AT288066B - Ein- oder mehrstufige komprimierende Ionenpumpe - Google Patents

Ein- oder mehrstufige komprimierende Ionenpumpe

Info

Publication number
AT288066B
AT288066B AT298068A AT298068A AT288066B AT 288066 B AT288066 B AT 288066B AT 298068 A AT298068 A AT 298068A AT 298068 A AT298068 A AT 298068A AT 288066 B AT288066 B AT 288066B
Authority
AT
Austria
Prior art keywords
ion pump
stage compressing
compressing ion
stage
pump
Prior art date
Application number
AT298068A
Other languages
English (en)
Inventor
Erich Ing Jakopic
Original Assignee
Erich Ing Jakopic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Erich Ing Jakopic filed Critical Erich Ing Jakopic
Priority to AT298068A priority Critical patent/AT288066B/de
Priority to DE19691915367 priority patent/DE1915367A1/de
Priority to GB1615169A priority patent/GB1268381A/en
Application granted granted Critical
Publication of AT288066B publication Critical patent/AT288066B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
AT298068A 1968-03-27 1968-03-27 Ein- oder mehrstufige komprimierende Ionenpumpe AT288066B (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AT298068A AT288066B (de) 1968-03-27 1968-03-27 Ein- oder mehrstufige komprimierende Ionenpumpe
DE19691915367 DE1915367A1 (de) 1968-03-27 1969-03-26 Ein- oder mehrstufige komprimierende Ionenpumpe
GB1615169A GB1268381A (en) 1968-03-27 1969-03-27 Improvements in and relating to ion pumps

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT298068A AT288066B (de) 1968-03-27 1968-03-27 Ein- oder mehrstufige komprimierende Ionenpumpe

Publications (1)

Publication Number Publication Date
AT288066B true AT288066B (de) 1971-02-25

Family

ID=3543424

Family Applications (1)

Application Number Title Priority Date Filing Date
AT298068A AT288066B (de) 1968-03-27 1968-03-27 Ein- oder mehrstufige komprimierende Ionenpumpe

Country Status (3)

Country Link
AT (1) AT288066B (de)
DE (1) DE1915367A1 (de)
GB (1) GB1268381A (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5326227A (en) * 1990-08-03 1994-07-05 Ebara Corporation Exhaust apparatus with vacuum pump
US5240381A (en) * 1990-08-03 1993-08-31 Ebara Corporation Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
JPH05174780A (ja) * 1991-02-12 1993-07-13 Ebara Corp 高真空装置及び該高真空装置を用いた真空ポンプ装置
DE102008052217B3 (de) * 2008-10-17 2011-03-10 Johann Wolfgang Goethe-Universität Elektrostatischer Ionenkompressor
US10455683B2 (en) 2016-05-31 2019-10-22 Agilent Technologies, Inc. Ion throughput pump and method

Also Published As

Publication number Publication date
DE1915367A1 (de) 1969-10-09
GB1268381A (en) 1972-03-29

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee