ATE240585T1 - Plasmavorrichtung mit einem mit einer spannungsquelle verbundenen metallteil, das zwischen einer rf-plasma-anregungsquelle und dem plasma angeordnet ist - Google Patents

Plasmavorrichtung mit einem mit einer spannungsquelle verbundenen metallteil, das zwischen einer rf-plasma-anregungsquelle und dem plasma angeordnet ist

Info

Publication number
ATE240585T1
ATE240585T1 AT98966132T AT98966132T ATE240585T1 AT E240585 T1 ATE240585 T1 AT E240585T1 AT 98966132 T AT98966132 T AT 98966132T AT 98966132 T AT98966132 T AT 98966132T AT E240585 T1 ATE240585 T1 AT E240585T1
Authority
AT
Austria
Prior art keywords
plasma
window
plate
metal part
part connected
Prior art date
Application number
AT98966132T
Other languages
English (en)
Inventor
Scott K Baldwin Jr
Michael S Barnes
John P Holland
Original Assignee
Lam Res Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Res Corp filed Critical Lam Res Corp
Application granted granted Critical
Publication of ATE240585T1 publication Critical patent/ATE240585T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32458—Vessel
    • H01J37/32477—Vessel characterised by the means for protecting vessels or internal parts, e.g. coatings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
  • Primary Cells (AREA)
AT98966132T 1997-12-31 1998-12-31 Plasmavorrichtung mit einem mit einer spannungsquelle verbundenen metallteil, das zwischen einer rf-plasma-anregungsquelle und dem plasma angeordnet ist ATE240585T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/001,512 US6280563B1 (en) 1997-12-31 1997-12-31 Plasma device including a powered non-magnetic metal member between a plasma AC excitation source and the plasma
PCT/US1998/027885 WO1999034399A1 (en) 1997-12-31 1998-12-31 Plasma device including a powered non-magnetic metal member between a plasma ac excitation source and the plasma

Publications (1)

Publication Number Publication Date
ATE240585T1 true ATE240585T1 (de) 2003-05-15

Family

ID=21696416

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98966132T ATE240585T1 (de) 1997-12-31 1998-12-31 Plasmavorrichtung mit einem mit einer spannungsquelle verbundenen metallteil, das zwischen einer rf-plasma-anregungsquelle und dem plasma angeordnet ist

Country Status (10)

Country Link
US (1) US6280563B1 (de)
EP (1) EP1044459B1 (de)
JP (1) JP4709376B2 (de)
KR (1) KR100630885B1 (de)
AT (1) ATE240585T1 (de)
AU (1) AU2210299A (de)
DE (1) DE69814687T2 (de)
IL (1) IL137070A (de)
TW (1) TW423020B (de)
WO (1) WO1999034399A1 (de)

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Also Published As

Publication number Publication date
EP1044459A1 (de) 2000-10-18
DE69814687D1 (de) 2003-06-18
WO1999034399A1 (en) 1999-07-08
KR100630885B1 (ko) 2006-10-02
KR20010033787A (ko) 2001-04-25
EP1044459B1 (de) 2003-05-14
US6280563B1 (en) 2001-08-28
JP2002500413A (ja) 2002-01-08
WO1999034399B1 (en) 1999-08-26
AU2210299A (en) 1999-07-19
TW423020B (en) 2001-02-21
IL137070A0 (en) 2001-06-14
IL137070A (en) 2004-01-04
JP4709376B2 (ja) 2011-06-22
DE69814687T2 (de) 2004-02-26

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