ATE188574T1 - Verfahren zur herstellung einer integrierten schaltungsanordnung - Google Patents
Verfahren zur herstellung einer integrierten schaltungsanordnungInfo
- Publication number
- ATE188574T1 ATE188574T1 AT95307087T AT95307087T ATE188574T1 AT E188574 T1 ATE188574 T1 AT E188574T1 AT 95307087 T AT95307087 T AT 95307087T AT 95307087 T AT95307087 T AT 95307087T AT E188574 T1 ATE188574 T1 AT E188574T1
- Authority
- AT
- Austria
- Prior art keywords
- indium
- channel region
- producing
- integrated circuit
- circuit arrangement
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000007943 implant Substances 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- 229910001449 indium ion Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/08—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/0843—Source or drain regions of field-effect devices
- H01L29/0847—Source or drain regions of field-effect devices of field-effect transistors with insulated gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823807—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the channel structures, e.g. channel implants, halo or pocket implants, or channel materials
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US32092494A | 1994-10-11 | 1994-10-11 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE188574T1 true ATE188574T1 (de) | 2000-01-15 |
Family
ID=23248430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT95307087T ATE188574T1 (de) | 1994-10-11 | 1995-10-06 | Verfahren zur herstellung einer integrierten schaltungsanordnung |
Country Status (6)
Country | Link |
---|---|
US (1) | US6331458B1 (de) |
EP (1) | EP0707345B1 (de) |
JP (1) | JP4260905B2 (de) |
KR (1) | KR960015811A (de) |
AT (1) | ATE188574T1 (de) |
DE (1) | DE69514307T2 (de) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5821147A (en) * | 1995-12-11 | 1998-10-13 | Lucent Technologies, Inc. | Integrated circuit fabrication |
WO1999035685A1 (en) * | 1998-01-05 | 1999-07-15 | Advanced Micro Devices, Inc. | Integrated cmos transistor formation |
US7091093B1 (en) * | 1999-09-17 | 2006-08-15 | Matsushita Electric Industrial Co., Ltd. | Method for fabricating a semiconductor device having a pocket dopant diffused layer |
JP2001094094A (ja) * | 1999-09-21 | 2001-04-06 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2002076332A (ja) * | 2000-08-24 | 2002-03-15 | Hitachi Ltd | 絶縁ゲート型電界効果トランジスタ及びその製造方法 |
KR100387536B1 (ko) * | 2000-10-18 | 2003-06-18 | 주식회사 루밴틱스 | 광학 접착제 수지 조성물 및 광학 접착제 수지의 제조방법 |
KR20020037459A (ko) * | 2000-11-14 | 2002-05-22 | 박성수 | 각종 카드에 인쇄되는 uv향기 잉크의 조성물 |
US6885078B2 (en) * | 2001-11-09 | 2005-04-26 | Lsi Logic Corporation | Circuit isolation utilizing MeV implantation |
US7189606B2 (en) * | 2002-06-05 | 2007-03-13 | Micron Technology, Inc. | Method of forming fully-depleted (FD) SOI MOSFET access transistor |
US6756619B2 (en) * | 2002-08-26 | 2004-06-29 | Micron Technology, Inc. | Semiconductor constructions |
KR100496551B1 (ko) * | 2002-11-20 | 2005-06-22 | 주식회사 하이닉스반도체 | 반도체 소자의 제조 방법 |
US6734070B1 (en) * | 2003-03-17 | 2004-05-11 | Oki Electric Industry Co., Ltd. | Method of fabricating a semiconductor device with field-effect transistors having shallow source and drain junctions |
US6949785B2 (en) * | 2004-01-14 | 2005-09-27 | Taiwan Semiconductor Manufacturing Co., Ltd. | Random access memory (RAM) capacitor in shallow trench isolation with improved electrical isolation to overlying gate electrodes |
US7071515B2 (en) * | 2003-07-14 | 2006-07-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Narrow width effect improvement with photoresist plug process and STI corner ion implantation |
JP2006186261A (ja) * | 2004-12-28 | 2006-07-13 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
US7645687B2 (en) * | 2005-01-20 | 2010-01-12 | Chartered Semiconductor Manufacturing, Ltd. | Method to fabricate variable work function gates for FUSI devices |
KR100779395B1 (ko) * | 2006-08-31 | 2007-11-23 | 동부일렉트로닉스 주식회사 | 반도체소자 및 그 제조방법 |
TWI418603B (zh) | 2007-03-16 | 2013-12-11 | Mitsubishi Gas Chemical Co | 光穿透型電磁波屏蔽積層體及其製造方法、光穿透型電波吸收體,以及接著劑組成物 |
US8173503B2 (en) * | 2009-02-23 | 2012-05-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fabrication of source/drain extensions with ultra-shallow junctions |
JP5499780B2 (ja) * | 2010-03-04 | 2014-05-21 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
EP2578650A4 (de) | 2010-06-01 | 2015-02-25 | Riken Technos Corp | Zusammensetzung zur verwendung als beschichtungsmaterial, haftbindungsverfahren und laminierte produkte |
US10553494B2 (en) * | 2016-11-29 | 2020-02-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Breakdown resistant semiconductor apparatus and method of making same |
JP6996858B2 (ja) * | 2017-03-29 | 2022-01-17 | 旭化成エレクトロニクス株式会社 | 半導体装置及びその製造方法 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3883372A (en) * | 1973-07-11 | 1975-05-13 | Westinghouse Electric Corp | Method of making a planar graded channel MOS transistor |
JPS5952849A (ja) * | 1982-09-20 | 1984-03-27 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS60224271A (ja) | 1984-04-20 | 1985-11-08 | Nec Corp | 半導体装置およびその製造方法 |
US4746964A (en) | 1986-08-28 | 1988-05-24 | Fairchild Semiconductor Corporation | Modification of properties of p-type dopants with other p-type dopants |
US4851360A (en) * | 1986-09-29 | 1989-07-25 | Texas Instruments Incorporated | NMOS source/drain doping with both P and As |
US4835112A (en) | 1988-03-08 | 1989-05-30 | Motorola, Inc. | CMOS salicide process using germanium implantation |
US5021851A (en) | 1988-05-03 | 1991-06-04 | Texas Instruments Incorporated | NMOS source/drain doping with both P and As |
US4889819A (en) * | 1988-05-20 | 1989-12-26 | International Business Machines Corporation | Method for fabricating shallow junctions by preamorphizing with dopant of same conductivity as substrate |
JPH02291150A (ja) * | 1989-04-28 | 1990-11-30 | Hitachi Ltd | 半導体装置 |
US5134447A (en) * | 1989-09-22 | 1992-07-28 | At&T Bell Laboratories | Neutral impurities to increase lifetime of operation of semiconductor devices |
US5296401A (en) * | 1990-01-11 | 1994-03-22 | Mitsubishi Denki Kabushiki Kaisha | MIS device having p channel MOS device and n channel MOS device with LDD structure and manufacturing method thereof |
US5320974A (en) * | 1991-07-25 | 1994-06-14 | Matsushita Electric Industrial Co., Ltd. | Method for making semiconductor transistor device by implanting punch through stoppers |
US5266508A (en) * | 1991-08-26 | 1993-11-30 | Sharp Kabushiki Kaisha | Process for manufacturing semiconductor device |
US5344790A (en) * | 1993-08-31 | 1994-09-06 | Sgs-Thomson Microelectronics, Inc. | Making integrated circuit transistor having drain junction offset |
-
1995
- 1995-09-22 US US08/532,861 patent/US6331458B1/en not_active Expired - Lifetime
- 1995-10-06 AT AT95307087T patent/ATE188574T1/de active
- 1995-10-06 DE DE69514307T patent/DE69514307T2/de not_active Expired - Lifetime
- 1995-10-06 EP EP95307087A patent/EP0707345B1/de not_active Expired - Lifetime
- 1995-10-09 JP JP26179595A patent/JP4260905B2/ja not_active Expired - Lifetime
- 1995-10-10 KR KR1019950034672A patent/KR960015811A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0707345A1 (de) | 1996-04-17 |
DE69514307T2 (de) | 2000-08-10 |
JPH08250730A (ja) | 1996-09-27 |
EP0707345B1 (de) | 2000-01-05 |
KR960015811A (ko) | 1996-05-22 |
JP4260905B2 (ja) | 2009-04-30 |
DE69514307D1 (de) | 2000-02-10 |
US6331458B1 (en) | 2001-12-18 |
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