ATE367406T1 - Verfahren zur herstellung von hydroxy-vinyl aromatische polymere oder copolymere durch anionische oder kontrollierte radikal polymerisation - Google Patents
Verfahren zur herstellung von hydroxy-vinyl aromatische polymere oder copolymere durch anionische oder kontrollierte radikal polymerisationInfo
- Publication number
- ATE367406T1 ATE367406T1 AT03810997T AT03810997T ATE367406T1 AT E367406 T1 ATE367406 T1 AT E367406T1 AT 03810997 T AT03810997 T AT 03810997T AT 03810997 T AT03810997 T AT 03810997T AT E367406 T1 ATE367406 T1 AT E367406T1
- Authority
- AT
- Austria
- Prior art keywords
- anionic
- copolymers
- radical polymerization
- controlled radical
- aromatic polymers
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F12/00—Homopolymers and copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring
- C08F12/02—Monomers containing only one unsaturated aliphatic radical
- C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
- C08F12/22—Oxygen
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
- C08G61/12—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Emergency Medicine (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Polymerization Catalysts (AREA)
- Polymerisation Methods In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02405980 | 2002-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE367406T1 true ATE367406T1 (de) | 2007-08-15 |
Family
ID=32309518
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03810997T ATE367406T1 (de) | 2002-11-14 | 2003-11-05 | Verfahren zur herstellung von hydroxy-vinyl aromatische polymere oder copolymere durch anionische oder kontrollierte radikal polymerisation |
Country Status (10)
Country | Link |
---|---|
US (1) | US7385009B2 (de) |
EP (1) | EP1572758B1 (de) |
JP (1) | JP4563814B2 (de) |
KR (1) | KR101043904B1 (de) |
CN (1) | CN100363390C (de) |
AT (1) | ATE367406T1 (de) |
AU (1) | AU2003301974A1 (de) |
DE (1) | DE60315070T2 (de) |
TW (1) | TW200415151A (de) |
WO (1) | WO2004044017A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5359752B2 (ja) * | 2009-09-30 | 2013-12-04 | 日本ゼオン株式会社 | 重合トナーの製造方法 |
JP5205485B2 (ja) * | 2011-02-21 | 2013-06-05 | 富士フイルム株式会社 | レジスト膜、該レジスト膜を用いたレジスト塗布マスクブランクス及びレジストパターン形成方法、並びに、化学増幅型レジスト組成物 |
JP5453358B2 (ja) | 2011-07-26 | 2014-03-26 | 富士フイルム株式会社 | 化学増幅型レジスト組成物、並びに、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク |
JP5982277B2 (ja) | 2012-12-21 | 2016-08-31 | 群栄化学工業株式会社 | 硬化性樹脂の製造方法 |
MX2018012248A (es) * | 2016-04-05 | 2019-05-30 | Albemarle Corp | Proceso y catalizador de hidruro salino soluble en hidrocarburos para polimerizacion de transferencia de cadena anionica iniciada por hidruro salino mediada por hidrogeno y composiciones de distribucion de polimero producidas a partir de este. |
DE102016221346A1 (de) | 2016-10-28 | 2018-05-03 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines Polymerisates durch Nitroxyl-kontrollierte Polymerisation sowie Polymerisat |
JP7334683B2 (ja) * | 2019-08-02 | 2023-08-29 | 信越化学工業株式会社 | ポジ型レジスト材料及びパターン形成方法 |
JP2023502999A (ja) * | 2019-11-22 | 2023-01-26 | シュティヒティング フォーア デ テヒニッシェ ヴェテンシャッペン | 低分子を捕捉するための高分子組成物 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3031421B2 (ja) * | 1990-11-28 | 2000-04-10 | 信越化学工業株式会社 | 化学増幅ポジ型レジスト材 |
JPH0665325A (ja) * | 1992-08-19 | 1994-03-08 | Shin Etsu Chem Co Ltd | 単分散性共重合体の製造方法 |
US6107425A (en) * | 1998-02-06 | 2000-08-22 | Shipley Company, L.L.C. | Narrow molecular weight distribution polymers and use of same as resin binders for negative-acting photoresists |
JPH11255820A (ja) * | 1998-03-12 | 1999-09-21 | Mitsui Chem Inc | 狭分散性のポリ(p−ヒドロキシスチレン)の製造方法 |
JP4126760B2 (ja) * | 1998-07-09 | 2008-07-30 | 住友化学株式会社 | 狭分散性重合体の製造方法、狭分散性重合体及びそれのレジストへの適用 |
JP4198351B2 (ja) * | 2000-12-07 | 2008-12-17 | 信越化学工業株式会社 | 高分子化合物の製造方法及び該高分子化合物を用いたレジスト材料 |
KR20040034717A (ko) * | 2001-09-10 | 2004-04-28 | 시바 스페셜티 케미칼스 홀딩 인크. | 음이온 또는 제어 라디칼 중합에 의한하이드록시-비닐-방향족 중합체 또는 공중합체의 제조 방법 |
US7256332B2 (en) * | 2006-01-31 | 2007-08-14 | Pioneer Hi-Bred International, Inc. | Hybrid maize plant and seed 39A94 |
-
2003
- 2003-11-05 JP JP2004551039A patent/JP4563814B2/ja not_active Expired - Fee Related
- 2003-11-05 US US10/533,574 patent/US7385009B2/en not_active Expired - Fee Related
- 2003-11-05 AU AU2003301974A patent/AU2003301974A1/en not_active Abandoned
- 2003-11-05 WO PCT/EP2003/050793 patent/WO2004044017A1/en active IP Right Grant
- 2003-11-05 DE DE60315070T patent/DE60315070T2/de not_active Expired - Lifetime
- 2003-11-05 EP EP03810997A patent/EP1572758B1/de not_active Expired - Lifetime
- 2003-11-05 KR KR1020057008491A patent/KR101043904B1/ko not_active IP Right Cessation
- 2003-11-05 CN CNB2003801031878A patent/CN100363390C/zh not_active Expired - Fee Related
- 2003-11-05 AT AT03810997T patent/ATE367406T1/de not_active IP Right Cessation
- 2003-11-13 TW TW092131827A patent/TW200415151A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
AU2003301974A1 (en) | 2004-06-03 |
JP4563814B2 (ja) | 2010-10-13 |
CN100363390C (zh) | 2008-01-23 |
TW200415151A (en) | 2004-08-16 |
EP1572758B1 (de) | 2007-07-18 |
KR20050086569A (ko) | 2005-08-30 |
CN1711290A (zh) | 2005-12-21 |
JP2006506480A (ja) | 2006-02-23 |
DE60315070D1 (de) | 2007-08-30 |
WO2004044017A1 (en) | 2004-05-27 |
DE60315070T2 (de) | 2008-03-20 |
KR101043904B1 (ko) | 2011-06-29 |
EP1572758A1 (de) | 2005-09-14 |
US7385009B2 (en) | 2008-06-10 |
US20060041080A1 (en) | 2006-02-23 |
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Legal Events
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RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |