ATE301328T1 - Röntgenoptische anordnung - Google Patents

Röntgenoptische anordnung

Info

Publication number
ATE301328T1
ATE301328T1 AT01943167T AT01943167T ATE301328T1 AT E301328 T1 ATE301328 T1 AT E301328T1 AT 01943167 T AT01943167 T AT 01943167T AT 01943167 T AT01943167 T AT 01943167T AT E301328 T1 ATE301328 T1 AT E301328T1
Authority
AT
Austria
Prior art keywords
ray
reflecting
rays
radiation
focussing
Prior art date
Application number
AT01943167T
Other languages
English (en)
Inventor
Thomas Holz
Original Assignee
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung filed Critical Fraunhofer Ges Forschung
Application granted granted Critical
Publication of ATE301328T1 publication Critical patent/ATE301328T1/de

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
AT01943167T 2000-06-05 2001-05-18 Röntgenoptische anordnung ATE301328T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10028970A DE10028970C1 (de) 2000-06-05 2000-06-05 Röntgenoptische Anordnung zur Erzeugung einer parallelen Röntgenstrahlung
PCT/DE2001/002043 WO2001094987A2 (de) 2000-06-05 2001-05-18 Röntgenoptische anordnung

Publications (1)

Publication Number Publication Date
ATE301328T1 true ATE301328T1 (de) 2005-08-15

Family

ID=7645490

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01943167T ATE301328T1 (de) 2000-06-05 2001-05-18 Röntgenoptische anordnung

Country Status (6)

Country Link
US (1) US6724858B2 (de)
EP (1) EP1323170B1 (de)
JP (1) JP2003536081A (de)
AT (1) ATE301328T1 (de)
DE (2) DE10028970C1 (de)
WO (1) WO2001094987A2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7403593B1 (en) * 2004-09-28 2008-07-22 Bruker Axs, Inc. Hybrid x-ray mirrors
CN101278360B (zh) * 2005-08-04 2011-07-27 X射线光学系统公司 用于痕量元素制图的单色x射线微束
EP4070342A4 (de) * 2020-01-10 2024-01-03 Ipg Photonics Corp Röntgenvorrichtung

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684565A (en) * 1984-11-20 1987-08-04 Exxon Research And Engineering Company X-ray mirrors made from multi-layered material
FR2630832B1 (fr) * 1988-04-29 1995-06-02 Thomson Csf Systeme de miroirs pour le guidage d'une onde electromagnetique
JP3060624B2 (ja) * 1991-08-09 2000-07-10 株式会社ニコン 多層膜反射鏡
JPH0720293A (ja) * 1993-06-30 1995-01-24 Canon Inc Ｘ線ミラー及びこれを用いたｘ線露光装置とデバイス製造方法
BE1007607A3 (nl) * 1993-10-08 1995-08-22 Philips Electronics Nv Multilaagspiegel met verlopende brekingsindex.
US5646976A (en) * 1994-08-01 1997-07-08 Osmic, Inc. Optical element of multilayered thin film for X-rays and neutrons
JPH08146199A (ja) * 1994-11-18 1996-06-07 Nikon Corp 平行ｘ線照射装置
DE4443853A1 (de) * 1994-12-09 1996-06-13 Geesthacht Gkss Forschung Vorrichtung mit einer Röntgenstrahlungsquelle
US5911858A (en) * 1997-02-18 1999-06-15 Sandia Corporation Method for high-precision multi-layered thin film deposition for deep and extreme ultraviolet mirrors
US6049588A (en) * 1997-07-10 2000-04-11 Focused X-Rays X-ray collimator for lithography
JPH1138192A (ja) * 1997-07-17 1999-02-12 Nikon Corp 多層膜反射鏡
US6041099A (en) * 1998-02-19 2000-03-21 Osmic, Inc. Single corner kirkpatrick-baez beam conditioning optic assembly
US6295164B1 (en) * 1998-09-08 2001-09-25 Nikon Corporation Multi-layered mirror

Also Published As

Publication number Publication date
US20020159562A1 (en) 2002-10-31
WO2001094987A2 (de) 2001-12-13
JP2003536081A (ja) 2003-12-02
US6724858B2 (en) 2004-04-20
WO2001094987A3 (de) 2003-04-03
EP1323170A2 (de) 2003-07-02
DE10028970C1 (de) 2002-01-24
DE50106990D1 (de) 2005-09-08
EP1323170B1 (de) 2005-08-03

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