DE602005011032D1 - Optische inspektion von testoberflächen - Google Patents

Optische inspektion von testoberflächen

Info

Publication number
DE602005011032D1
DE602005011032D1 DE602005011032T DE602005011032T DE602005011032D1 DE 602005011032 D1 DE602005011032 D1 DE 602005011032D1 DE 602005011032 T DE602005011032 T DE 602005011032T DE 602005011032 T DE602005011032 T DE 602005011032T DE 602005011032 D1 DE602005011032 D1 DE 602005011032D1
Authority
DE
Germany
Prior art keywords
grid
test
scatterometer
test surface
another aspect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005011032T
Other languages
English (en)
Inventor
Sipke Wadman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips Electronics NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips Electronics NV filed Critical Koninklijke Philips Electronics NV
Publication of DE602005011032D1 publication Critical patent/DE602005011032D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N2021/4735—Solid samples, e.g. paper, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0635—Structured illumination, e.g. with grating
DE602005011032T 2004-10-08 2005-10-05 Optische inspektion von testoberflächen Active DE602005011032D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US61719004P 2004-10-08 2004-10-08
PCT/IB2005/053277 WO2006038196A1 (en) 2004-10-08 2005-10-05 Optical inspection of test surfaces

Publications (1)

Publication Number Publication Date
DE602005011032D1 true DE602005011032D1 (de) 2008-12-24

Family

ID=35457100

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005011032T Active DE602005011032D1 (de) 2004-10-08 2005-10-05 Optische inspektion von testoberflächen

Country Status (9)

Country Link
US (1) US7649628B2 (de)
EP (1) EP1800112B1 (de)
JP (1) JP4777992B2 (de)
KR (3) KR101256391B1 (de)
CN (1) CN101036045B (de)
AT (1) ATE414270T1 (de)
DE (1) DE602005011032D1 (de)
TW (3) TWI481854B (de)
WO (1) WO2006038196A1 (de)

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EP2040061A1 (de) * 2007-09-24 2009-03-25 Koninklijke Philips Electronics N.V. Vorrichtung und Verfahren zur Beobachtung der Oberfläche einer Probe
DE102010007396B4 (de) * 2010-02-03 2013-10-02 Carl Zeiss Oim Gmbh Verfahren und Vorrichtung zum optischen Inspizieren eines Prüflings mit einer zumindest teilweise reflektierenden Oberfläche
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JP6193218B2 (ja) 2011-05-20 2017-09-06 ユニベルシタート ポリテクニカ デ カタルーニャ 表面を非接触にて測定するための方法および装置
US9561022B2 (en) 2012-02-27 2017-02-07 Covidien Lp Device and method for optical image correction in metrology systems
US8976250B2 (en) 2012-05-01 2015-03-10 Apple Inc. Lens inspection system
DE102012104282A1 (de) 2012-05-16 2013-11-21 Isra Vision Ag Verfahren und Vorrichtung zur Inspektion von Oberflächen eines untersuchten Objekts
JP6250040B2 (ja) 2012-05-18 2017-12-20 シーメンス・ヘルスケア・ダイアグノスティックス・インコーポレーテッドＳｉｅｍｅｎｓ Ｈｅａｌｔｈｃａｒｅ Ｄｉａｇｎｏｓｔｉｃｓ Ｉｎｃ． 魚眼レンズ・アナライザ
WO2014023345A1 (de) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Verbesserte vorrichtung zum inspizieren eines objekts und verfahren
US8823930B2 (en) 2012-08-07 2014-09-02 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus and method for inspecting an object
KR101731893B1 (ko) * 2012-11-05 2017-05-02 제이에프이 스틸 가부시키가이샤 자동차용 부품의 외판 패널의 동적 인장 강성의 측정 방법 및 측정 장치
US9721304B1 (en) * 2013-07-15 2017-08-01 Liberty Mutual Insurance Company Vehicle damage assessment using 3D scanning
EP2835973B1 (de) * 2013-08-06 2015-10-07 Sick Ag 3D-Kamera und Verfahren zur Erfassung von dreidimensionalen Bilddaten
CN103424088B (zh) * 2013-08-12 2016-01-13 韵升控股集团有限公司 一种倒角测量仪
US8736685B1 (en) * 2013-12-11 2014-05-27 Anritsu Company Systems and methods for measuring brightness response of a camera operating in automatic exposure mode
CN103673934A (zh) * 2013-12-31 2014-03-26 中国矿业大学 一种基于网格投影的pcb板平整度检测方法
DE102014117498B4 (de) * 2014-11-28 2018-06-07 Carl Zeiss Ag Optische Vermessungsvorrichtung und Verfahren zur optischen Vermessung
TWI554754B (zh) * 2015-04-02 2016-10-21 財團法人國家實驗研究院 適用於圓管內部缺陷的光學檢測系統及其方法
JP6818403B2 (ja) 2015-07-22 2021-01-20 キヤノン株式会社 光学特性の測定装置
FR3049709B1 (fr) * 2016-04-05 2019-08-30 Areva Np Procede de detection d'un defaut sur une surface par eclairage multidirectionnel et dispositif associe
DE102016106535B4 (de) * 2016-04-08 2019-03-07 Carl Zeiss Ag Vorrichtung und Verfahren zum Vermessen einer Flächentopografie
FR3061300B1 (fr) * 2016-12-26 2020-06-12 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede d'observation d'un objet
JP6557688B2 (ja) * 2017-01-13 2019-08-07 キヤノン株式会社 計測装置、情報処理装置、情報処理方法、およびプログラム
US10084997B1 (en) * 2017-05-23 2018-09-25 Sony Corporation Adaptive optics for a video projector
ES2910779T3 (es) * 2017-12-20 2022-05-13 Fundacion Tecnalia Res & Innovation Métodos y sistemas para inspección visual
US11709105B2 (en) 2018-01-24 2023-07-25 Humanetics Innovative Solutions, Inc. Fiber optic system for detecting forces on and measuring deformation of an anthropomorphic test device
CN108827981A (zh) * 2018-06-27 2018-11-16 西安工业大学 超光滑光学元件表面缺陷类型的检测系统及其测量方法
CN108917649A (zh) * 2018-07-26 2018-11-30 深圳市智能机器人研究院 一种大口径非球面镜结构光检测方法
JP6482710B1 (ja) * 2018-09-06 2019-03-13 五洋商事株式会社 外観検査装置及び検査システム
US20220051423A1 (en) * 2018-10-04 2022-02-17 Isak Du Preez Optical Surface Encoder
CN113710998A (zh) 2019-02-20 2021-11-26 惠曼创新解决方案公司 用于在碰撞测试期间检测力的具有螺旋芯结构的光纤系统
CN111307103B (zh) * 2019-10-30 2022-03-11 安徽中斯特流体设备有限公司 一种半球阀球体偏心测量装置
CN112557348B (zh) * 2021-01-04 2023-12-19 中交国通公路工程技术有限公司 一种便于使用的逆反射系数测试仪
CN115184282B (zh) * 2022-09-13 2023-01-17 北京理工大学 一种包含对比板的成像式散射属性测量系统及测量方法

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Also Published As

Publication number Publication date
TWI412735B (zh) 2013-10-21
TWI497054B (zh) 2015-08-21
KR20070072514A (ko) 2007-07-04
CN101036045B (zh) 2010-09-01
WO2006038196A1 (en) 2006-04-13
TW200626887A (en) 2006-08-01
TWI481854B (zh) 2015-04-21
KR20120098958A (ko) 2012-09-05
ATE414270T1 (de) 2008-11-15
KR101256391B1 (ko) 2013-04-25
KR20120098959A (ko) 2012-09-05
TW201323855A (zh) 2013-06-16
TW201323856A (zh) 2013-06-16
KR101256390B1 (ko) 2013-04-25
EP1800112B1 (de) 2008-11-12
US20090116023A1 (en) 2009-05-07
CN101036045A (zh) 2007-09-12
EP1800112A1 (de) 2007-06-27
US7649628B2 (en) 2010-01-19
JP2008516224A (ja) 2008-05-15
JP4777992B2 (ja) 2011-09-21

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