ATE446528T1 - Oszillator, optische ablenkeinheit und optisches instrument mit dieser - Google Patents

Oszillator, optische ablenkeinheit und optisches instrument mit dieser

Info

Publication number
ATE446528T1
ATE446528T1 AT07109640T AT07109640T ATE446528T1 AT E446528 T1 ATE446528 T1 AT E446528T1 AT 07109640 T AT07109640 T AT 07109640T AT 07109640 T AT07109640 T AT 07109640T AT E446528 T1 ATE446528 T1 AT E446528T1
Authority
AT
Austria
Prior art keywords
oscillation
optical
oscillator
projected parts
oscillation part
Prior art date
Application number
AT07109640T
Other languages
German (de)
English (en)
Inventor
Takahisa Kato
Yukio Furukawa
Takahiro Akiyama
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE446528T1 publication Critical patent/ATE446528T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02084—Processing in the Fourier or frequency domain when not imaged in the frequency domain
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
AT07109640T 2006-06-07 2007-06-05 Oszillator, optische ablenkeinheit und optisches instrument mit dieser ATE446528T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006158004 2006-06-07
JP2007065950 2007-03-15
JP2007130619A JP5121301B2 (ja) 2006-06-07 2007-05-16 揺動体装置、光偏向器、及びそれを用いた光学機器

Publications (1)

Publication Number Publication Date
ATE446528T1 true ATE446528T1 (de) 2009-11-15

Family

ID=39978264

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07109640T ATE446528T1 (de) 2006-06-07 2007-06-05 Oszillator, optische ablenkeinheit und optisches instrument mit dieser

Country Status (4)

Country Link
JP (2) JP5121301B2 (ja)
KR (1) KR101030847B1 (ja)
AT (1) ATE446528T1 (ja)
DE (2) DE602007002846D1 (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2330456A4 (en) 2008-09-25 2012-04-11 Konica Minolta Opto Inc OPTICAL SCANNER
JP2010230792A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 光学デバイス、光スキャナー及び画像形成装置
JP6060577B2 (ja) * 2012-09-13 2017-01-18 Jsr株式会社 ネガ型レジストパターン形成方法
JP5922603B2 (ja) * 2013-03-04 2016-05-24 日本電信電話株式会社 マイクロミラー素子およびマイクロミラーアレイ
JP5993509B2 (ja) * 2015-10-05 2016-09-14 京セラドキュメントソリューションズ株式会社 光走査装置及び該光走査装置を備えた画像形成装置、並びに、光走査装置の振動ミラー部の質量調整方法。
JP6959525B2 (ja) * 2017-12-21 2021-11-02 ミツミ電機株式会社 光走査装置
JP6651110B1 (ja) * 2019-05-28 2020-02-19 Ｄｏｌｐｈｉｎ株式会社 物体検出装置
JP6890856B1 (ja) * 2020-03-04 2021-06-18 国立大学法人東北大学 全方位走査ミラー
CN113495335B (zh) * 2020-03-18 2023-08-25 扬明光学股份有限公司 光路调整机构及其制造方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0875475A (ja) * 1994-09-01 1996-03-22 Omron Corp 共振子、当該共振子を用いた光走査装置、視覚認識装置、振動センサ及び振動ジャイロ
US5969465A (en) * 1997-04-01 1999-10-19 Xros, Inc. Adjusting operating characteristics of micromachined torsional oscillators
US6384406B1 (en) * 1999-08-05 2002-05-07 Microvision, Inc. Active tuning of a torsional resonant structure
JP4516673B2 (ja) * 2000-07-28 2010-08-04 シチズンファインテックミヨタ株式会社 プレーナ型ガルバノミラーの製造方法
JP4390174B2 (ja) * 2001-09-14 2009-12-24 株式会社リコー 光走査装置
AU2003215417A1 (en) * 2002-03-26 2003-10-08 Optiscan Pty Ltd Light scanning device
JP2005181926A (ja) * 2003-12-24 2005-07-07 Canon Inc 光偏向器及びその製造方法、それを用いた光学機器
JP4027359B2 (ja) * 2003-12-25 2007-12-26 キヤノン株式会社 マイクロ揺動体、光偏向器、画像形成装置
JP2005326745A (ja) * 2004-05-17 2005-11-24 Canon Inc 光偏向装置およびその制御方法
JP2006178408A (ja) * 2004-11-25 2006-07-06 Ricoh Co Ltd スキャナ素子、光走査装置および画像形成装置
JP2006230048A (ja) * 2005-02-15 2006-08-31 Seiko Epson Corp アクチュエータの共振周波数の調整方法およびアクチュエータ
JP2006243034A (ja) * 2005-02-28 2006-09-14 Ricoh Co Ltd 光走査装置、および画像形成装置
JP4881073B2 (ja) * 2006-05-30 2012-02-22 キヤノン株式会社 光偏向器、及びそれを用いた光学機器

Also Published As

Publication number Publication date
KR20090015179A (ko) 2009-02-11
JP2008254162A (ja) 2008-10-23
JP5400925B2 (ja) 2014-01-29
JP2012226359A (ja) 2012-11-15
JP5121301B2 (ja) 2013-01-16
DE602007002846D1 (de) 2009-12-03
KR101030847B1 (ko) 2011-04-22
DE602007002362D1 (de) 2009-10-22

Similar Documents

Publication Publication Date Title
ATE446528T1 (de) Oszillator, optische ablenkeinheit und optisches instrument mit dieser
WO2007075581A3 (en) Accommodating artificial ocular lens (aaol) device
DK1720489T3 (da) To optiske elementer, der i kombination danner en linse med variabel optisk styrke til anvendlese som en intraokulær linse
DE602005021744D1 (de) Optische Abtastvorrichtung und Bildanzeigegerät
EA200900385A1 (ru) Внутриглазное устройство для поддержания линз
ATE481662T1 (de) Armbanduhr-regulierungsglied und mechanisches uhrwerk mit einem solchen regulierungsglied
ATE538404T1 (de) Optisches system, objektivtubus; belichtungssystem und bauelemente- herstellungsverfahren
DE602005019551D1 (de) Gemischer optischer und mechanischer sensor und dazugehöriges rücksetzverfahren
RU2011153931A (ru) Устройство для лазерной хирургической офтальмологии
WO2006110766A3 (en) Goggles
DE602006019158D1 (de) Verformbare intraokulare Linsen und Linsensysteme
RU2013118321A (ru) Визирное устройство
EP2535759A3 (en) Optical scanning device
WO2005081035A3 (en) Mens mirror with trenched surface driven by an electrostatic comb actuator with tapered comb teeth
ATE506917T1 (de) Gleitende patellaprothese
ATE513252T1 (de) Tourbillon-uhrwerk
WO2007112259A3 (en) System and method for laser speckle reduction
TW200705086A (en) Vibration type tilting device and image projection device having the tilting device
ATE340368T1 (de) Strahlsteueranordnungen und optische schalter
FR2888226B1 (fr) Dispositif de va-et-vient a bras oscillant
JP2008254162A5 (ja)
WO2006071720A3 (en) Motion-compensating light-emitting apparatus
WO2007076485A3 (en) Motion-compensating light-emitting apparatus
EP2808296A3 (en) Light deflector, light deflector manufacturing method and optical scanning device
US7553048B2 (en) Stabilized mirror system for a handheld laser pointer

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties