CH503201A - Cryopompe - Google Patents

Cryopompe

Info

Publication number
CH503201A
CH503201A CH1149369A CH1149369A CH503201A CH 503201 A CH503201 A CH 503201A CH 1149369 A CH1149369 A CH 1149369A CH 1149369 A CH1149369 A CH 1149369A CH 503201 A CH503201 A CH 503201A
Authority
CH
Switzerland
Prior art keywords
cryopump
Prior art date
Application number
CH1149369A
Other languages
English (en)
Inventor
Thibault Jean-Jacques
Boissin Jean-Claude
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Publication of CH503201A publication Critical patent/CH503201A/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
CH1149369A 1968-08-01 1969-07-28 Cryopompe CH503201A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR161426 1968-08-01

Publications (1)

Publication Number Publication Date
CH503201A true CH503201A (fr) 1971-02-15

Family

ID=8653299

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1149369A CH503201A (fr) 1968-08-01 1969-07-28 Cryopompe

Country Status (9)

Country Link
US (1) US3579998A (fr)
BE (1) BE736711A (fr)
CH (1) CH503201A (fr)
DE (1) DE1938035C3 (fr)
FR (1) FR1587077A (fr)
GB (1) GB1225608A (fr)
LU (1) LU59154A1 (fr)
NL (1) NL6911590A (fr)
SE (1) SE353943B (fr)

Families Citing this family (41)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE791888A (fr) * 1971-11-26 1973-05-24 Air Liquide Dispositif de cryopompage
GB1448752A (en) * 1973-03-08 1976-09-08 Boc International Ltd Vacuum pumping assembly
US3994625A (en) * 1975-02-18 1976-11-30 Varian Associates Sputter-ion pump having improved cooling and improved magnetic circuitry
DE2620880C2 (de) * 1976-05-11 1984-07-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe
GB1597825A (en) * 1976-12-23 1981-09-09 Planer Ltd G V Chemical synthesis apparatus
CH621366A5 (fr) * 1977-05-09 1981-01-30 Balzers Hochvakuum
US4150549A (en) * 1977-05-16 1979-04-24 Air Products And Chemicals, Inc. Cryopumping method and apparatus
DE2830943C2 (de) * 1978-07-14 1986-06-12 Leybold-Heraeus GmbH, 5000 Köln Kryopumpenanordnung
US4219588A (en) * 1979-01-12 1980-08-26 Air Products And Chemicals, Inc. Method for coating cryopumping apparatus
DE2907055A1 (de) * 1979-02-23 1980-08-28 Kernforschungsanlage Juelich Waermestrahlungsschild fuer kryopumpen
US4336690A (en) * 1979-09-28 1982-06-29 Varian Associates, Inc. Cryogenic pump with radiation shield
DE2942305C2 (de) * 1979-10-19 1986-11-27 Kernforschungsanlage Jülich GmbH, 5170 Jülich Kryosammler
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
US4438632A (en) * 1982-07-06 1984-03-27 Helix Technology Corporation Means for periodic desorption of a cryopump
US4535597A (en) * 1984-01-25 1985-08-20 Marin Tek, Inc. Fast cycle water vapor cryopump
JPS60161702A (ja) * 1984-01-27 1985-08-23 Seiko Instr & Electronics Ltd 真空用冷却トラツプ
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
SU1698481A1 (ru) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Криогенный адсорбционный насос
US4926648A (en) * 1988-03-07 1990-05-22 Toshiba Corp. Turbomolecular pump and method of operating the same
US4873833A (en) * 1988-11-23 1989-10-17 American Telephone Telegraph Company, At&T Bell Laboratories Apparatus comprising a high-vacuum chamber
JP3123126B2 (ja) * 1991-07-15 2001-01-09 株式会社日立製作所 冷却機付き真空容器
US5236041A (en) * 1991-07-22 1993-08-17 Hull Corporation Cyclonic vapor flow condenser
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造
US5664402A (en) * 1995-09-28 1997-09-09 Gary W. Clem, Inc. Method and means for harvesting and packaging seeds
US5782096A (en) * 1997-02-05 1998-07-21 Helix Technology Corporation Cryopump with improved shielding
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
WO2002061349A1 (fr) 2000-11-10 2002-08-08 Tfi Telemark Systeme de refrigeration de gaz melanges cryogeniques en discontinu
JP4500265B2 (ja) * 2003-11-20 2010-07-14 住友重機械工業株式会社 クライオポンプ
WO2005075826A1 (fr) * 2004-02-03 2005-08-18 Universität Regensburg Pompe a vide et procede pour faire fonctionner cette pompe a vide
US20050274128A1 (en) * 2004-06-10 2005-12-15 Genesis Cryopump with enhanced hydrogen pumping
WO2008039410A2 (fr) * 2006-09-25 2008-04-03 Veeco Instruments Inc. Panneau cryogenique isole thermiquement pour systemes de depot sous vide
WO2008088794A2 (fr) * 2007-01-17 2008-07-24 Brooks Automation, Inc. Cryopompe haute capacité exempte de saut de pression
EP2264225B1 (fr) * 2009-06-18 2012-08-29 Riber Appareil d'épitaxie à faisceau moléculaire pour la production de tranches de matériau semi-conducteur
US9117563B2 (en) * 2014-01-13 2015-08-25 Cold Quanta, Inc. Ultra-cold-matter system with thermally-isolated nested source cell
CN106014916B (zh) * 2015-03-31 2018-07-03 住友重机械工业株式会社 低温泵
CN105179199B (zh) * 2015-10-30 2018-12-28 上海优拓低温技术有限公司 一种低温泵
GB2596831A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
GB2596832A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1019047B (de) * 1954-08-13 1957-11-07 Dr Hans Klumb Kuehlfalle fuer Hochvakuumpumpen
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US3027651A (en) * 1958-07-23 1962-04-03 Leybold Hochvakuum Anlagen Process and system for removing condensable vapors
US3296773A (en) * 1964-03-24 1967-01-10 Union Carbide Corp Adsorbent-coated thermal panels
US3360949A (en) * 1965-09-20 1968-01-02 Air Reduction Cryopumping configuration
US3364654A (en) * 1965-09-27 1968-01-23 Union Carbide Corp Ultrahigh vacuum pumping process and apparatus
US3390536A (en) * 1967-02-01 1968-07-02 Gca Corp Cryogenic pumping apparatus

Also Published As

Publication number Publication date
DE1938035B2 (de) 1980-03-06
BE736711A (fr) 1970-01-29
SE353943B (fr) 1973-02-19
NL6911590A (fr) 1970-02-03
DE1938035C3 (de) 1985-03-14
DE1938035A1 (de) 1970-02-05
FR1587077A (fr) 1970-03-13
LU59154A1 (fr) 1969-12-02
US3579998A (en) 1971-05-25
GB1225608A (fr) 1971-03-17

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Legal Events

Date Code Title Description
PL Patent ceased