DE60324088D1 - Gasselektive permeabele Membrane und Herstellungsverfahren dafür - Google Patents

Gasselektive permeabele Membrane und Herstellungsverfahren dafür

Info

Publication number
DE60324088D1
DE60324088D1 DE60324088T DE60324088T DE60324088D1 DE 60324088 D1 DE60324088 D1 DE 60324088D1 DE 60324088 T DE60324088 T DE 60324088T DE 60324088 T DE60324088 T DE 60324088T DE 60324088 D1 DE60324088 D1 DE 60324088D1
Authority
DE
Germany
Prior art keywords
manufacturing
gas
permeable membrane
method therefor
selective permeable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60324088T
Other languages
English (en)
Inventor
Roberto Carboneri
Sandro Vittozzi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Application granted granted Critical
Publication of DE60324088D1 publication Critical patent/DE60324088D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/10—Testing of membranes or membrane apparatus; Detecting or repairing leaks
    • B01D65/102—Detection of leaks in membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/11—Noble gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
DE60324088T 2003-01-24 2003-12-16 Gasselektive permeabele Membrane und Herstellungsverfahren dafür Expired - Lifetime DE60324088D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT000032A ITTO20030032A1 (it) 2003-01-24 2003-01-24 Membrana permeabile selettivamente ai gas e metodo per la sua realizzazione.

Publications (1)

Publication Number Publication Date
DE60324088D1 true DE60324088D1 (de) 2008-11-27

Family

ID=32587914

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60324088T Expired - Lifetime DE60324088D1 (de) 2003-01-24 2003-12-16 Gasselektive permeabele Membrane und Herstellungsverfahren dafür

Country Status (5)

Country Link
US (1) US7141096B2 (de)
EP (1) EP1441209B1 (de)
JP (1) JP4511199B2 (de)
DE (1) DE60324088D1 (de)
IT (1) ITTO20030032A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004011130A1 (ja) * 2002-07-25 2004-02-05 Dai Nippon Insatsu Kabushiki Kaisha 水素製造用フィルタに用いる薄膜支持基板および水素製造用フィルタの製造方法
DE10353894B4 (de) * 2003-07-11 2007-02-15 Nft Nanofiltertechnik Gmbh Filterelement und Verfahren zu dessen Herstellung
JP2008540070A (ja) * 2005-04-29 2008-11-20 ユニバーシティー オブ ロチェスター 超薄多孔質ナノスケール膜、その製造方法および使用
US7922795B2 (en) * 2005-04-29 2011-04-12 University Of Rochester Ultrathin nanoscale membranes, methods of making, and uses thereof
DE602005010872D1 (de) * 2005-09-20 2008-12-18 Varian Spa Vorrichtung und Verfahren zur Erfassung der Anwesentheit eines Prüfgases
JP2009529888A (ja) * 2006-03-14 2009-08-27 ユニバーシティ オブ ロチェスター 超薄多孔質メンブレンを有する細胞培養装置およびその使用
DE102006026125A1 (de) 2006-06-03 2007-12-06 Inficon Gmbh Gassensor
JP5145148B2 (ja) * 2008-07-17 2013-02-13 株式会社アルバック ヘリウム検出ユニット
DE102009022913A1 (de) 2009-05-27 2010-12-09 Eads Deutschland Gmbh Membran mit Mitteln zur Zustandüberwachung
US8361196B2 (en) * 2010-04-09 2013-01-29 Inficon Gmbh Gas-selective membrane and method of its production
JP2012189537A (ja) * 2011-03-14 2012-10-04 Murata Mfg Co Ltd ガスセンサ
JP5862046B2 (ja) * 2011-04-27 2016-02-16 株式会社村田製作所 水素ガスセンサ
US10005033B2 (en) * 2015-04-29 2018-06-26 Pacific Environment Technologies, LLC Isotopic enrichment of helium-3 through glass
US10480084B1 (en) * 2016-03-03 2019-11-19 Marathon Systems, Inc. Modular cooling chamber for manifold of gaseous electrolysis apparatus with helium permeable element therefor
US11420152B2 (en) * 2018-06-26 2022-08-23 James DeLuze Bandpass filter for separation of a specifically selected gas from a group of gases or an atmosphere

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1107811A (en) * 1963-09-20 1968-03-27 Energy Conversion Ltd Improvements in and relating to structures incorporating thin metal membranes
IT1224604B (it) 1988-07-27 1990-10-04 Varian Spa Rivelatore perfezionato di perdite di elio
JPH0873201A (ja) * 1994-09-06 1996-03-19 Mitsubishi Heavy Ind Ltd 水素分離膜ユニット
DE19521275A1 (de) * 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche
US6152995A (en) * 1999-03-22 2000-11-28 Idatech Llc Hydrogen-permeable metal membrane and method for producing the same
US5882496A (en) * 1997-02-27 1999-03-16 The Regents Of The University Of California Porous silicon structures with high surface area/specific pore size
JP2002531246A (ja) * 1998-12-02 2002-09-24 マサチューセッツ・インスティチュート・オブ・テクノロジー 水素分離及び水素化／脱水素反応のための集積されたパラジウムをベースとする微小膜
JP2002144470A (ja) * 2000-11-16 2002-05-21 Araco Corp 多層構造体およびその製造方法
DE10122733A1 (de) * 2001-05-10 2002-11-14 Inficon Gmbh Testleckvorrichtung

Also Published As

Publication number Publication date
US20040149131A1 (en) 2004-08-05
US7141096B2 (en) 2006-11-28
EP1441209A3 (de) 2006-02-22
ITTO20030032A1 (it) 2004-07-25
EP1441209B1 (de) 2008-10-15
JP4511199B2 (ja) 2010-07-28
JP2004264293A (ja) 2004-09-24
EP1441209A2 (de) 2004-07-28

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Legal Events

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