ATE262690T1 - Mehrschichtige gedämpfte phasenschiebermaske - Google Patents

Mehrschichtige gedämpfte phasenschiebermaske

Info

Publication number
ATE262690T1
ATE262690T1 AT00906909T AT00906909T ATE262690T1 AT E262690 T1 ATE262690 T1 AT E262690T1 AT 00906909 T AT00906909 T AT 00906909T AT 00906909 T AT00906909 T AT 00906909T AT E262690 T1 ATE262690 T1 AT E262690T1
Authority
AT
Austria
Prior art keywords
phase shift
masks
phase shifter
attenuating
group
Prior art date
Application number
AT00906909T
Other languages
English (en)
Inventor
Peter Francis Carcia
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Application granted granted Critical
Publication of ATE262690T1 publication Critical patent/ATE262690T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/32—Attenuating PSM [att-PSM], e.g. halftone PSM or PSM having semi-transparent phase shift portion; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70408—Interferometric lithography; Holographic lithography; Self-imaging lithography, e.g. utilizing the Talbot effect
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
    • G03F7/70566—Polarisation control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Physical Vapour Deposition (AREA)
AT00906909T 1999-01-14 2000-01-13 Mehrschichtige gedämpfte phasenschiebermaske ATE262690T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11590699P 1999-01-14 1999-01-14
PCT/US2000/000871 WO2000042473A1 (en) 1999-01-14 2000-01-13 Multilayer attenuating phase-shift masks

Publications (1)

Publication Number Publication Date
ATE262690T1 true ATE262690T1 (de) 2004-04-15

Family

ID=22364059

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00906909T ATE262690T1 (de) 1999-01-14 2000-01-13 Mehrschichtige gedämpfte phasenschiebermaske

Country Status (9)

Country Link
US (1) US6274280B1 (de)
EP (1) EP1141775B1 (de)
JP (1) JP2002535702A (de)
KR (1) KR20010112241A (de)
CN (1) CN1337012A (de)
AT (1) ATE262690T1 (de)
DE (1) DE60009261T2 (de)
TW (1) TW449675B (de)
WO (1) WO2000042473A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6835505B2 (en) * 1998-10-08 2004-12-28 Rochester Institute Of Technology Mask for projection photolithography at or below about 160 nm and a method thereof
JP2002296758A (ja) * 2001-03-30 2002-10-09 Hoya Corp ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスク
JP4737483B2 (ja) * 2001-03-30 2011-08-03 Ｈｏｙａ株式会社 ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスク
DE10214092B4 (de) * 2001-03-30 2012-03-15 Hoya Corp. Halbton-Phasenverschiebungsmasken-Rohling und Halbton-Phasenverschiebungsmaske
JP2002296757A (ja) * 2001-03-30 2002-10-09 Hoya Corp ハーフトーン型位相シフトマスク及びマスクブランク
US6756160B2 (en) 2001-04-19 2004-06-29 E.I. Du Pont De Nemours. And Company Ion-beam deposition process for manufacturing attenuated phase shift photomask blanks
US20020197509A1 (en) * 2001-04-19 2002-12-26 Carcia Peter Francis Ion-beam deposition process for manufacturing multi-layered attenuated phase shift photomask blanks
WO2002086622A2 (en) * 2001-04-19 2002-10-31 E.I. Du Pont De Nemours And Company Ion-beam deposition process for manufacturing binary photomask blanks
DE10150874A1 (de) * 2001-10-04 2003-04-30 Zeiss Carl Optisches Element und Verfahren zu dessen Herstellung sowie ein Lithographiegerät und ein Verfahren zur Herstellung eines Halbleiterbauelements
US6872496B2 (en) * 2002-10-31 2005-03-29 Taiwan Semiconductor Manufacturing Company AlSixOy as a new bi-layer high transmittance attenuating phase shifting mask material for 193 nanometer lithography
US7026076B2 (en) 2003-03-03 2006-04-11 Freescale Semiconductor, Inc. Method of patterning photoresist on a wafer using a reflective mask with a multi-layer ARC
US6875546B2 (en) 2003-03-03 2005-04-05 Freescale Semiconductor, Inc. Method of patterning photoresist on a wafer using an attenuated phase shift mask
US20050048375A1 (en) * 2003-08-27 2005-03-03 Cheng-Ming Lin Method of making an attenuated phase-shifting mask from a mask blank
US20070076833A1 (en) * 2003-09-05 2007-04-05 Hans Becker Attenuated phase shift mask blank and photomask
US7029803B2 (en) * 2003-09-05 2006-04-18 Schott Ag Attenuating phase shift mask blank and photomask
US20050260504A1 (en) * 2004-04-08 2005-11-24 Hans Becker Mask blank having a protection layer
KR101316633B1 (ko) * 2004-07-28 2013-10-15 삼성디스플레이 주식회사 다결정 규소용 마스크 및 이의 제조방법과, 이를 이용한박막트랜지스터의 제조방법
JP5483366B2 (ja) * 2011-03-11 2014-05-07 Ｈｏｙａ株式会社 ハーフトーン型位相シフトマスクブランク及びハーフトーン型位相シフトマスクの製造方法
JP6005530B2 (ja) * 2013-01-15 2016-10-12 Hoya株式会社 マスクブランク、位相シフトマスクおよびこれらの製造方法
JP2018063441A (ja) * 2013-11-06 2018-04-19 信越化学工業株式会社 ハーフトーン位相シフト型フォトマスクブランク、ハーフトーン位相シフト型フォトマスク及びパターン露光方法
JP6104852B2 (ja) * 2014-07-14 2017-03-29 Hoya株式会社 マスクブランクの製造方法、位相シフトマスクの製造方法および半導体デバイスの製造方法
KR102341792B1 (ko) 2016-08-26 2021-12-21 호야 가부시키가이샤 마스크 블랭크, 위상 시프트 마스크 및 반도체 디바이스의 제조 방법
US20190302604A1 (en) * 2016-09-26 2019-10-03 Hoya Corporation Mask blank, phase shift mask, method of manufacturing phase shift mask, and method of manufacturing semiconductor device
JP6437602B2 (ja) * 2017-07-28 2018-12-12 Hoya株式会社 マスクブランク、転写用マスクの製造方法、および半導体デバイスの製造方法
JP6490786B2 (ja) * 2017-12-25 2019-03-27 Hoya株式会社 マスクブランク、位相シフトマスクおよび半導体デバイスの製造方法
JP6547019B1 (ja) 2018-02-22 2019-07-17 Hoya株式会社 マスクブランク、位相シフトマスク及び半導体デバイスの製造方法
WO2019188397A1 (ja) 2018-03-26 2019-10-03 Hoya株式会社 マスクブランク、位相シフトマスク及び半導体デバイスの製造方法
KR102473558B1 (ko) * 2019-10-23 2022-12-05 주식회사 에스앤에스텍 극자외선 리소그래피용 하프톤 위상반전 블랭크 마스크 및 포토마스크

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5897976A (en) * 1996-05-20 1999-04-27 E. I. Du Pont De Nemours And Company Attenuating embedded phase shift photomask blanks
US5897977A (en) 1996-05-20 1999-04-27 E. I. Du Pont De Nemours And Company Attenuating embedded phase shift photomask blanks

Also Published As

Publication number Publication date
EP1141775B1 (de) 2004-03-24
TW449675B (en) 2001-08-11
EP1141775A1 (de) 2001-10-10
DE60009261T2 (de) 2005-03-03
JP2002535702A (ja) 2002-10-22
WO2000042473A1 (en) 2000-07-20
DE60009261D1 (de) 2004-04-29
KR20010112241A (ko) 2001-12-20
US6274280B1 (en) 2001-08-14
CN1337012A (zh) 2002-02-20

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Legal Events

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