ATE414270T1 - Optische inspektion von testoberflächen - Google Patents

Optische inspektion von testoberflächen

Info

Publication number
ATE414270T1
ATE414270T1 AT05787466T AT05787466T ATE414270T1 AT E414270 T1 ATE414270 T1 AT E414270T1 AT 05787466 T AT05787466 T AT 05787466T AT 05787466 T AT05787466 T AT 05787466T AT E414270 T1 ATE414270 T1 AT E414270T1
Authority
AT
Austria
Prior art keywords
grid
test
scatterometer
test surface
another aspect
Prior art date
Application number
AT05787466T
Other languages
English (en)
Inventor
Sipke Wadman
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Application granted granted Critical
Publication of ATE414270T1 publication Critical patent/ATE414270T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4735—Solid samples, e.g. paper, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating

Landscapes

  • Immunology (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Image Processing (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Glass Compositions (AREA)
AT05787466T 2004-10-08 2005-10-05 Optische inspektion von testoberflächen ATE414270T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61719004P 2004-10-08 2004-10-08

Publications (1)

Publication Number Publication Date
ATE414270T1 true ATE414270T1 (de) 2008-11-15

Family

ID=35457100

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05787466T ATE414270T1 (de) 2004-10-08 2005-10-05 Optische inspektion von testoberflächen

Country Status (9)

Country Link
US (1) US7649628B2 (de)
EP (1) EP1800112B1 (de)
JP (1) JP4777992B2 (de)
KR (3) KR20070072514A (de)
CN (1) CN101036045B (de)
AT (1) ATE414270T1 (de)
DE (1) DE602005011032D1 (de)
TW (3) TWI412735B (de)
WO (1) WO2006038196A1 (de)

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DE102014117498B4 (de) * 2014-11-28 2018-06-07 Carl Zeiss Ag Optische Vermessungsvorrichtung und Verfahren zur optischen Vermessung
TWI554754B (zh) * 2015-04-02 2016-10-21 財團法人國家實驗研究院 適用於圓管內部缺陷的光學檢測系統及其方法
JP6818403B2 (ja) * 2015-07-22 2021-01-20 キヤノン株式会社 光学特性の測定装置
FR3049709B1 (fr) * 2016-04-05 2019-08-30 Areva Np Procede de detection d'un defaut sur une surface par eclairage multidirectionnel et dispositif associe
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EP3743682A4 (de) 2018-01-24 2021-10-13 Humanetics Innovative Solutions, Inc. Faseroptisches system zur erfassung von kräften bei und zur messung der verformung von einer anthropomorphen testvorrichtung
CN108827981A (zh) * 2018-06-27 2018-11-16 西安工业大学 超光滑光学元件表面缺陷类型的检测系统及其测量方法
CN108917649A (zh) * 2018-07-26 2018-11-30 深圳市智能机器人研究院 一种大口径非球面镜结构光检测方法
JP6482710B1 (ja) * 2018-09-06 2019-03-13 五洋商事株式会社 外観検査装置及び検査システム
CN113383207A (zh) * 2018-10-04 2021-09-10 杜·普雷兹·伊萨克 光学表面编码器
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CN111307103B (zh) * 2019-10-30 2022-03-11 安徽中斯特流体设备有限公司 一种半球阀球体偏心测量装置
CN112557348B (zh) * 2021-01-04 2023-12-19 中交国通公路工程技术有限公司 一种便于使用的逆反射系数测试仪
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Also Published As

Publication number Publication date
TW201323856A (zh) 2013-06-16
KR20120098958A (ko) 2012-09-05
EP1800112B1 (de) 2008-11-12
WO2006038196A1 (en) 2006-04-13
KR101256390B1 (ko) 2013-04-25
TW201323855A (zh) 2013-06-16
TWI481854B (zh) 2015-04-21
TWI497054B (zh) 2015-08-21
TWI412735B (zh) 2013-10-21
JP4777992B2 (ja) 2011-09-21
KR101256391B1 (ko) 2013-04-25
EP1800112A1 (de) 2007-06-27
CN101036045A (zh) 2007-09-12
JP2008516224A (ja) 2008-05-15
US7649628B2 (en) 2010-01-19
CN101036045B (zh) 2010-09-01
KR20070072514A (ko) 2007-07-04
US20090116023A1 (en) 2009-05-07
DE602005011032D1 (de) 2008-12-24
TW200626887A (en) 2006-08-01
KR20120098959A (ko) 2012-09-05

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