DE69936249D1 - Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen - Google Patents

Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen

Info

Publication number
DE69936249D1
DE69936249D1 DE69936249T DE69936249T DE69936249D1 DE 69936249 D1 DE69936249 D1 DE 69936249D1 DE 69936249 T DE69936249 T DE 69936249T DE 69936249 T DE69936249 T DE 69936249T DE 69936249 D1 DE69936249 D1 DE 69936249D1
Authority
DE
Germany
Prior art keywords
vacuum pump
transport
lines
gases pumped
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69936249T
Other languages
English (en)
Other versions
DE69936249T2 (de
Inventor
Francois Houze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Publication of DE69936249D1 publication Critical patent/DE69936249D1/de
Application granted granted Critical
Publication of DE69936249T2 publication Critical patent/DE69936249T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
    • F16L55/02—Energy absorbers; Noise absorbers
    • F16L55/033—Noise absorbers
    • F16L55/0331—Noise absorbers by inserting an elongated element in the pipe

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)
DE69936249T 1998-11-02 1999-10-21 Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen Expired - Fee Related DE69936249T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9813727A FR2785361B1 (fr) 1998-11-02 1998-11-02 Transport de gaz pompes dans une pompe a vide ou des canalisations
FR9813727 1998-11-02

Publications (2)

Publication Number Publication Date
DE69936249D1 true DE69936249D1 (de) 2007-07-19
DE69936249T2 DE69936249T2 (de) 2008-01-31

Family

ID=9532255

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69936249T Expired - Fee Related DE69936249T2 (de) 1998-11-02 1999-10-21 Beförderung von in einer Vakuumpumpe oder in Leitungen gepumpten Gasen

Country Status (6)

Country Link
US (1) US6371737B1 (de)
EP (1) EP0999292B1 (de)
JP (1) JP2000140610A (de)
AT (1) ATE364099T1 (de)
DE (1) DE69936249T2 (de)
FR (1) FR2785361B1 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2785361B1 (fr) * 1998-11-02 2000-12-01 Cit Alcatel Transport de gaz pompes dans une pompe a vide ou des canalisations
KR100479935B1 (ko) * 2002-06-11 2005-03-30 주식회사 지에스티 이중 진공배관 및 그 제조방법
US20070020115A1 (en) * 2005-07-01 2007-01-25 The Boc Group, Inc. Integrated pump apparatus for semiconductor processing
CN101458017B (zh) * 2007-12-11 2011-04-27 Ls美创有限公司 降低噪声用连接管体及具有该连接管体的冷冻装置
JP4677041B1 (ja) * 2009-12-24 2011-04-27 住友精化株式会社 二連型真空ポンプ装置、ガス精製システム、真空ポンプ排ガス振動抑制装置、および真空ポンプ排ガス振動抑制方法
KR101213780B1 (ko) * 2011-01-04 2012-12-18 아딕센진공코리아 유한회사 에너지 절약형 사일런서 어셈블리와 이를 구비한 반도체 제조용 진공펌프 및 질소가스의 가열방법
FR3124235B1 (fr) * 2021-07-20 2023-06-09 Pfeiffer Vacuum Pompe à vide

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3846574A (en) * 1970-06-17 1974-11-05 H Rordorf Method of heating objects and device for the performance of the method
FR2351064A1 (fr) * 1976-05-12 1977-12-09 France Etat Procede et equipement d'elaboration de preformes pour fibres optiques
US5063651A (en) * 1978-02-21 1991-11-12 Varian Associates, Inc. Method of manufacturing a low emissivity liquid nitrogen dewar
GB2040011A (en) * 1979-01-08 1980-08-20 Berry A Thermally insulated piping systems
DE3003798A1 (de) * 1980-02-02 1981-08-13 Wülfing und Hauck GmbH + Co KG, 3504 Kaufungen Waermedaemm- und/oder schallschluckmatte
JPS56156626A (en) * 1980-05-06 1981-12-03 Meidensha Electric Mfg Co Ltd Vacuum breaker
US4548257A (en) * 1982-02-23 1985-10-22 Williamson William R Bayonet tube heat exchanger
US4565157A (en) * 1983-03-29 1986-01-21 Genus, Inc. Method and apparatus for deposition of tungsten silicides
DE3785192D1 (de) * 1987-05-15 1993-05-06 Leybold Ag Zweiwellenvakuumpumpe mit schoepfraum.
SE464126B (sv) * 1988-09-05 1991-03-11 Profor Ab Fyllroer vid foerpackningsmaskin
US6068784A (en) * 1989-10-03 2000-05-30 Applied Materials, Inc. Process used in an RF coupled plasma reactor
JPH0712291A (ja) * 1993-06-23 1995-01-17 Matsushita Electric Ind Co Ltd 防音断熱材及びその製造方法
EP0762045B1 (de) * 1995-09-07 2003-12-03 The Perkin-Elmer Corporation Wärmedämmung für Flüssiggasbehälter
US5556473A (en) * 1995-10-27 1996-09-17 Specialty Coating Systems, Inc. Parylene deposition apparatus including dry vacuum pump system and downstream cold trap
US5817575A (en) * 1996-01-30 1998-10-06 Advanced Micro Devices, Inc. Prevention of clogging in CVD apparatus
US5674574A (en) * 1996-05-20 1997-10-07 Micron Technology, Inc. Vapor delivery system for solid precursors and method regarding same
FR2785361B1 (fr) * 1998-11-02 2000-12-01 Cit Alcatel Transport de gaz pompes dans une pompe a vide ou des canalisations

Also Published As

Publication number Publication date
DE69936249T2 (de) 2008-01-31
EP0999292A1 (de) 2000-05-10
US6371737B1 (en) 2002-04-16
ATE364099T1 (de) 2007-06-15
JP2000140610A (ja) 2000-05-23
EP0999292B1 (de) 2007-06-06
FR2785361A1 (fr) 2000-05-05
FR2785361B1 (fr) 2000-12-01

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee