DE69521911T2 - Unter zyklisch veränderten temperaturen kathodenzerstäubte strukturierungsschichten aus materialien mit hohem schmelzpunkt - Google Patents

Unter zyklisch veränderten temperaturen kathodenzerstäubte strukturierungsschichten aus materialien mit hohem schmelzpunkt

Info

Publication number
DE69521911T2
DE69521911T2 DE69521911T DE69521911T DE69521911T2 DE 69521911 T2 DE69521911 T2 DE 69521911T2 DE 69521911 T DE69521911 T DE 69521911T DE 69521911 T DE69521911 T DE 69521911T DE 69521911 T2 DE69521911 T2 DE 69521911T2
Authority
DE
Germany
Prior art keywords
cathodized
materials
melting point
high melting
layers made
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69521911T
Other languages
English (en)
Other versions
DE69521911D1 (de
Inventor
Chuan Gao
Darrin Massey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of DE69521911D1 publication Critical patent/DE69521911D1/de
Application granted granted Critical
Publication of DE69521911T2 publication Critical patent/DE69521911T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/8404—Processes or apparatus specially adapted for manufacturing record carriers manufacturing base layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
DE69521911T 1995-11-03 1995-11-03 Unter zyklisch veränderten temperaturen kathodenzerstäubte strukturierungsschichten aus materialien mit hohem schmelzpunkt Expired - Fee Related DE69521911T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1995/014225 WO1997016826A1 (en) 1995-11-03 1995-11-03 Sputtered thermally cycled texture layers formed of high melting point materials

Publications (2)

Publication Number Publication Date
DE69521911D1 DE69521911D1 (de) 2001-08-30
DE69521911T2 true DE69521911T2 (de) 2001-11-15

Family

ID=22250078

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69521911T Expired - Fee Related DE69521911T2 (de) 1995-11-03 1995-11-03 Unter zyklisch veränderten temperaturen kathodenzerstäubte strukturierungsschichten aus materialien mit hohem schmelzpunkt

Country Status (5)

Country Link
EP (1) EP0801793B1 (de)
JP (1) JPH10512386A (de)
KR (1) KR100276753B1 (de)
DE (1) DE69521911T2 (de)
WO (1) WO1997016826A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10154050A1 (de) * 2001-11-02 2003-05-15 Schott Glas Bearbeitung von inhomogenen Materialien

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19782243T1 (de) * 1997-01-15 1999-12-02 Seagate Technology Magnetaufzeichnungsmedium

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07105345B2 (ja) * 1985-08-08 1995-11-13 日電アネルバ株式会社 基体処理装置
EP0574835B1 (de) * 1992-06-16 1998-03-04 Shin-Etsu Chemical Co., Ltd. Magnetisches Aufzeichnungsmedium
US5441788A (en) * 1993-11-03 1995-08-15 Hewlett-Packard Company Method of preparing recording media for a disk drive and disk drive recording media

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10154050A1 (de) * 2001-11-02 2003-05-15 Schott Glas Bearbeitung von inhomogenen Materialien
US6875079B2 (en) 2001-11-02 2005-04-05 Schott Glas Methods of working, especially polishing, inhomogeneous materials

Also Published As

Publication number Publication date
KR100276753B1 (ko) 2001-02-01
KR987001120A (ko) 1998-04-30
JPH10512386A (ja) 1998-11-24
EP0801793A1 (de) 1997-10-22
WO1997016826A1 (en) 1997-05-09
EP0801793B1 (de) 2001-07-25
DE69521911D1 (de) 2001-08-30

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee