ATE321363T1 - Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren - Google Patents
Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensorenInfo
- Publication number
- ATE321363T1 ATE321363T1 AT03762720T AT03762720T ATE321363T1 AT E321363 T1 ATE321363 T1 AT E321363T1 AT 03762720 T AT03762720 T AT 03762720T AT 03762720 T AT03762720 T AT 03762720T AT E321363 T1 ATE321363 T1 AT E321363T1
- Authority
- AT
- Austria
- Prior art keywords
- object under
- cavity
- maintaining
- production
- under vacuum
- Prior art date
Links
- 239000007789 gas Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/041—Mountings in enclosures or in a particular environment
- G01J5/045—Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/16—Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
- H01L23/18—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
- H01L23/26—Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device including materials for absorbing or reacting with moisture or other undesired substances, e.g. getters
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0203—Containers; Encapsulations, e.g. encapsulation of photodiodes
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
- H04N23/23—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from thermal infrared radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N5/00—Details of television systems
- H04N5/30—Transforming light or analogous information into electric information
- H04N5/33—Transforming infrared radiation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Physical Vapour Deposition (AREA)
- Lining Or Joining Of Plastics Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0208293A FR2842022B1 (fr) | 2002-07-03 | 2002-07-03 | Dispositif de maintien d'un objet sous vide et procedes de fabrication de ce dispositif, application aux detecteurs intrarouges non refroidis |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE321363T1 true ATE321363T1 (de) | 2006-04-15 |
Family
ID=29725107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03762720T ATE321363T1 (de) | 2002-07-03 | 2003-07-01 | Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren |
Country Status (6)
Country | Link |
---|---|
US (1) | US7279682B2 (de) |
EP (1) | EP1518279B1 (de) |
AT (1) | ATE321363T1 (de) |
DE (1) | DE60304198T2 (de) |
FR (1) | FR2842022B1 (de) |
WO (1) | WO2004006290A2 (de) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005015637A1 (ja) * | 2003-08-08 | 2005-02-17 | Matsushita Electric Industrial Co., Ltd. | 電子デバイスおよびその製造方法 |
FR2874691B1 (fr) * | 2004-08-24 | 2006-11-17 | Ulis Soc Par Actions Simplifie | Composant de detection de rayonnements electromagnetiques, et notamment infrarouge, bloc optique d'imagerie infrarouge integrant un tel composant et procede pour sa realisation |
FR2879819B1 (fr) * | 2004-12-21 | 2007-02-23 | Ulis Soc Par Actions Simplifie | Composant de detection de rayonnements electromagnetiques notamment infrarouges |
IL165948A0 (en) * | 2004-12-23 | 2006-01-15 | Rafael Armament Dev Authority | Chip packaging |
DE102007042085B3 (de) * | 2007-09-05 | 2009-03-05 | Continental Automotive Gmbh | Energiespeichersystem |
FR2946777B1 (fr) * | 2009-06-12 | 2011-07-22 | Commissariat Energie Atomique | Dispositif de detection et/ou d'emission de rayonnement electromagnetique et procede de fabrication d'un tel dispositif |
US8471206B1 (en) * | 2009-07-14 | 2013-06-25 | Flir Systems, Inc. | Infrared detector vacuum test systems and methods |
FR2981198B1 (fr) * | 2011-10-11 | 2014-04-04 | Commissariat Energie Atomique | Structure d'encapsulation de dispositif electronique et procede de realisation d'une telle structure |
FR2982073B1 (fr) * | 2011-10-28 | 2014-10-10 | Commissariat Energie Atomique | Structure d'encapsulation hermetique d'un dispositif et d'un composant electronique |
DE102012200327B4 (de) * | 2012-01-11 | 2022-01-05 | Osram Gmbh | Optoelektronisches Bauelement |
EP2736071B8 (de) * | 2012-11-22 | 2017-04-19 | Tronic's Microsystems S.A. | Verkapselung mit Getter auf Waferebene |
US10571631B2 (en) | 2015-01-05 | 2020-02-25 | The Research Foundation For The State University Of New York | Integrated photonics including waveguiding material |
US10976491B2 (en) | 2016-11-23 | 2021-04-13 | The Research Foundation For The State University Of New York | Photonics interposer optoelectronics |
US10698156B2 (en) | 2017-04-27 | 2020-06-30 | The Research Foundation For The State University Of New York | Wafer scale bonded active photonics interposer |
SG11202009807UA (en) | 2018-04-04 | 2020-11-27 | Univ New York State Res Found | Heterogeneous structure on an integrated photonics platform |
US10816724B2 (en) | 2018-04-05 | 2020-10-27 | The Research Foundation For The State University Of New York | Fabricating photonics structure light signal transmission regions |
US11550099B2 (en) | 2018-11-21 | 2023-01-10 | The Research Foundation For The State University Of New York | Photonics optoelectrical system |
TWI829761B (zh) | 2018-11-21 | 2024-01-21 | 紐約州立大學研究基金會 | 具有積體雷射的光學結構 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60790B2 (ja) | 1976-10-04 | 1985-01-10 | 富士通株式会社 | 冷却型光電変換装置 |
US5317157A (en) * | 1991-11-20 | 1994-05-31 | Fujitsu Limited | Infrared ray detecting sensor with getter partition |
US5293511A (en) * | 1993-03-16 | 1994-03-08 | Texas Instruments Incorporated | Package for a semiconductor device |
DE69409257T2 (de) * | 1993-12-13 | 1998-09-10 | Honeywell Inc | Integrierte silizium-vakuum-mikropackung für infrarot-geräte |
US5921461A (en) * | 1997-06-11 | 1999-07-13 | Raytheon Company | Vacuum package having vacuum-deposited local getter and its preparation |
JP2000337959A (ja) * | 1999-05-28 | 2000-12-08 | Mitsubishi Electric Corp | 赤外線検出器及びその製造方法 |
FR2816447B1 (fr) * | 2000-11-07 | 2003-01-31 | Commissariat Energie Atomique | Dispositif de detection de rayonnements electromagnetiques tridimensionnel et procede de realisation de ce dispositif |
-
2002
- 2002-07-03 FR FR0208293A patent/FR2842022B1/fr not_active Expired - Fee Related
-
2003
- 2003-07-01 DE DE60304198T patent/DE60304198T2/de not_active Expired - Lifetime
- 2003-07-01 AT AT03762720T patent/ATE321363T1/de not_active IP Right Cessation
- 2003-07-01 WO PCT/FR2003/002035 patent/WO2004006290A2/fr active IP Right Grant
- 2003-07-01 US US10/518,384 patent/US7279682B2/en not_active Expired - Fee Related
- 2003-07-01 EP EP03762720A patent/EP1518279B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE60304198D1 (de) | 2006-05-11 |
WO2004006290A3 (fr) | 2004-04-15 |
US20050211900A1 (en) | 2005-09-29 |
FR2842022A1 (fr) | 2004-01-09 |
US7279682B2 (en) | 2007-10-09 |
EP1518279B1 (de) | 2006-03-22 |
WO2004006290A2 (fr) | 2004-01-15 |
FR2842022B1 (fr) | 2005-05-06 |
DE60304198T2 (de) | 2006-12-14 |
EP1518279A2 (de) | 2005-03-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |