DE69819964D1 - Rekristallisiertes, gesintertes Siliciumcarbidmaterial und Herstellungsverfahren dafür - Google Patents

Rekristallisiertes, gesintertes Siliciumcarbidmaterial und Herstellungsverfahren dafür

Info

Publication number
DE69819964D1
DE69819964D1 DE69819964T DE69819964T DE69819964D1 DE 69819964 D1 DE69819964 D1 DE 69819964D1 DE 69819964 T DE69819964 T DE 69819964T DE 69819964 T DE69819964 T DE 69819964T DE 69819964 D1 DE69819964 D1 DE 69819964D1
Authority
DE
Germany
Prior art keywords
recrystallized
manufacturing process
silicon carbide
carbide material
sintered silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69819964T
Other languages
English (en)
Other versions
DE69819964T2 (de
Inventor
Shigeru Hanzawa
Tsuneo Komiyama
Yasufumi Aihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Application granted granted Critical
Publication of DE69819964D1 publication Critical patent/DE69819964D1/de
Publication of DE69819964T2 publication Critical patent/DE69819964T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/656—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes characterised by specific heating conditions during heat treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/658—Atmosphere during thermal treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
DE69819964T 1997-06-18 1998-06-16 Rekristallisiertes, gesintertes Siliciumcarbidmaterial und Herstellungsverfahren dafür Expired - Lifetime DE69819964T2 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP16111797 1997-06-18
JP16111797 1997-06-18
JP07264498A JP4355375B2 (ja) 1997-06-18 1998-03-20 高電気抵抗及び高熱伝導再結晶ＳｉＣ焼結体及びその製造方法
JP7264498 1998-03-20

Publications (2)

Publication Number Publication Date
DE69819964D1 true DE69819964D1 (de) 2004-01-08
DE69819964T2 DE69819964T2 (de) 2004-09-02

Family

ID=26413781

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69819964T Expired - Lifetime DE69819964T2 (de) 1997-06-18 1998-06-16 Rekristallisiertes, gesintertes Siliciumcarbidmaterial und Herstellungsverfahren dafür

Country Status (5)

Country Link
EP (1) EP0885858B1 (de)
JP (1) JP4355375B2 (de)
KR (1) KR100278397B1 (de)
DE (1) DE69819964T2 (de)
TW (1) TW432027B (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001048649A (ja) * 1999-07-30 2001-02-20 Asahi Glass Co Ltd 炭化ケイ素およびその製造方法
JP3980262B2 (ja) * 2000-10-31 2007-09-26 日本碍子株式会社 ＳｉＣ質熱処理用治具
US7727919B2 (en) * 2007-10-29 2010-06-01 Saint-Gobain Ceramics & Plastics, Inc. High resistivity silicon carbide
JP5976290B2 (ja) * 2011-09-30 2016-08-23 ＡｖａｎＳｔｒａｔｅ株式会社 ガラス板の製造方法
JP2017119589A (ja) * 2015-12-28 2017-07-06 イビデン株式会社 セラミック複合材及びセラミック複合材の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components

Also Published As

Publication number Publication date
DE69819964T2 (de) 2004-09-02
KR19990006978A (ko) 1999-01-25
EP0885858A3 (de) 1999-07-07
TW432027B (en) 2001-05-01
EP0885858A2 (de) 1998-12-23
EP0885858B1 (de) 2003-11-26
JPH1171177A (ja) 1999-03-16
KR100278397B1 (ko) 2001-01-15
JP4355375B2 (ja) 2009-10-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition