ATE16473T1 - Verfahren und oefen zur herstellung von siliziumcarbid. - Google Patents

Verfahren und oefen zur herstellung von siliziumcarbid.

Info

Publication number
ATE16473T1
ATE16473T1 AT83102511T AT83102511T ATE16473T1 AT E16473 T1 ATE16473 T1 AT E16473T1 AT 83102511 T AT83102511 T AT 83102511T AT 83102511 T AT83102511 T AT 83102511T AT E16473 T1 ATE16473 T1 AT E16473T1
Authority
AT
Austria
Prior art keywords
silicon carbide
mix
gates
temperature
heat source
Prior art date
Application number
AT83102511T
Other languages
English (en)
Inventor
Areekattuthazhayil K Kuriakose
Original Assignee
Norton Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co filed Critical Norton Co
Application granted granted Critical
Publication of ATE16473T1 publication Critical patent/ATE16473T1/de

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/60Heating arrangements wherein the heating current flows through granular powdered or fluid material, e.g. for salt-bath furnace, electrolytic heating
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/90Carbides
    • C01B32/914Carbides of single elements
    • C01B32/956Silicon carbide
    • C01B32/963Preparation from compounds containing silicon
    • C01B32/97Preparation from SiO or SiO2
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01PINDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2006/00Physical properties of inorganic compounds
    • C01P2006/80Compositional purity

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Silicon Compounds (AREA)
  • Ceramic Products (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
AT83102511T 1982-03-29 1983-03-14 Verfahren und oefen zur herstellung von siliziumcarbid. ATE16473T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/362,701 US4419336A (en) 1982-03-29 1982-03-29 Silicon carbide production and furnace
EP83102511A EP0090252B1 (de) 1982-03-29 1983-03-14 Verfahren und Öfen zur Herstellung von Siliziumcarbid

Publications (1)

Publication Number Publication Date
ATE16473T1 true ATE16473T1 (de) 1985-11-15

Family

ID=23427177

Family Applications (1)

Application Number Title Priority Date Filing Date
AT83102511T ATE16473T1 (de) 1982-03-29 1983-03-14 Verfahren und oefen zur herstellung von siliziumcarbid.

Country Status (11)

Country Link
US (1) US4419336A (de)
EP (1) EP0090252B1 (de)
JP (1) JPS58217415A (de)
AT (1) ATE16473T1 (de)
AU (1) AU559627B2 (de)
BR (1) BR8301537A (de)
CA (1) CA1178022A (de)
DE (1) DE3361199D1 (de)
IN (1) IN158213B (de)
NO (1) NO160843C (de)
ZA (1) ZA831649B (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4756895A (en) * 1986-08-22 1988-07-12 Stemcor Corporation Hexagonal silicon carbide platelets and preforms and methods for making and using same
US5165916A (en) * 1989-10-02 1992-11-24 Phillips Petroleum Company Method for producing carbide products
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5108729A (en) * 1989-10-02 1992-04-28 Phillips Petroleum Company Production of carbide products
JP2579561B2 (ja) * 1991-03-22 1997-02-05 東海カーボン株式会社 SiCウイスカーの製造装置
US5128115A (en) * 1991-04-08 1992-07-07 The United States Of America As Represented By The United States Department Of Energy Manufacture of silicon carbide using solar energy
US5324494A (en) * 1993-01-21 1994-06-28 Midwest Research Institute Method for silicon carbide production by reacting silica with hydrocarbon gas
NO306815B1 (no) * 1994-06-06 1999-12-27 Norton As Fremgangsmåte ved fremstilling av siliciumkarbid
US5679153A (en) * 1994-11-30 1997-10-21 Cree Research, Inc. Method for reducing micropipe formation in the epitaxial growth of silicon carbide and resulting silicon carbide structures
JP2884085B1 (ja) * 1998-04-13 1999-04-19 日本ピラー工業株式会社 単結晶SiCおよびその製造方法
US6967523B2 (en) * 2000-11-21 2005-11-22 Mosaid Technologies Incorporated Cascaded charge pump power supply with different gate oxide thickness transistors
CN202164123U (zh) * 2011-07-01 2012-03-14 段晓燕 一种收集碳化硅冶炼炉气体的炉侧墙
FR2977578B1 (fr) * 2011-07-06 2013-07-05 Produits Refractaires Procede de fabrication de carbure de silicium
CN103857622A (zh) * 2011-08-24 2014-06-11 太平洋水泥株式会社 碳化硅粉末及其制造方法
CN103964441B (zh) * 2014-05-13 2015-12-09 神华集团有限责任公司 利用除尘粉冶炼碳化硅的方法
JP6489807B2 (ja) * 2014-11-26 2019-03-27 太平洋セメント株式会社 電気抵抗炉及びこれを用いた炭化珪素の製造方法
CN105060296B (zh) * 2015-07-23 2017-03-15 西安科技大学 一种热源并联式碳化硅合成炉

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11473A (en) * 1854-08-08 Sawing and iplaning machine
US1044295A (en) * 1907-06-14 1912-11-12 Frank J Tone Process of producing silicon carbid.
US2005956A (en) * 1931-12-02 1935-06-25 Norton Co Method of making abrasive metal carbides and an apparatus therefor
US2178773A (en) * 1935-11-13 1939-11-07 Carborundum Co Silicon carbide and manufacture thereof
SU121119A1 (ru) * 1958-12-17 1959-11-30 В.Л. Алферов Способ получени карбида кремни в электропечах
US3375073A (en) * 1960-11-14 1968-03-26 Carborundum Co Process and apparatus for effecting solid-state reactions
US3962406A (en) * 1967-11-25 1976-06-08 U.S. Philips Corporation Method of manufacturing silicon carbide crystals
US3773553A (en) * 1969-03-27 1973-11-20 Norton Co Silicon carbide junction diode
DD114673A5 (de) * 1973-12-21 1975-08-12

Also Published As

Publication number Publication date
NO160843C (no) 1989-06-07
AU1217283A (en) 1984-07-05
CA1178022A (en) 1984-11-20
BR8301537A (pt) 1983-12-06
AU559627B2 (en) 1987-03-19
ZA831649B (en) 1983-11-30
IN158213B (de) 1986-09-27
US4419336A (en) 1983-12-06
NO160843B (no) 1989-02-27
DE3361199D1 (en) 1985-12-19
NO831036L (no) 1983-09-30
JPS58217415A (ja) 1983-12-17
EP0090252A1 (de) 1983-10-05
EP0090252B1 (de) 1985-11-13

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Legal Events

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UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee