ATE182031T1 - Ionenpumpe und vakuumpumpanlage dafür - Google Patents
Ionenpumpe und vakuumpumpanlage dafürInfo
- Publication number
- ATE182031T1 ATE182031T1 AT92102346T AT92102346T ATE182031T1 AT E182031 T1 ATE182031 T1 AT E182031T1 AT 92102346 T AT92102346 T AT 92102346T AT 92102346 T AT92102346 T AT 92102346T AT E182031 T1 ATE182031 T1 AT E182031T1
- Authority
- AT
- Austria
- Prior art keywords
- vacuum
- pump
- vacuum pump
- ion
- high vacuum
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/18—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
Landscapes
- Electron Tubes For Measurement (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3884791 | 1991-02-12 | ||
JP3884891 | 1991-02-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE182031T1 true ATE182031T1 (de) | 1999-07-15 |
Family
ID=26378132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT92102346T ATE182031T1 (de) | 1991-02-12 | 1992-02-12 | Ionenpumpe und vakuumpumpanlage dafür |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0499239B1 (de) |
JP (1) | JPH05174780A (de) |
AT (1) | ATE182031T1 (de) |
DE (1) | DE69229511T2 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4820996B2 (ja) * | 2005-05-30 | 2011-11-24 | 大学共同利用機関法人自然科学研究機構 | 希ガスの固定化装置及び固定化方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2578009A (en) * | 1947-12-23 | 1951-12-11 | Rca Corp | Electronic high vacuum apparatus |
FR968943A (fr) * | 1948-07-02 | 1950-12-08 | Csf | Perfectionnements aux dispositifs de pompage à vide élevé |
GB684710A (en) * | 1950-07-19 | 1952-12-24 | Ass Elect Ind | Improvements relating to high vacuum pumps |
GB762365A (en) * | 1953-07-10 | 1956-11-28 | Edwards And Co London Ltd W | Improvements in and relating to ionic vacuum pumping apparatus |
AT288066B (de) * | 1968-03-27 | 1971-02-25 | Erich Ing Jakopic | Ein- oder mehrstufige komprimierende Ionenpumpe |
JPH0675386B2 (ja) * | 1990-08-03 | 1994-09-21 | 株式会社荏原製作所 | 高真空装置及び該高真空装置を用いた真空ポンプ装置 |
-
1992
- 1992-02-03 JP JP4047533A patent/JPH05174780A/ja active Pending
- 1992-02-12 DE DE69229511T patent/DE69229511T2/de not_active Expired - Fee Related
- 1992-02-12 AT AT92102346T patent/ATE182031T1/de not_active IP Right Cessation
- 1992-02-12 EP EP92102346A patent/EP0499239B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0499239A3 (en) | 1993-03-03 |
DE69229511T2 (de) | 2000-02-03 |
EP0499239A2 (de) | 1992-08-19 |
DE69229511D1 (de) | 1999-08-12 |
JPH05174780A (ja) | 1993-07-13 |
EP0499239B1 (de) | 1999-07-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |