FR1587077A - - Google Patents
Info
- Publication number
- FR1587077A FR1587077A FR161426A FR1587077DA FR1587077A FR 1587077 A FR1587077 A FR 1587077A FR 161426 A FR161426 A FR 161426A FR 1587077D A FR1587077D A FR 1587077DA FR 1587077 A FR1587077 A FR 1587077A
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR161426 | 1968-08-01 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1587077A true FR1587077A (fr) | 1970-03-13 |
Family
ID=8653299
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR161426A Expired FR1587077A (fr) | 1968-08-01 | 1968-08-01 |
Country Status (9)
Country | Link |
---|---|
US (1) | US3579998A (fr) |
BE (1) | BE736711A (fr) |
CH (1) | CH503201A (fr) |
DE (1) | DE1938035C3 (fr) |
FR (1) | FR1587077A (fr) |
GB (1) | GB1225608A (fr) |
LU (1) | LU59154A1 (fr) |
NL (1) | NL6911590A (fr) |
SE (1) | SE353943B (fr) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE791888A (fr) * | 1971-11-26 | 1973-05-24 | Air Liquide | Dispositif de cryopompage |
GB1448752A (en) * | 1973-03-08 | 1976-09-08 | Boc International Ltd | Vacuum pumping assembly |
US3994625A (en) * | 1975-02-18 | 1976-11-30 | Varian Associates | Sputter-ion pump having improved cooling and improved magnetic circuitry |
DE2620880C2 (de) * | 1976-05-11 | 1984-07-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpe |
GB1597825A (en) * | 1976-12-23 | 1981-09-09 | Planer Ltd G V | Chemical synthesis apparatus |
CH621366A5 (fr) * | 1977-05-09 | 1981-01-30 | Balzers Hochvakuum | |
US4150549A (en) * | 1977-05-16 | 1979-04-24 | Air Products And Chemicals, Inc. | Cryopumping method and apparatus |
DE2830943C2 (de) * | 1978-07-14 | 1986-06-12 | Leybold-Heraeus GmbH, 5000 Köln | Kryopumpenanordnung |
US4219588A (en) * | 1979-01-12 | 1980-08-26 | Air Products And Chemicals, Inc. | Method for coating cryopumping apparatus |
DE2907055A1 (de) * | 1979-02-23 | 1980-08-28 | Kernforschungsanlage Juelich | Waermestrahlungsschild fuer kryopumpen |
US4336690A (en) * | 1979-09-28 | 1982-06-29 | Varian Associates, Inc. | Cryogenic pump with radiation shield |
DE2942305C2 (de) * | 1979-10-19 | 1986-11-27 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Kryosammler |
US4341079A (en) * | 1980-04-01 | 1982-07-27 | Cvi Incorporated | Cryopump apparatus |
USRE31665E (en) * | 1980-04-01 | 1984-09-11 | Cvi Incorporated | Cryopump apparatus |
US4275566A (en) * | 1980-04-01 | 1981-06-30 | Pennwalt Corporation | Cryopump apparatus |
JPS58160552A (ja) * | 1982-03-18 | 1983-09-24 | Toyota Motor Corp | 内燃機関の点火時期制御方法 |
US4438632A (en) * | 1982-07-06 | 1984-03-27 | Helix Technology Corporation | Means for periodic desorption of a cryopump |
US4535597A (en) * | 1984-01-25 | 1985-08-20 | Marin Tek, Inc. | Fast cycle water vapor cryopump |
JPS60161702A (ja) * | 1984-01-27 | 1985-08-23 | Seiko Instr & Electronics Ltd | 真空用冷却トラツプ |
US4559787A (en) * | 1984-12-04 | 1985-12-24 | The United States Of America As Represented By The United States Department Of Energy | Vacuum pump apparatus |
SU1698481A1 (ru) * | 1987-12-17 | 1991-12-15 | Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср | Криогенный адсорбционный насос |
US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
US4873833A (en) * | 1988-11-23 | 1989-10-17 | American Telephone Telegraph Company, At&T Bell Laboratories | Apparatus comprising a high-vacuum chamber |
JP3123126B2 (ja) * | 1991-07-15 | 2001-01-09 | 株式会社日立製作所 | 冷却機付き真空容器 |
US5236041A (en) * | 1991-07-22 | 1993-08-17 | Hull Corporation | Cyclonic vapor flow condenser |
JP2719298B2 (ja) * | 1993-07-29 | 1998-02-25 | アプライド マテリアルズ インコーポレイテッド | 真空装置の冷却構造 |
US5664402A (en) * | 1995-09-28 | 1997-09-09 | Gary W. Clem, Inc. | Method and means for harvesting and packaging seeds |
US5782096A (en) * | 1997-02-05 | 1998-07-21 | Helix Technology Corporation | Cryopump with improved shielding |
US6155059A (en) * | 1999-01-13 | 2000-12-05 | Helix Technology Corporation | High capacity cryopump |
US6644067B2 (en) | 2000-11-10 | 2003-11-11 | Telmark Cryogenics Limited | Discontinuous cryogenic mixed gas refrigeration system and method |
JP4500265B2 (ja) * | 2003-11-20 | 2010-07-14 | 住友重機械工業株式会社 | クライオポンプ |
WO2005075826A1 (fr) * | 2004-02-03 | 2005-08-18 | Universität Regensburg | Pompe a vide et procede pour faire fonctionner cette pompe a vide |
US20050274128A1 (en) * | 2004-06-10 | 2005-12-15 | Genesis | Cryopump with enhanced hydrogen pumping |
WO2008039410A2 (fr) * | 2006-09-25 | 2008-04-03 | Veeco Instruments Inc. | Panneau cryogenique isole thermiquement pour systemes de depot sous vide |
US10760562B2 (en) * | 2007-01-17 | 2020-09-01 | Edwards Vacuum Llc | Pressure burst free high capacity cryopump |
ES2391246T3 (es) * | 2009-06-18 | 2012-11-22 | Riber | Aparato de epitaxia de haz molecular para producir pastillas de material semiconductor |
US9117563B2 (en) * | 2014-01-13 | 2015-08-25 | Cold Quanta, Inc. | Ultra-cold-matter system with thermally-isolated nested source cell |
CN106014917B (zh) * | 2015-03-31 | 2018-07-17 | 住友重机械工业株式会社 | 低温泵 |
CN105179199B (zh) * | 2015-10-30 | 2018-12-28 | 上海优拓低温技术有限公司 | 一种低温泵 |
GB2596832A (en) * | 2020-07-08 | 2022-01-12 | Edwards Vacuum Llc | Cryopump |
GB2596831A (en) * | 2020-07-08 | 2022-01-12 | Edwards Vacuum Llc | Cryopump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1019047B (de) * | 1954-08-13 | 1957-11-07 | Dr Hans Klumb | Kuehlfalle fuer Hochvakuumpumpen |
US2831549A (en) * | 1954-08-31 | 1958-04-22 | Westinghouse Electric Corp | Isolation trap |
US3027651A (en) * | 1958-07-23 | 1962-04-03 | Leybold Hochvakuum Anlagen | Process and system for removing condensable vapors |
US3296773A (en) * | 1964-03-24 | 1967-01-10 | Union Carbide Corp | Adsorbent-coated thermal panels |
US3360949A (en) * | 1965-09-20 | 1968-01-02 | Air Reduction | Cryopumping configuration |
US3364654A (en) * | 1965-09-27 | 1968-01-23 | Union Carbide Corp | Ultrahigh vacuum pumping process and apparatus |
US3390536A (en) * | 1967-02-01 | 1968-07-02 | Gca Corp | Cryogenic pumping apparatus |
-
1968
- 1968-08-01 FR FR161426A patent/FR1587077A/fr not_active Expired
-
1969
- 1969-07-23 LU LU59154D patent/LU59154A1/xx unknown
- 1969-07-23 SE SE10372/69A patent/SE353943B/xx unknown
- 1969-07-25 US US844779A patent/US3579998A/en not_active Expired - Lifetime
- 1969-07-26 DE DE1938035A patent/DE1938035C3/de not_active Expired
- 1969-07-28 CH CH1149369A patent/CH503201A/fr not_active IP Right Cessation
- 1969-07-29 NL NL6911590A patent/NL6911590A/xx unknown
- 1969-07-29 BE BE736711D patent/BE736711A/xx unknown
- 1969-07-31 GB GB1225608D patent/GB1225608A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
CH503201A (fr) | 1971-02-15 |
DE1938035B2 (de) | 1980-03-06 |
DE1938035C3 (de) | 1985-03-14 |
LU59154A1 (fr) | 1969-12-02 |
NL6911590A (fr) | 1970-02-03 |
DE1938035A1 (de) | 1970-02-05 |
US3579998A (en) | 1971-05-25 |
GB1225608A (fr) | 1971-03-17 |
BE736711A (fr) | 1970-01-29 |
SE353943B (fr) | 1973-02-19 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |