ATE292783T1 - Antrieb einer resonanzprobe und rasterkraftmikroskop - Google Patents

Antrieb einer resonanzprobe und rasterkraftmikroskop

Info

Publication number
ATE292783T1
ATE292783T1 AT01919671T AT01919671T ATE292783T1 AT E292783 T1 ATE292783 T1 AT E292783T1 AT 01919671 T AT01919671 T AT 01919671T AT 01919671 T AT01919671 T AT 01919671T AT E292783 T1 ATE292783 T1 AT E292783T1
Authority
AT
Austria
Prior art keywords
alastic
driving
force microscope
resonating
probe device
Prior art date
Application number
AT01919671T
Other languages
English (en)
Inventor
De Miguel Javier Tamayo
Andrew David Laver Humpris
Mervyn John Miles
Original Assignee
Univ Bristol
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GBGB0009902.8A external-priority patent/GB0009902D0/en
Application filed by Univ Bristol filed Critical Univ Bristol
Application granted granted Critical
Publication of ATE292783T1 publication Critical patent/ATE292783T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G01Q10/06—Circuits or algorithms therefor
    • G01Q10/065—Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/02—Monitoring the movement or position of the probe by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/85—Scanning probe control process

Landscapes

  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Radiology & Medical Imaging (AREA)
  • Power Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Control Of Stepping Motors (AREA)
  • Control Of Electric Motors In General (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
AT01919671T 2000-04-20 2001-04-12 Antrieb einer resonanzprobe und rasterkraftmikroskop ATE292783T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GBGB0009902.8A GB0009902D0 (en) 2000-04-20 2000-04-20 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement
GBGB0107136.4A GB0107136D0 (en) 2000-04-20 2001-03-21 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement
PCT/GB2001/001669 WO2001081857A2 (en) 2000-04-20 2001-04-12 Resonant probe driving arrangement and scanning probe microscope

Publications (1)

Publication Number Publication Date
ATE292783T1 true ATE292783T1 (de) 2005-04-15

Family

ID=26244152

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01919671T ATE292783T1 (de) 2000-04-20 2001-04-12 Antrieb einer resonanzprobe und rasterkraftmikroskop

Country Status (8)

Country Link
US (1) US6906450B2 (de)
EP (1) EP1274966B1 (de)
JP (1) JP2003532060A (de)
AT (1) ATE292783T1 (de)
AU (1) AU4673101A (de)
CA (1) CA2406407A1 (de)
DE (1) DE60109910D1 (de)
WO (1) WO2001081857A2 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6601671B1 (en) * 2000-07-10 2003-08-05 Weatherford/Lamb, Inc. Method and apparatus for seismically surveying an earth formation in relation to a borehole
FR2816407B1 (fr) * 2000-11-06 2003-03-28 Centre Nat Rech Scient Appareil de detection en parallele du comportement de microoscillateurs mecaniques
US20080163689A1 (en) * 2001-08-28 2008-07-10 Sensorchem International Corporation Electromagnetic piezoelectric acoustic sensor
ES2194608B1 (es) * 2002-05-03 2005-03-16 Consejo Sup. Investig. Cientificas El metodo de evolucion temporal continua y su implementacion para optimizar la respuesta en frecuencias de un microscopio de fuerzas.
US7330795B2 (en) * 2002-05-07 2008-02-12 California Institute Of Technology Method and apparatus for providing signal analysis of a BioNEMS resonator or transducer
WO2003102218A2 (en) * 2002-06-03 2003-12-11 Arizona Board Of Regents Hybrid microcantilever sensors
US7395693B2 (en) * 2004-12-02 2008-07-08 The Arizona Board of Regents, a body corporate of the state of Arizona acting for Northern Arizona University Embedded piezoelectric microcantilever sensors
JP4464270B2 (ja) * 2002-06-03 2010-05-19 アリゾナ ボード オブ リージェンツ，ア ボディ コーポレイト オブ ザ ステイト オブ アリゾナ，アクティング フォー アンド オン ビハーフ オブ ノーザン アリゾナ ユニバーシティ 埋込み圧電微小片持ち梁センサー
JP4758342B2 (ja) * 2003-06-03 2011-08-24 キャンティマー インコーポレイテッド 相変化センサー
US6763705B1 (en) * 2003-06-16 2004-07-20 Ut-Battelle, Llc High throughput microcantilever detector
US7055378B2 (en) * 2003-08-11 2006-06-06 Veeco Instruments, Inc. System for wide frequency dynamic nanomechanical analysis
US7498720B2 (en) * 2003-10-08 2009-03-03 Koninklijke Philips Electronics N.V. Bulk acoustic wave sensor
US20050092907A1 (en) * 2003-11-04 2005-05-05 West Paul E. Oscillating scanning probe microscope
US7157897B2 (en) * 2003-11-25 2007-01-02 Northwestern University Method and system for electronic detection of mechanical perturbations using BIMOS readouts
US7759924B2 (en) * 2003-11-25 2010-07-20 Northwestern University Cascaded MOSFET embedded multi-input microcantilever
DE102004019608B3 (de) * 2004-04-22 2005-10-20 Univ Augsburg Verfahren zum Abtasten einer Oberfläche
RU2334204C1 (ru) * 2004-05-14 2008-09-20 Джапан Сайенс Энд Текнолоджи Эйдженси Высокочувствительные способ и устройство для измерения силы/массы с использованием системы фазовой автоподстройки частоты
US20070144244A1 (en) * 2005-12-28 2007-06-28 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
AU2007208310B2 (en) * 2006-01-23 2012-05-31 Drexel University Self-exciting, self-sensing piezoelectric cantilever sensor
US8286486B2 (en) * 2006-05-10 2012-10-16 Drexel University Molecular control of surface coverage
US20070267940A1 (en) * 2006-05-15 2007-11-22 Par Technologies, Llc. Compressor and compression using motion amplification
US8256017B2 (en) * 2006-08-31 2012-08-28 Nanoink, Inc. Using optical deflection of cantilevers for alignment
JP4496350B2 (ja) * 2006-09-04 2010-07-07 国立大学法人金沢大学 原子間力顕微鏡
JP5224084B2 (ja) * 2006-11-08 2013-07-03 独立行政法人産業技術総合研究所 カンチレバー共振特性評価法
US8456150B2 (en) * 2007-02-01 2013-06-04 Drexel University Hand-held phase-shift detector for sensor applications
US7694552B2 (en) * 2007-02-12 2010-04-13 The Board Of Trustees Of The Leland Stanford Junior University High quality factor resonators for liquid immersion biological and chemical sensors
US9202495B2 (en) 2007-05-01 2015-12-01 Seagate Technology Llc Method and apparatus for detecting proximity contact between a transducer and a medium
EP2215637B1 (de) * 2007-11-30 2019-01-23 FEI Company Iterative rückkopplungsabstimmung in einem rastersondenmikroskop
KR101494046B1 (ko) * 2008-10-09 2015-02-16 뉴캐슬 이노베이션 리미티드 포지셔닝 시스템 및 방법
US8955161B2 (en) 2008-11-13 2015-02-10 Bruker Nano, Inc. Peakforce photothermal-based detection of IR nanoabsorption
KR101823954B1 (ko) * 2008-11-13 2018-01-31 브루커 나노, 인코퍼레이션. 탐침형 원자 현미경 작동 방법 및 장치
US8650660B2 (en) 2008-11-13 2014-02-11 Bruker Nano, Inc. Method and apparatus of using peak force tapping mode to measure physical properties of a sample
DE102009028022A1 (de) * 2009-07-27 2011-02-03 Endress + Hauser Gmbh + Co. Kg Verfahren zur Bestimmung und/oder Überwachung mindestens einer pysikalischen Prozessgröße eines Mediums
JP6203494B2 (ja) 2009-12-01 2017-09-27 ブルカー ナノ インコーポレイテッドＢｒｕｋｅｒ Ｎａｎｏ，Ｉｎｃ． 走査型プローブ顕微鏡を動作させる方法
WO2011109913A1 (en) * 2010-03-10 2011-09-15 Zurich Instruments Ag Apparatus and method for demodulating an input signal
US9689891B2 (en) * 2011-05-27 2017-06-27 Keysight Technologies, Inc. Automatic gain tuning in atomic force microscopy
FR2977676B1 (fr) * 2011-07-08 2013-08-02 Thales Sa Micro-systeme vibrant a boucle de controle automatique de gain, a controle integre du facteur de qualite
ES2403555B1 (es) 2011-10-10 2014-03-28 Universidad Autonoma De Madrid Procedimiento de control de un microscopio de barrido
EP2648005A1 (de) * 2012-04-02 2013-10-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Kalibrierung einer mechanischen Eigenschaft von RSM-Federbalken
GB201218350D0 (en) 2012-10-12 2012-11-28 Infinitesima Ltd Multiple probe actuation
US8860505B2 (en) 2013-02-04 2014-10-14 Zurich Instruments Ag Lock-in amplifier with phase-synchronous processing
WO2014123519A1 (en) * 2013-02-06 2014-08-14 Empire Technology Development Llc Devices, systems, and methods for detecting odorants
JP2014190771A (ja) * 2013-03-26 2014-10-06 National Institute Of Advanced Industrial & Technology 質量測定方法及び質量測定装置
US9453857B2 (en) 2014-04-23 2016-09-27 Oxford Instruments Asylum Research, Inc AM/FM measurements using multiple frequency of atomic force microscopy
DE102015004208B4 (de) 2015-03-31 2016-12-22 Physik Instrumente (Pi) Gmbh & Co. Kg Verfahren zur Steuerung eines Ultraschallmotors und entsprechende Steueranordnung
KR102457857B1 (ko) 2016-08-22 2022-10-24 브루커 나노, 아이엔씨. 진동 모드를 이용한 샘플의 적외선 특성
JP2021122770A (ja) * 2020-02-04 2021-08-30 国立研究開発法人産業技術総合研究所 自励発振装置、切削装置、自励発振装置の制御方法及び切削方法
JP2023114822A (ja) * 2022-02-07 2023-08-18 株式会社東芝 共振周波数検出器及びセンシング装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5753814A (en) * 1994-05-19 1998-05-19 Molecular Imaging Corporation Magnetically-oscillated probe microscope for operation in liquids
US5966053A (en) 1995-04-10 1999-10-12 International Business Machines Corporation Apparatus and method for controlling a mechanical oscillator
JP3175913B2 (ja) 1995-12-08 2001-06-11 セイコーインスツルメンツ株式会社 プローブ顕微鏡の制御方法
JPH09303477A (ja) * 1996-05-16 1997-11-25 Nissan Motor Co Ltd 能動型騒音振動制御装置
US6038916A (en) * 1997-07-22 2000-03-21 Digital Instruments Method and apparatus for measuring energy dissipation by a probe during operation of an atomic force microscope
US6079254A (en) * 1998-05-04 2000-06-27 International Business Machines Corporation Scanning force microscope with automatic surface engagement and improved amplitude demodulation

Also Published As

Publication number Publication date
AU4673101A (en) 2001-11-07
JP2003532060A (ja) 2003-10-28
EP1274966A2 (de) 2003-01-15
US6906450B2 (en) 2005-06-14
US20030137216A1 (en) 2003-07-24
CA2406407A1 (en) 2001-11-01
WO2001081857A3 (en) 2002-04-11
DE60109910D1 (de) 2005-05-12
WO2001081857A2 (en) 2001-11-01
EP1274966B1 (de) 2005-04-06

Similar Documents

Publication Publication Date Title
ATE292783T1 (de) Antrieb einer resonanzprobe und rasterkraftmikroskop
TW200644417A (en) Low-voltage MEMS oscillator
WO2002010832A3 (en) Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
AR026735A1 (es) Inmunoensayo para insecticidas de neonicotinilo
DE60015986D1 (de) Vorrichtung zum abfragen einer passiven fühleranordnung
EP2371309A3 (de) System und Verfahren für verbesserte anfängliche, selbstschwingende, elektromechanische chirurgische Vorrichtungen
KR950033470A (ko) 점성도계
WO2006026770A3 (en) Integrated ewp-stm spin resonance microscope
Rogers et al. Tapping mode atomic force microscopy in liquid with an insulated piezoelectric microactuator
CA2335763A1 (fr) Capteur gyroscopique et appareil de mesure de rotation en comportant application
ATE400013T1 (de) Schwingungsdämpfung
DE69833450D1 (de) Sensor zur erfassung von biologischem komplex
WO2007095360A3 (en) Coupled mass-spring systems and imaging methods for scanning probe microscopy
DE60201887D1 (de) Nahfeldrastermikroskop
EP1184842A3 (de) Relative Pulsposition für einen CELP-Sprachkodierer
US20150323695A1 (en) Transmitting and receiving antenna for a search antenna polarization instrument
JP2006153574A5 (de)
WO2006123172A3 (en) Method of spectroscopy
ATE308044T1 (de) Resonanzsensor mit zwei unabhängigen, degenerierten vibrationsmoden
Sekiguchi et al. Non-destructive force measurement in liquid using atomic force microscope
Torres et al. High quality factor mg-scale silicon mechanical resonators for 3-mode optoacoustic parametric amplifiers
WO1998008046A1 (en) Atomic force microscopy apparatus and a method thereof
JP2000028511A (ja) カンチレバー振幅測定方法および非接触原子間力顕微鏡
DE50109875D1 (de) Schwinganker-membranpumpe
JP2010133910A (ja) 弾性波を用いた材料評価装置

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties