FR2872903B1 - Detecteur de pression du type a detection de pression differentielle et procede pour fabriquer celui-ci - Google Patents

Detecteur de pression du type a detection de pression differentielle et procede pour fabriquer celui-ci

Info

Publication number
FR2872903B1
FR2872903B1 FR0507166A FR0507166A FR2872903B1 FR 2872903 B1 FR2872903 B1 FR 2872903B1 FR 0507166 A FR0507166 A FR 0507166A FR 0507166 A FR0507166 A FR 0507166A FR 2872903 B1 FR2872903 B1 FR 2872903B1
Authority
FR
France
Prior art keywords
manufacturing
same
detection type
differential pressure
pressure detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0507166A
Other languages
English (en)
Other versions
FR2872903A1 (fr
Inventor
Hiroshi Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denso Corp
Original Assignee
Denso Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denso Corp filed Critical Denso Corp
Publication of FR2872903A1 publication Critical patent/FR2872903A1/fr
Application granted granted Critical
Publication of FR2872903B1 publication Critical patent/FR2872903B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G01L19/0038—Fluidic connecting means being part of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/141—Monolithic housings, e.g. molded or one-piece housings
FR0507166A 2004-07-06 2005-07-05 Detecteur de pression du type a detection de pression differentielle et procede pour fabriquer celui-ci Expired - Fee Related FR2872903B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004199335A JP2006023109A (ja) 2004-07-06 2004-07-06 圧力センサおよびその製造方法

Publications (2)

Publication Number Publication Date
FR2872903A1 FR2872903A1 (fr) 2006-01-13
FR2872903B1 true FR2872903B1 (fr) 2009-09-18

Family

ID=35517114

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0507166A Expired - Fee Related FR2872903B1 (fr) 2004-07-06 2005-07-05 Detecteur de pression du type a detection de pression differentielle et procede pour fabriquer celui-ci

Country Status (4)

Country Link
US (1) US7152480B2 (fr)
JP (1) JP2006023109A (fr)
DE (1) DE102005030901A1 (fr)
FR (1) FR2872903B1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005056760A1 (de) * 2005-11-29 2007-06-06 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP5403858B2 (ja) * 2006-06-02 2014-01-29 日本空圧システム株式会社 差圧検出装置
JP4940786B2 (ja) 2006-06-29 2012-05-30 株式会社デンソー 圧力センサ
JP4893238B2 (ja) 2006-10-31 2012-03-07 株式会社デンソー 圧力センサ
US8770034B2 (en) * 2011-09-06 2014-07-08 Honeywell International Inc. Packaged sensor with multiple sensors elements
KR101303419B1 (ko) 2011-10-28 2013-09-05 주식회사 현대케피코 차압 센서
US9638559B1 (en) * 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
JP6315025B2 (ja) * 2016-04-26 2018-04-25 株式会社デンソー 物理量センサおよびその製造方法
KR101836282B1 (ko) * 2016-10-20 2018-03-08 현대자동차 주식회사 차압 센서를 구비한 배기 시스템

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5112142A (en) * 1987-08-12 1992-05-12 Digital Equipment Corporation Hydrodynamic bearing
JP3198779B2 (ja) * 1994-03-04 2001-08-13 株式会社デンソー 半導体圧力検出器の製造方法
US5747694A (en) * 1995-07-28 1998-05-05 Nippondenso Co., Ltd. Pressure sensor with barrier in a pressure chamber
JP4320963B2 (ja) 2000-11-27 2009-08-26 株式会社デンソー 圧力センサ

Also Published As

Publication number Publication date
FR2872903A1 (fr) 2006-01-13
US7152480B2 (en) 2006-12-26
JP2006023109A (ja) 2006-01-26
DE102005030901A1 (de) 2006-02-02
US20060005627A1 (en) 2006-01-12

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Year of fee payment: 11

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Effective date: 20170331