ATE335185T1 - Verfahren und vorrichtung zum messen von kennzeichen von objekten - Google Patents
Verfahren und vorrichtung zum messen von kennzeichen von objektenInfo
- Publication number
- ATE335185T1 ATE335185T1 AT97931329T AT97931329T ATE335185T1 AT E335185 T1 ATE335185 T1 AT E335185T1 AT 97931329 T AT97931329 T AT 97931329T AT 97931329 T AT97931329 T AT 97931329T AT E335185 T1 ATE335185 T1 AT E335185T1
- Authority
- AT
- Austria
- Prior art keywords
- reflected
- laser beam
- light
- source laser
- spot
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/680,342 US5859924A (en) | 1996-07-12 | 1996-07-12 | Method and system for measuring object features |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE335185T1 true ATE335185T1 (de) | 2006-08-15 |
Family
ID=24730705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT97931329T ATE335185T1 (de) | 1996-07-12 | 1997-06-19 | Verfahren und vorrichtung zum messen von kennzeichen von objekten |
Country Status (6)
Country | Link |
---|---|
US (1) | US5859924A (de) |
EP (1) | EP0979386B1 (de) |
AT (1) | ATE335185T1 (de) |
AU (1) | AU3498597A (de) |
DE (1) | DE69736439D1 (de) |
WO (1) | WO1998002716A1 (de) |
Families Citing this family (53)
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US6292580B1 (en) * | 1997-07-11 | 2001-09-18 | Texas Instruments Incorporated | Efficient illumination system for wire bonders |
US6134013A (en) * | 1997-09-15 | 2000-10-17 | Optimet, Optical Metrology Ltd. | Optical ball grid array inspection system |
US6915007B2 (en) * | 1998-01-16 | 2005-07-05 | Elwin M. Beaty | Method and apparatus for three dimensional inspection of electronic components |
US6072898A (en) | 1998-01-16 | 2000-06-06 | Beaty; Elwin M. | Method and apparatus for three dimensional inspection of electronic components |
US6915006B2 (en) * | 1998-01-16 | 2005-07-05 | Elwin M. Beaty | Method and apparatus for three dimensional inspection of electronic components |
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US7740371B1 (en) | 1998-03-19 | 2010-06-22 | Charles A. Lemaire | Method and apparatus for pulsed L.E.D. illumination for a camera |
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WO2000003198A1 (en) * | 1998-07-08 | 2000-01-20 | Ppt Vision, Inc. | Machine vision and semiconductor handling |
US7353954B1 (en) | 1998-07-08 | 2008-04-08 | Charles A. Lemaire | Tray flipper and method for parts inspection |
US6956963B2 (en) | 1998-07-08 | 2005-10-18 | Ismeca Europe Semiconductor Sa | Imaging for a machine-vision system |
JP4207302B2 (ja) * | 1999-04-06 | 2009-01-14 | 富士通株式会社 | バンプ検査方法およびその検査装置 |
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US6369888B1 (en) * | 1999-11-17 | 2002-04-09 | Applied Materials, Inc. | Method and apparatus for article inspection including speckle reduction |
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US6486963B1 (en) | 2000-06-20 | 2002-11-26 | Ppt Vision, Inc. | Precision 3D scanner base and method for measuring manufactured parts |
US6509559B1 (en) | 2000-06-20 | 2003-01-21 | Ppt Vision, Inc. | Binary optical grating and method for generating a moire pattern for 3D imaging |
US20030001117A1 (en) * | 2001-05-15 | 2003-01-02 | Kwangik Hyun | Dimensional measurement apparatus for object features |
US6750974B2 (en) | 2002-04-02 | 2004-06-15 | Gsi Lumonics Corporation | Method and system for 3D imaging of target regions |
US7481436B2 (en) * | 2002-09-09 | 2009-01-27 | Dura Global Technologies, Inc. | Two part grommet with hard plastic locking prongs |
US20040263862A1 (en) * | 2003-06-24 | 2004-12-30 | Amparan Alfonso Benjamin | Detecting peripheral points of reflected radiation beam spots for topographically mapping a surface |
US7197110B2 (en) * | 2004-11-29 | 2007-03-27 | Motorola, Inc. | Method for determining chemical content of complex structures using X-ray microanalysis |
US7421144B2 (en) * | 2005-03-16 | 2008-09-02 | Fabio Riccardi | Interface method and system for finding image intensities |
JP4275661B2 (ja) * | 2005-09-28 | 2009-06-10 | アンリツ株式会社 | 変位測定装置 |
US8111904B2 (en) | 2005-10-07 | 2012-02-07 | Cognex Technology And Investment Corp. | Methods and apparatus for practical 3D vision system |
US7728437B2 (en) * | 2005-11-23 | 2010-06-01 | Fairchild Korea Semiconductor, Ltd. | Semiconductor package form within an encapsulation |
JP2007225481A (ja) * | 2006-02-24 | 2007-09-06 | Hitachi High-Technologies Corp | ボールバンプウエハ検査装置 |
SG138491A1 (en) * | 2006-06-21 | 2008-01-28 | Generic Power Pte Ltd | Method and apparatus for 3-dimensional vision and inspection of ball and like protrusions of electronic components |
US7616328B2 (en) * | 2006-11-07 | 2009-11-10 | Rudolph Technologies, Inc. | Method and system for providing a high definition triangulation system |
WO2008124397A1 (en) | 2007-04-03 | 2008-10-16 | David Fishbaine | Inspection system and method |
US8126260B2 (en) * | 2007-05-29 | 2012-02-28 | Cognex Corporation | System and method for locating a three-dimensional object using machine vision |
US20090306811A1 (en) * | 2008-06-06 | 2009-12-10 | Raytheon Company | Ball grid array cleaning system |
US9734419B1 (en) | 2008-12-30 | 2017-08-15 | Cognex Corporation | System and method for validating camera calibration in a vision system |
EP2374090B1 (de) | 2009-01-06 | 2020-03-18 | Siemens Healthcare Diagnostics Inc. | Verfahren und vorrichtung für den automatisierten nachweis des vorhandenseins und der art von verschlusskappen auf fläschchen und behältern |
US20100226114A1 (en) * | 2009-03-03 | 2010-09-09 | David Fishbaine | Illumination and imaging system |
US9533418B2 (en) | 2009-05-29 | 2017-01-03 | Cognex Corporation | Methods and apparatus for practical 3D vision system |
CN101929836B (zh) * | 2009-06-25 | 2012-11-28 | 深圳泰山在线科技有限公司 | 一种物体三维定位方法及摄像机 |
US9393694B2 (en) | 2010-05-14 | 2016-07-19 | Cognex Corporation | System and method for robust calibration between a machine vision system and a robot |
KR101657952B1 (ko) * | 2010-11-15 | 2016-09-20 | 주식회사 고영테크놀러지 | 기판 검사방법 |
US9124873B2 (en) | 2010-12-08 | 2015-09-01 | Cognex Corporation | System and method for finding correspondence between cameras in a three-dimensional vision system |
TWI451064B (zh) * | 2011-04-25 | 2014-09-01 | Univ Nat Formosa | Laser displacement measuring device and method combined with image measuring instrument |
US8860456B2 (en) | 2011-08-02 | 2014-10-14 | Medtronic, Inc. | Non-destructive tilt data measurement to detect defective bumps |
US9671323B2 (en) | 2015-05-06 | 2017-06-06 | Globalfoundries Inc. | Detection of foreign material on a substrate chuck |
CN110793468B (zh) * | 2018-08-02 | 2022-03-22 | 上海微电子装备(集团)股份有限公司 | 一种光学元件位置检测装置、控制装置及检测方法 |
CN114815132B (zh) * | 2022-05-16 | 2023-12-01 | 江苏镭创高科光电科技有限公司 | 梯度阵列反射镜的调光系统及调光方法 |
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-
1996
- 1996-07-12 US US08/680,342 patent/US5859924A/en not_active Expired - Lifetime
-
1997
- 1997-06-19 WO PCT/US1997/010833 patent/WO1998002716A1/en active IP Right Grant
- 1997-06-19 EP EP97931329A patent/EP0979386B1/de not_active Expired - Lifetime
- 1997-06-19 DE DE69736439T patent/DE69736439D1/de not_active Expired - Lifetime
- 1997-06-19 AT AT97931329T patent/ATE335185T1/de not_active IP Right Cessation
- 1997-06-19 AU AU34985/97A patent/AU3498597A/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO1998002716A1 (en) | 1998-01-22 |
EP0979386B1 (de) | 2006-08-02 |
EP0979386A1 (de) | 2000-02-16 |
DE69736439D1 (de) | 2006-09-14 |
EP0979386A4 (de) | 2000-08-30 |
US5859924A (en) | 1999-01-12 |
AU3498597A (en) | 1998-02-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |