ATE266500T1 - Bearbeitung von inhomogenen materialien - Google Patents

Bearbeitung von inhomogenen materialien

Info

Publication number
ATE266500T1
ATE266500T1 AT02023996T AT02023996T ATE266500T1 AT E266500 T1 ATE266500 T1 AT E266500T1 AT 02023996 T AT02023996 T AT 02023996T AT 02023996 T AT02023996 T AT 02023996T AT E266500 T1 ATE266500 T1 AT E266500T1
Authority
AT
Austria
Prior art keywords
processing
glass
ceramic
inhomogeneous materials
phase
Prior art date
Application number
AT02023996T
Other languages
English (en)
Inventor
Joerg Dipl-Phys Kegeler
Original Assignee
Schott Glas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Glas filed Critical Schott Glas
Application granted granted Critical
Publication of ATE266500T1 publication Critical patent/ATE266500T1/de

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/005Control means for lapping machines or devices
    • B24B37/015Temperature control
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Glass Compositions (AREA)
  • Coating By Spraying Or Casting (AREA)
AT02023996T 2001-11-02 2002-10-26 Bearbeitung von inhomogenen materialien ATE266500T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10154050A DE10154050A1 (de) 2001-11-02 2001-11-02 Bearbeitung von inhomogenen Materialien

Publications (1)

Publication Number Publication Date
ATE266500T1 true ATE266500T1 (de) 2004-05-15

Family

ID=7704521

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02023996T ATE266500T1 (de) 2001-11-02 2002-10-26 Bearbeitung von inhomogenen materialien

Country Status (5)

Country Link
US (1) US6875079B2 (de)
EP (1) EP1308242B1 (de)
JP (1) JP4406531B2 (de)
AT (1) ATE266500T1 (de)
DE (2) DE10154050A1 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8602845B2 (en) * 2011-09-23 2013-12-10 United Technologies Corporation Strengthening by machining
US10183376B1 (en) * 2015-10-20 2019-01-22 Seagate Technology Llc Carrier for mounting a bar of sliders or a stack of such bars to be lapped

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0592363A (ja) * 1991-02-20 1993-04-16 Hitachi Ltd 基板の両面同時研磨加工方法と加工装置及びそれを用いた磁気デイスク基板の研磨加工方法と磁気デイスクの製造方法並びに磁気デイスク
US5658183A (en) * 1993-08-25 1997-08-19 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing including optical monitoring
US5508235A (en) * 1994-07-06 1996-04-16 Schott Glass Technologies, Inc. Cladding glass ceramic for use in high powered lasers
JP2736869B2 (ja) * 1994-11-16 1998-04-02 株式会社オハラ 磁気ディスク基板の製造方法
US5742026A (en) * 1995-06-26 1998-04-21 Corning Incorporated Processes for polishing glass and glass-ceramic surfaces using excimer laser radiation
DE69521911T2 (de) * 1995-11-03 2001-11-15 Seagate Technology Llc Unter zyklisch veränderten temperaturen kathodenzerstäubte strukturierungsschichten aus materialien mit hohem schmelzpunkt
US5691256A (en) * 1995-12-28 1997-11-25 Yamamura Glass Co., Ltd. Glass composition for magnetic disk substrates and magnetic disk substrate
US5873769A (en) * 1997-05-30 1999-02-23 Industrial Technology Research Institute Temperature compensated chemical mechanical polishing to achieve uniform removal rates
DE19737849A1 (de) * 1997-08-29 1999-03-11 Siemens Ag Vorrichtung und Verfahren zum Beheizen eines flüssigen oder zähflüssigen Poliermittels sowie Vorrichtung zum Polieren von Wafern
JP3467184B2 (ja) * 1998-02-05 2003-11-17 信越半導体株式会社 ワークの研磨方法
US6315635B1 (en) * 1999-03-31 2001-11-13 Taiwan Semiconductor Manufacturing Company, Ltd Method and apparatus for slurry temperature control in a polishing process
US6458018B1 (en) * 1999-04-23 2002-10-01 3M Innovative Properties Company Abrasive article suitable for abrading glass and glass ceramic workpieces
US6077151A (en) * 1999-05-17 2000-06-20 Vlsi Technology, Inc. Temperature control carrier head for chemical mechanical polishing process

Also Published As

Publication number Publication date
EP1308242B1 (de) 2004-05-12
DE50200433D1 (de) 2004-06-17
JP2003176155A (ja) 2003-06-24
DE10154050A1 (de) 2003-05-15
EP1308242A1 (de) 2003-05-07
US6875079B2 (en) 2005-04-05
JP4406531B2 (ja) 2010-01-27
US20030087591A1 (en) 2003-05-08

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Legal Events

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REN Ceased due to non-payment of the annual fee