AT288066B - Ein- oder mehrstufige komprimierende Ionenpumpe - Google Patents
Ein- oder mehrstufige komprimierende IonenpumpeInfo
- Publication number
- AT288066B AT288066B AT298068A AT298068A AT288066B AT 288066 B AT288066 B AT 288066B AT 298068 A AT298068 A AT 298068A AT 298068 A AT298068 A AT 298068A AT 288066 B AT288066 B AT 288066B
- Authority
- AT
- Austria
- Prior art keywords
- ion pump
- stage compressing
- compressing ion
- stage
- pump
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT298068A AT288066B (de) | 1968-03-27 | 1968-03-27 | Ein- oder mehrstufige komprimierende Ionenpumpe |
DE19691915367 DE1915367A1 (de) | 1968-03-27 | 1969-03-26 | Ein- oder mehrstufige komprimierende Ionenpumpe |
GB1615169A GB1268381A (en) | 1968-03-27 | 1969-03-27 | Improvements in and relating to ion pumps |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AT298068A AT288066B (de) | 1968-03-27 | 1968-03-27 | Ein- oder mehrstufige komprimierende Ionenpumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
AT288066B true AT288066B (de) | 1971-02-25 |
Family
ID=3543424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT298068A AT288066B (de) | 1968-03-27 | 1968-03-27 | Ein- oder mehrstufige komprimierende Ionenpumpe |
Country Status (3)
Country | Link |
---|---|
AT (1) | AT288066B (de) |
DE (1) | DE1915367A1 (de) |
GB (1) | GB1268381A (de) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5326227A (en) * | 1990-08-03 | 1994-07-05 | Ebara Corporation | Exhaust apparatus with vacuum pump |
US5240381A (en) * | 1990-08-03 | 1993-08-31 | Ebara Corporation | Exhaust apparatus and vacuum pumping unit including the exhaust apparatus |
JPH05174780A (ja) * | 1991-02-12 | 1993-07-13 | Ebara Corp | 高真空装置及び該高真空装置を用いた真空ポンプ装置 |
DE102008052217B3 (de) * | 2008-10-17 | 2011-03-10 | Johann Wolfgang Goethe-Universität | Elektrostatischer Ionenkompressor |
US10455683B2 (en) | 2016-05-31 | 2019-10-22 | Agilent Technologies, Inc. | Ion throughput pump and method |
-
1968
- 1968-03-27 AT AT298068A patent/AT288066B/de not_active IP Right Cessation
-
1969
- 1969-03-26 DE DE19691915367 patent/DE1915367A1/de active Pending
- 1969-03-27 GB GB1615169A patent/GB1268381A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
DE1915367A1 (de) | 1969-10-09 |
GB1268381A (en) | 1972-03-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELJ | Ceased due to non-payment of the annual fee |