ATE428528T1 - Verfahren zum entfernen von oberflächigem oxyde mit einem flussmittelfreien prozess mittels zugabe von elektronen und entfernte ionenerzeugung - Google Patents
Verfahren zum entfernen von oberflächigem oxyde mit einem flussmittelfreien prozess mittels zugabe von elektronen und entfernte ionenerzeugungInfo
- Publication number
- ATE428528T1 ATE428528T1 AT04010009T AT04010009T ATE428528T1 AT E428528 T1 ATE428528 T1 AT E428528T1 AT 04010009 T AT04010009 T AT 04010009T AT 04010009 T AT04010009 T AT 04010009T AT E428528 T1 ATE428528 T1 AT E428528T1
- Authority
- AT
- Austria
- Prior art keywords
- interior hollow
- voltage level
- oxyde
- electrons
- flux
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
- B23K1/0016—Brazing of electronic components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/008—Soldering within a furnace
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/012—Soldering with the use of hot gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K1/00—Soldering, e.g. brazing, or unsoldering
- B23K1/20—Preliminary treatment of work or areas to be soldered, e.g. in respect of a galvanic coating
- B23K1/206—Cleaning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3489—Composition of fluxes; Methods of application thereof; Other methods of activating the contact surfaces
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Electron Sources, Ion Sources (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/425,426 US7079370B2 (en) | 2003-04-28 | 2003-04-28 | Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation |
US10/819,227 US7217121B2 (en) | 2000-06-26 | 2004-04-07 | Method and apparatus for improved process control in combustion applications |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE428528T1 true ATE428528T1 (de) | 2009-05-15 |
Family
ID=33415917
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04010009T ATE428528T1 (de) | 2003-04-28 | 2004-04-27 | Verfahren zum entfernen von oberflächigem oxyde mit einem flussmittelfreien prozess mittels zugabe von elektronen und entfernte ionenerzeugung |
AT07002567T ATE505285T1 (de) | 2003-04-28 | 2004-04-27 | Vorrichtung zur erzeugung eines negativ geladenen reduzierenden ionengases |
AT07002568T ATE480360T1 (de) | 2003-04-28 | 2004-04-27 | Verwendung einer vorrichtung zur erzeugung eines negativ geladenen reduzierenden ionengases |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT07002567T ATE505285T1 (de) | 2003-04-28 | 2004-04-27 | Vorrichtung zur erzeugung eines negativ geladenen reduzierenden ionengases |
AT07002568T ATE480360T1 (de) | 2003-04-28 | 2004-04-27 | Verwendung einer vorrichtung zur erzeugung eines negativ geladenen reduzierenden ionengases |
Country Status (5)
Country | Link |
---|---|
US (4) | US7079370B2 (de) |
EP (1) | EP2308629A1 (de) |
JP (1) | JP5596319B2 (de) |
AT (3) | ATE428528T1 (de) |
DE (3) | DE602004020539D1 (de) |
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JP4009087B2 (ja) * | 2001-07-06 | 2007-11-14 | アプライド マテリアルズ インコーポレイテッド | 半導体製造装置における磁気発生装置、半導体製造装置および磁場強度制御方法 |
US20030029837A1 (en) * | 2001-08-10 | 2003-02-13 | Applied Materials, Inc. | Dielectric etch plasma chamber utilizing a magnetic filter to optimize plasma characteristics |
US6776330B2 (en) | 2001-09-10 | 2004-08-17 | Air Products And Chemicals, Inc. | Hydrogen fluxless soldering by electron attachment |
US7387738B2 (en) * | 2003-04-28 | 2008-06-17 | Air Products And Chemicals, Inc. | Removal of surface oxides by electron attachment for wafer bumping applications |
US7079370B2 (en) * | 2003-04-28 | 2006-07-18 | Air Products And Chemicals, Inc. | Apparatus and method for removal of surface oxides via fluxless technique electron attachment and remote ion generation |
-
2003
- 2003-04-28 US US10/425,426 patent/US7079370B2/en not_active Expired - Lifetime
-
2004
- 2004-04-07 US US10/819,277 patent/US7977598B2/en not_active Expired - Lifetime
- 2004-04-27 AT AT04010009T patent/ATE428528T1/de not_active IP Right Cessation
- 2004-04-27 DE DE602004020539T patent/DE602004020539D1/de not_active Expired - Lifetime
- 2004-04-27 DE DE602004032271T patent/DE602004032271D1/de not_active Expired - Lifetime
- 2004-04-27 AT AT07002567T patent/ATE505285T1/de not_active IP Right Cessation
- 2004-04-27 EP EP10012838A patent/EP2308629A1/de not_active Withdrawn
- 2004-04-27 AT AT07002568T patent/ATE480360T1/de not_active IP Right Cessation
- 2004-04-27 DE DE602004029099T patent/DE602004029099D1/de not_active Expired - Lifetime
-
2006
- 2006-03-27 US US11/389,772 patent/US7307826B2/en not_active Expired - Lifetime
-
2009
- 2009-08-31 JP JP2009199943A patent/JP5596319B2/ja not_active Expired - Fee Related
-
2011
- 2011-06-02 US US13/151,883 patent/US8593778B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE602004032271D1 (de) | 2011-05-26 |
JP2010043357A (ja) | 2010-02-25 |
US7307826B2 (en) | 2007-12-11 |
US20040226914A1 (en) | 2004-11-18 |
ATE480360T1 (de) | 2010-09-15 |
DE602004029099D1 (de) | 2010-10-21 |
DE602004020539D1 (de) | 2009-05-28 |
EP2308629A1 (de) | 2011-04-13 |
US8593778B2 (en) | 2013-11-26 |
US20040231597A1 (en) | 2004-11-25 |
US7079370B2 (en) | 2006-07-18 |
US20060164784A1 (en) | 2006-07-27 |
JP5596319B2 (ja) | 2014-09-24 |
US20110229377A1 (en) | 2011-09-22 |
US7977598B2 (en) | 2011-07-12 |
ATE505285T1 (de) | 2011-04-15 |
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