ATE321363T1 - Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren - Google Patents

Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren

Info

Publication number
ATE321363T1
ATE321363T1 AT03762720T AT03762720T ATE321363T1 AT E321363 T1 ATE321363 T1 AT E321363T1 AT 03762720 T AT03762720 T AT 03762720T AT 03762720 T AT03762720 T AT 03762720T AT E321363 T1 ATE321363 T1 AT E321363T1
Authority
AT
Austria
Prior art keywords
object under
cavity
maintaining
production
under vacuum
Prior art date
Application number
AT03762720T
Other languages
English (en)
Inventor
Jean-Louis Ouvrier-Buffet
Sylvette Bisotto
Chantal Beccia
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE321363T1 publication Critical patent/ATE321363T1/de

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • G01J5/041Mountings in enclosures or in a particular environment
    • G01J5/045Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/16Fillings or auxiliary members in containers or encapsulations, e.g. centering rings
    • H01L23/18Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device
    • H01L23/26Fillings characterised by the material, its physical or chemical properties, or its arrangement within the complete device including materials for absorbing or reacting with moisture or other undesired substances, e.g. getters
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0203Containers; Encapsulations, e.g. encapsulation of photodiodes
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
    • H04N23/23Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from thermal infrared radiation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00Details of television systems
    • H04N5/30Transforming light or analogous information into electric information
    • H04N5/33Transforming infrared radiation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Physical Vapour Deposition (AREA)
  • Lining Or Joining Of Plastics Or The Like (AREA)
AT03762720T 2002-07-03 2003-07-01 Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren ATE321363T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0208293A FR2842022B1 (fr) 2002-07-03 2002-07-03 Dispositif de maintien d'un objet sous vide et procedes de fabrication de ce dispositif, application aux detecteurs intrarouges non refroidis

Publications (1)

Publication Number Publication Date
ATE321363T1 true ATE321363T1 (de) 2006-04-15

Family

ID=29725107

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03762720T ATE321363T1 (de) 2002-07-03 2003-07-01 Einrichtung zum halten eines objekts unter vakuum und verfahren zu ihrer herstellung und benutzung in nichtgekühlten infrarotsensoren

Country Status (6)

Country Link
US (1) US7279682B2 (de)
EP (1) EP1518279B1 (de)
AT (1) ATE321363T1 (de)
DE (1) DE60304198T2 (de)
FR (1) FR2842022B1 (de)
WO (1) WO2004006290A2 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005015637A1 (ja) * 2003-08-08 2005-02-17 Matsushita Electric Industrial Co., Ltd. 電子デバイスおよびその製造方法
FR2874691B1 (fr) * 2004-08-24 2006-11-17 Ulis Soc Par Actions Simplifie Composant de detection de rayonnements electromagnetiques, et notamment infrarouge, bloc optique d'imagerie infrarouge integrant un tel composant et procede pour sa realisation
FR2879819B1 (fr) * 2004-12-21 2007-02-23 Ulis Soc Par Actions Simplifie Composant de detection de rayonnements electromagnetiques notamment infrarouges
IL165948A0 (en) * 2004-12-23 2006-01-15 Rafael Armament Dev Authority Chip packaging
DE102007042085B3 (de) * 2007-09-05 2009-03-05 Continental Automotive Gmbh Energiespeichersystem
FR2946777B1 (fr) * 2009-06-12 2011-07-22 Commissariat Energie Atomique Dispositif de detection et/ou d'emission de rayonnement electromagnetique et procede de fabrication d'un tel dispositif
US8471206B1 (en) * 2009-07-14 2013-06-25 Flir Systems, Inc. Infrared detector vacuum test systems and methods
FR2981198B1 (fr) * 2011-10-11 2014-04-04 Commissariat Energie Atomique Structure d'encapsulation de dispositif electronique et procede de realisation d'une telle structure
FR2982073B1 (fr) * 2011-10-28 2014-10-10 Commissariat Energie Atomique Structure d'encapsulation hermetique d'un dispositif et d'un composant electronique
DE102012200327B4 (de) * 2012-01-11 2022-01-05 Osram Gmbh Optoelektronisches Bauelement
EP2736071B8 (de) * 2012-11-22 2017-04-19 Tronic's Microsystems S.A. Verkapselung mit Getter auf Waferebene
US10571631B2 (en) 2015-01-05 2020-02-25 The Research Foundation For The State University Of New York Integrated photonics including waveguiding material
US10976491B2 (en) 2016-11-23 2021-04-13 The Research Foundation For The State University Of New York Photonics interposer optoelectronics
US10698156B2 (en) 2017-04-27 2020-06-30 The Research Foundation For The State University Of New York Wafer scale bonded active photonics interposer
SG11202009807UA (en) 2018-04-04 2020-11-27 Univ New York State Res Found Heterogeneous structure on an integrated photonics platform
US10816724B2 (en) 2018-04-05 2020-10-27 The Research Foundation For The State University Of New York Fabricating photonics structure light signal transmission regions
US11550099B2 (en) 2018-11-21 2023-01-10 The Research Foundation For The State University Of New York Photonics optoelectrical system
TWI829761B (zh) 2018-11-21 2024-01-21 紐約州立大學研究基金會 具有積體雷射的光學結構

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60790B2 (ja) 1976-10-04 1985-01-10 富士通株式会社 冷却型光電変換装置
US5317157A (en) * 1991-11-20 1994-05-31 Fujitsu Limited Infrared ray detecting sensor with getter partition
US5293511A (en) * 1993-03-16 1994-03-08 Texas Instruments Incorporated Package for a semiconductor device
DE69409257T2 (de) * 1993-12-13 1998-09-10 Honeywell Inc Integrierte silizium-vakuum-mikropackung für infrarot-geräte
US5921461A (en) * 1997-06-11 1999-07-13 Raytheon Company Vacuum package having vacuum-deposited local getter and its preparation
JP2000337959A (ja) * 1999-05-28 2000-12-08 Mitsubishi Electric Corp 赤外線検出器及びその製造方法
FR2816447B1 (fr) * 2000-11-07 2003-01-31 Commissariat Energie Atomique Dispositif de detection de rayonnements electromagnetiques tridimensionnel et procede de realisation de ce dispositif

Also Published As

Publication number Publication date
DE60304198D1 (de) 2006-05-11
WO2004006290A3 (fr) 2004-04-15
US20050211900A1 (en) 2005-09-29
FR2842022A1 (fr) 2004-01-09
US7279682B2 (en) 2007-10-09
EP1518279B1 (de) 2006-03-22
WO2004006290A2 (fr) 2004-01-15
FR2842022B1 (fr) 2005-05-06
DE60304198T2 (de) 2006-12-14
EP1518279A2 (de) 2005-03-30

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