2003-12-24 2004-12-22 Transistor-gate-elektrode mit leiter- materialschicht und herstellungsverfahren ATE450054T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/745,978 US7223679B2 (en) 2003-12-24 2003-12-24 Transistor gate electrode having conductor material layer
PCT/US2004/043663 WO2005067055A1 (en) 2003-12-24 2004-12-22 Transistor gate electrode having conductor material layer

Publications (1)

Publication Number Publication Date
ATE450054T1 true ATE450054T1 (de) 2009-12-15

Family

ID=34710648

Family Applications (2)

Application Number Title Priority Date Filing Date
AT09012031T ATE543217T1 (de) 2003-12-24 2004-12-22 Transistor-gate-elektrode mit leitmaterialschicht
AT04815678T ATE450054T1 (de) 2003-12-24 2004-12-22 Transistor-gate-elektrode mit leiter- materialschicht und herstellungsverfahren

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT09012031T ATE543217T1 (de) 2003-12-24 2004-12-22 Transistor-gate-elektrode mit leitmaterialschicht

Country Status (8)

Country Link
US (5) US7223679B2 (de)
EP (2) EP2136404B1 (de)
KR (1) KR100856437B1 (de)
CN (1) CN100521232C (de)
AT (2) ATE543217T1 (de)
DE (1) DE602004024332D1 (de)
TW (1) TWI250649B (de)
WO (1) WO2005067055A1 (de)

Families Citing this family (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8994104B2 (en) 1999-09-28 2015-03-31 Intel Corporation Contact resistance reduction employing germanium overlayer pre-contact metalization
US7456476B2 (en) 2003-06-27 2008-11-25 Intel Corporation Nonplanar semiconductor device with partially or fully wrapped around gate electrode and methods of fabrication
US6909151B2 (en) 2003-06-27 2005-06-21 Intel Corporation Nonplanar device with stress incorporation layer and method of fabrication
US7223679B2 (en) * 2003-12-24 2007-05-29 Intel Corporation Transistor gate electrode having conductor material layer
US7217611B2 (en) * 2003-12-29 2007-05-15 Intel Corporation Methods for integrating replacement metal gate structures
US7268058B2 (en) * 2004-01-16 2007-09-11 Intel Corporation Tri-gate transistors and methods to fabricate same
US7002224B2 (en) * 2004-02-03 2006-02-21 Infineon Technologies Ag Transistor with doped gate dielectric
US7094671B2 (en) * 2004-03-22 2006-08-22 Infineon Technologies Ag Transistor with shallow germanium implantation region in channel
US6881635B1 (en) * 2004-03-23 2005-04-19 International Business Machines Corporation Strained silicon NMOS devices with embedded source/drain
US7154118B2 (en) 2004-03-31 2006-12-26 Intel Corporation Bulk non-planar transistor having strained enhanced mobility and methods of fabrication
KR100604870B1 (ko) 2004-06-16 2006-07-31 삼성전자주식회사 접합 영역의 어브럽트니스를 개선시킬 수 있는 전계 효과트랜지스터 및 그 제조방법
US8178902B2 (en) * 2004-06-17 2012-05-15 Infineon Technologies Ag CMOS transistor with dual high-k gate dielectric and method of manufacture thereof
US7042009B2 (en) 2004-06-30 2006-05-09 Intel Corporation High mobility tri-gate devices and methods of fabrication
DE102004036971B4 (de) * 2004-07-30 2009-07-30 Advanced Micro Devices, Inc., Sunnyvale Technik zur Bewertung lokaler elektrischer Eigenschaften in Halbleiterbauelementen
US7348284B2 (en) 2004-08-10 2008-03-25 Intel Corporation Non-planar pMOS structure with a strained channel region and an integrated strained CMOS flow
US7422946B2 (en) 2004-09-29 2008-09-09 Intel Corporation Independently accessed double-gate and tri-gate transistors in same process flow
US20060086977A1 (en) 2004-10-25 2006-04-27 Uday Shah Nonplanar device with thinned lower body portion and method of fabrication
US7129184B2 (en) * 2004-12-01 2006-10-31 Taiwan Semiconductor Manufacturing Company, Ltd. Method of depositing an epitaxial layer of SiGe subsequent to a plasma etch
US7518196B2 (en) 2005-02-23 2009-04-14 Intel Corporation Field effect transistor with narrow bandgap source and drain regions and method of fabrication
US20060202266A1 (en) 2005-03-14 2006-09-14 Marko Radosavljevic Field effect transistor with metal source/drain regions
US7858481B2 (en) 2005-06-15 2010-12-28 Intel Corporation Method for fabricating transistor with thinned channel
US7547637B2 (en) 2005-06-21 2009-06-16 Intel Corporation Methods for patterning a semiconductor film
US7279375B2 (en) 2005-06-30 2007-10-09 Intel Corporation Block contact architectures for nanoscale channel transistors
US7402875B2 (en) 2005-08-17 2008-07-22 Intel Corporation Lateral undercut of metal gate in SOI device
US7479421B2 (en) 2005-09-28 2009-01-20 Intel Corporation Process for integrating planar and non-planar CMOS transistors on a bulk substrate and article made thereby
US20070069302A1 (en) * 2005-09-28 2007-03-29 Been-Yih Jin Method of fabricating CMOS devices having a single work function gate electrode by band gap engineering and article made thereby
US20070090416A1 (en) 2005-09-28 2007-04-26 Doyle Brian S CMOS devices with a single work function gate electrode and method of fabrication
US7485503B2 (en) 2005-11-30 2009-02-03 Intel Corporation Dielectric interface for group III-V semiconductor device
US8183556B2 (en) 2005-12-15 2012-05-22 Intel Corporation Extreme high mobility CMOS logic
US8143646B2 (en) 2006-08-02 2012-03-27 Intel Corporation Stacking fault and twin blocking barrier for integrating III-V on Si
US7858471B2 (en) * 2006-09-13 2010-12-28 Micron Technology, Inc. Methods of fabricating an access transistor for an integrated circuit device, methods of fabricating periphery transistors and access transistors, and methods of fabricating an access device comprising access transistors in an access circuitry region and peripheral transistors in a peripheral circuitry region spaced from the access circuitry region
US7550796B2 (en) 2006-12-06 2009-06-23 Electronics And Telecommunications Research Institute Germanium semiconductor device and method of manufacturing the same
KR100854501B1 (ko) 2007-02-23 2008-08-26 삼성전자주식회사 리세스 채널 영역을 갖는 모스 트랜지스터 및 그 제조방법
US8030163B2 (en) * 2007-12-26 2011-10-04 Intel Corporation Reducing external resistance of a multi-gate device using spacer processing techniques
US7763943B2 (en) * 2007-12-26 2010-07-27 Intel Corporation Reducing external resistance of a multi-gate device by incorporation of a partial metallic fin
US20090206404A1 (en) * 2008-02-15 2009-08-20 Ravi Pillarisetty Reducing external resistance of a multi-gate device by silicidation
US7635648B2 (en) * 2008-04-10 2009-12-22 Applied Materials, Inc. Methods for fabricating dual material gate in a semiconductor device
US8172424B2 (en) * 2009-05-01 2012-05-08 Abl Ip Holding Llc Heat sinking and flexible circuit board, for solid state light fixture utilizing an optical cavity
US8362566B2 (en) 2008-06-23 2013-01-29 Intel Corporation Stress in trigate devices using complimentary gate fill materials
US20100102393A1 (en) * 2008-10-29 2010-04-29 Chartered Semiconductor Manufacturing, Ltd. Metal gate transistors
US8252649B2 (en) 2008-12-22 2012-08-28 Infineon Technologies Ag Methods of fabricating semiconductor devices and structures thereof
DE102008064796B3 (de) * 2008-12-31 2013-11-28 Advanced Micro Devices, Inc. Verringerung der Schwellwertspannungsfluktuation in Transistoren mit einer Kanalhalbleiterlegierung durch Verringern der Abscheideungleichmäßigkeiten
DE102008063402B4 (de) * 2008-12-31 2013-10-17 Advanced Micro Devices, Inc. Verringerung der Schwellwertspannungsfluktuation in Transistoren mit einer Kanalhalbleiterlegierung durch Verringern der Abscheideungleichmäßigkeiten
KR101096980B1 (ko) 2009-02-04 2011-12-20 주식회사 하이닉스반도체 반도체 소자의 제조 방법
KR101592505B1 (ko) * 2009-02-16 2016-02-05 삼성전자주식회사 반도체 메모리 소자 및 이의 제조 방법
US8298882B2 (en) * 2009-09-18 2012-10-30 International Business Machines Corporation Metal gate and high-K dielectric devices with PFET channel SiGe
US8441775B2 (en) * 2009-12-15 2013-05-14 Empire Technology Development, Llc Conformal deposition of dielectric composites by eletrophoresis
KR20110095456A (ko) * 2010-02-19 2011-08-25 삼성전자주식회사 트랜지스터 및 그 제조 방법
US8669155B2 (en) * 2010-09-03 2014-03-11 Institute of Microelectronics, Chinese Academy of Sciences Hybrid channel semiconductor device and method for forming the same
US9484432B2 (en) 2010-12-21 2016-11-01 Intel Corporation Contact resistance reduction employing germanium overlayer pre-contact metalization
US8901537B2 (en) 2010-12-21 2014-12-02 Intel Corporation Transistors with high concentration of boron doped germanium
US9082633B2 (en) * 2011-10-13 2015-07-14 Xilinx, Inc. Multi-die integrated circuit structure with heat sink
CN103077969B (zh) * 2011-10-26 2016-03-30 中国科学院微电子研究所 一种mos器件及其制造方法
US8865560B2 (en) * 2012-03-02 2014-10-21 Taiwan Semiconductor Manufacturing Company, Ltd. FinFET design with LDD extensions
KR101986534B1 (ko) 2012-06-04 2019-06-07 삼성전자주식회사 내장된 스트레인-유도 패턴을 갖는 반도체 소자 및 그 형성 방법
US10438856B2 (en) * 2013-04-03 2019-10-08 Stmicroelectronics, Inc. Methods and devices for enhancing mobility of charge carriers
US9373501B2 (en) * 2013-04-16 2016-06-21 International Business Machines Corporation Hydroxyl group termination for nucleation of a dielectric metallic oxide
US9947772B2 (en) 2014-03-31 2018-04-17 Stmicroelectronics, Inc. SOI FinFET transistor with strained channel
CN105448737A (zh) 2014-09-30 2016-03-30 联华电子股份有限公司 用以形成硅凹槽的蚀刻制作工艺方法与鳍式场效晶体管
US9978854B2 (en) 2014-11-19 2018-05-22 United Microelectronics Corporation Fin field-effect transistor
CN105244281A (zh) * 2015-10-14 2016-01-13 上海华力微电子有限公司 一种半导体器件的制备方法
US9960284B2 (en) 2015-10-30 2018-05-01 Globalfoundries Inc. Semiconductor structure including a varactor
KR102465353B1 (ko) 2015-12-02 2022-11-10 삼성전자주식회사 전계 효과 트랜지스터 및 이를 포함하는 반도체 소자
US9859157B1 (en) 2016-07-14 2018-01-02 International Business Machines Corporation Method for forming improved liner layer and semiconductor device including the same
CN111933729B (zh) * 2020-08-18 2022-03-01 中国电子科技集团公司第四十四研究所 低暗电流硅基锗探测器的制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6399970B2 (en) 1996-09-17 2002-06-04 Matsushita Electric Industrial Co., Ltd. FET having a Si/SiGeC heterojunction channel
KR100495543B1 (ko) * 1996-09-17 2005-09-08 마츠시타 덴끼 산교 가부시키가이샤 반도체장치및그제조방법
DE19720008A1 (de) * 1997-05-13 1998-11-19 Siemens Ag Integrierte CMOS-Schaltungsanordnung und Verfahren zu deren Herstellung
JP3443343B2 (ja) * 1997-12-03 2003-09-02 松下電器産業株式会社 半導体装置
US6225168B1 (en) * 1998-06-04 2001-05-01 Advanced Micro Devices, Inc. Semiconductor device having metal gate electrode and titanium or tantalum nitride gate dielectric barrier layer and process of fabrication thereof
JP3403076B2 (ja) * 1998-06-30 2003-05-06 株式会社東芝 半導体装置及びその製造方法
US6326667B1 (en) * 1999-09-09 2001-12-04 Kabushiki Kaisha Toshiba Semiconductor devices and methods for producing semiconductor devices
US6555839B2 (en) * 2000-05-26 2003-04-29 Amberwave Systems Corporation Buried channel strained silicon FET using a supply layer created through ion implantation
JP2002190521A (ja) * 2000-10-12 2002-07-05 Oki Electric Ind Co Ltd 半導体装置の製造方法
US7138649B2 (en) 2001-08-09 2006-11-21 Amberwave Systems Corporation Dual-channel CMOS transistors with differentially strained channels
US6894353B2 (en) * 2002-07-31 2005-05-17 Freescale Semiconductor, Inc. Capped dual metal gate transistors for CMOS process and method for making the same
US6686637B1 (en) * 2002-11-21 2004-02-03 International Business Machines Corporation Gate structure with independently tailored vertical doping profile
US6933227B2 (en) * 2003-10-23 2005-08-23 Freescale Semiconductor, Inc. Semiconductor device and method of forming the same
US7223679B2 (en) * 2003-12-24 2007-05-29 Intel Corporation Transistor gate electrode having conductor material layer

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US7642610B2 (en) 2010-01-05
WO2005067055A1 (en) 2005-07-21
TWI250649B (en) 2006-03-01
EP1697994B1 (de) 2009-11-25
EP2136404B1 (de) 2012-01-25
KR100856437B1 (ko) 2008-09-04
US20090315076A1 (en) 2009-12-24
EP1697994A1 (de) 2006-09-06
KR20060103462A (ko) 2006-09-29
US7968957B2 (en) 2011-06-28
DE602004024332D1 (de) 2010-01-07
US7223679B2 (en) 2007-05-29
EP2136404A1 (de) 2009-12-23
ATE543217T1 (de) 2012-02-15
US7871916B2 (en) 2011-01-18
US20110186912A1 (en) 2011-08-04
US20050145944A1 (en) 2005-07-07
US20070170464A1 (en) 2007-07-26
US20110018031A1 (en) 2011-01-27
CN1922735A (zh) 2007-02-28
US8237234B2 (en) 2012-08-07
TW200525747A (en) 2005-08-01
CN100521232C (zh) 2009-07-29

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