ATE36610T1 - Durchflussmengenregelsystem. - Google Patents

Durchflussmengenregelsystem.

Info

Publication number
ATE36610T1
ATE36610T1 AT83111739T AT83111739T ATE36610T1 AT E36610 T1 ATE36610 T1 AT E36610T1 AT 83111739 T AT83111739 T AT 83111739T AT 83111739 T AT83111739 T AT 83111739T AT E36610 T1 ATE36610 T1 AT E36610T1
Authority
AT
Austria
Prior art keywords
flow rate
fluid
deviation
control system
flow control
Prior art date
Application number
AT83111739T
Other languages
English (en)
Inventor
Tetsuji Sato
Original Assignee
Fuji Kinzoku Kosaku Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Kinzoku Kosaku Kk filed Critical Fuji Kinzoku Kosaku Kk
Application granted granted Critical
Publication of ATE36610T1 publication Critical patent/ATE36610T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
AT83111739T 1982-11-26 1983-11-24 Durchflussmengenregelsystem. ATE36610T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP57208259A JPS5998217A (ja) 1982-11-26 1982-11-26 流量制御装置
EP83111739A EP0110325B1 (de) 1982-11-26 1983-11-24 Durchflussmengenregelsystem

Publications (1)

Publication Number Publication Date
ATE36610T1 true ATE36610T1 (de) 1988-09-15

Family

ID=16553271

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83111739T ATE36610T1 (de) 1982-11-26 1983-11-24 Durchflussmengenregelsystem.

Country Status (6)

Country Link
EP (1) EP0110325B1 (de)
JP (1) JPS5998217A (de)
KR (1) KR890005283B1 (de)
AT (1) ATE36610T1 (de)
CA (1) CA1224554A (de)
DE (1) DE3377750D1 (de)

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4527953A (en) * 1984-10-12 1985-07-09 E. I. Du Pont De Nemours And Company Pump unit for sampling air
DE3526367A1 (de) 1985-07-24 1986-07-03 Daimler-Benz Ag, 7000 Stuttgart Vorrichtung zur temperaturunabhaengigen mengenregelung von hochviskosen stoffen
DE3633852A1 (de) * 1986-10-04 1988-04-07 Bopp & Reuther Gmbh Verfahren zum regeln von durchflussabhaengigen regelgroessen
DE3700898A1 (de) * 1987-01-14 1988-07-28 Herion Werke Kg Mengenregelventil
FR2613089B1 (fr) * 1987-03-24 1993-09-03 Centre Nat Rech Scient Procede et dispositif pour la reduction des fluctuations de debit d'un ecoulement fluide dans une canalisation
JPH01163712U (de) * 1988-04-30 1989-11-15
JPH02166357A (ja) * 1988-12-19 1990-06-27 Matsushita Electric Ind Co Ltd 冷媒流量調節弁
US4987933A (en) * 1989-03-03 1991-01-29 Eaton Corporation Fluid flow control method and apparatus for minimizing particle contamination
US5062446A (en) * 1991-01-07 1991-11-05 Sematech, Inc. Intelligent mass flow controller
DE9314741U1 (de) * 1993-09-29 1994-02-24 Fa. Hans Friedl, 83536 Gars Flüssigkeits-Durchlaufmengenzähler
US6216728B1 (en) * 1998-03-13 2001-04-17 Ce Nuclear Power Llc Tunable anticipatory output response valve control
US6343617B1 (en) 1999-07-09 2002-02-05 Millipore Corporation System and method of operation of a digital mass flow controller
WO2001061284A1 (en) 2000-02-14 2001-08-23 Unit Instruments, Inc. Method and apparatus for balancing resistance
AU2002307547A1 (en) 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
JP3604354B2 (ja) * 2001-06-13 2004-12-22 Ｓｍｃ株式会社 質量流量測定方法および質量流量制御装置
US7136767B2 (en) 2002-06-24 2006-11-14 Mks Instruments, Inc. Apparatus and method for calibration of mass flow controller
US6712084B2 (en) 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US6810308B2 (en) 2002-06-24 2004-10-26 Mks Instruments, Inc. Apparatus and method for mass flow controller with network access to diagnostics
US7552015B2 (en) 2002-06-24 2009-06-23 Mks Instruments, Inc. Apparatus and method for displaying mass flow controller pressure
US7004191B2 (en) 2002-06-24 2006-02-28 Mks Instruments, Inc. Apparatus and method for mass flow controller with embedded web server
US7809473B2 (en) 2002-06-24 2010-10-05 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US6948508B2 (en) 2002-06-24 2005-09-27 Mks Instruments, Inc. Apparatus and method for self-calibration of mass flow controller
US6868862B2 (en) 2002-06-24 2005-03-22 Mks Instruments, Inc. Apparatus and method for mass flow controller with a plurality of closed loop control code sets
KR20050031109A (ko) 2002-07-19 2005-04-01 셀레리티 그룹 아이엔씨 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치
AU2003256591A1 (en) 2002-07-19 2004-02-09 Celerity Group Inc. Variable resistance sensor with common reference leg
US7216019B2 (en) 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
US7905139B2 (en) 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
US8927171B2 (en) * 2010-09-14 2015-01-06 GM Global Technology Operations LLC Method for preventing pressure in vessels from dropping below minimum allowable pressure
CN112492943A (zh) * 2020-12-15 2021-03-16 塔里木大学 一种果园牵引式双肥箱变量施肥机及施肥方法
CN113324605B (zh) * 2021-05-26 2023-05-23 北京七星华创流量计有限公司 气体质量流量控制器和气体质量流量控制方法
JP7224089B1 (ja) * 2022-05-16 2023-02-17 東フロコーポレーション株式会社 流量制御装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2949125A (en) * 1952-11-28 1960-08-16 Rockwell Mfg Co Fluid flow system and control therefor
US3427442A (en) * 1965-01-18 1969-02-11 Honeywell Inc Process control apparatus
US3746037A (en) * 1971-10-06 1973-07-17 Ibm Flow control and monitoring system
US3845370A (en) * 1973-08-10 1974-10-29 Ibm Credibility testing in sampled-data systems
CH576672A5 (de) * 1974-04-03 1976-06-15 Sulzer Ag
DE2654326C2 (de) * 1976-11-30 1979-02-15 Woelk, Guenther, Prof. Dr.-Ing., 5100 Aachen Vorrichtung zum Messen und Regeln von Mengenströmen
JPS5381258A (en) * 1976-12-27 1978-07-18 Sotokazu Rikuta Method and apparatus for flow rate in byypass tube
US4170245A (en) * 1978-03-03 1979-10-09 Fmc Corporation Digital control valve
JPS5551312A (en) * 1978-10-11 1980-04-15 Toshiba Corp Flow quantity measuring device

Also Published As

Publication number Publication date
DE3377750D1 (en) 1988-09-22
JPS5998217A (ja) 1984-06-06
KR840006845A (ko) 1984-12-03
EP0110325B1 (de) 1988-08-17
EP0110325A1 (de) 1984-06-13
KR890005283B1 (ko) 1989-12-20
CA1224554A (en) 1987-07-21

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
EELA Cancelled due to lapse of time