JPS539209A - High frequency heating coil of floating zone purifying apparatus - Google Patents
High frequency heating coil of floating zone purifying apparatusInfo
- Publication number
- JPS539209A JPS539209A JP8309376A JP8309376A JPS539209A JP S539209 A JPS539209 A JP S539209A JP 8309376 A JP8309376 A JP 8309376A JP 8309376 A JP8309376 A JP 8309376A JP S539209 A JPS539209 A JP S539209A
- Authority
- JP
- Japan
- Prior art keywords
- floating zone
- high frequency
- heating coil
- frequency heating
- purifying apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To stabilize and to widely improve the non-transitionizing rate of single crystal Si, by using induction main coil for refining heating and subsidiary coil for remining heat effect or slow cooling effect at the same time, on occasion of producing the semiconductor of non-transition Si single crystal from a high purity polycrystalline Si with floating zone refining process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8309376A JPS539209A (en) | 1976-07-13 | 1976-07-13 | High frequency heating coil of floating zone purifying apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8309376A JPS539209A (en) | 1976-07-13 | 1976-07-13 | High frequency heating coil of floating zone purifying apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS539209A true JPS539209A (en) | 1978-01-27 |
Family
ID=13792555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8309376A Pending JPS539209A (en) | 1976-07-13 | 1976-07-13 | High frequency heating coil of floating zone purifying apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS539209A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5498734A (en) * | 1978-01-17 | 1979-08-03 | Kawasaki Kasei Chem Ltd | Method of separation of naphthoquinone and phthalic acid |
JPS5511520A (en) * | 1978-07-11 | 1980-01-26 | Kawasaki Kasei Chem Ltd | Separation of naphthoquinone from phthalic acid |
JPS59130830A (en) * | 1983-01-18 | 1984-07-27 | Nippon Jiyouriyuu Kogyo Kk | Collection of quinones |
JPH0524966A (en) * | 1991-07-16 | 1993-02-02 | Shin Etsu Handotai Co Ltd | Production of semiconductor silicon single crystal by fz method |
-
1976
- 1976-07-13 JP JP8309376A patent/JPS539209A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5498734A (en) * | 1978-01-17 | 1979-08-03 | Kawasaki Kasei Chem Ltd | Method of separation of naphthoquinone and phthalic acid |
JPS591250B2 (en) * | 1978-01-17 | 1984-01-11 | 川崎化成工業株式会社 | Separation method of naphthoquinone and phthalic acid |
JPS5511520A (en) * | 1978-07-11 | 1980-01-26 | Kawasaki Kasei Chem Ltd | Separation of naphthoquinone from phthalic acid |
JPS591251B2 (en) * | 1978-07-11 | 1984-01-11 | 川崎化成工業株式会社 | How to separate naphthoquinone and phthalic acid |
JPS59130830A (en) * | 1983-01-18 | 1984-07-27 | Nippon Jiyouriyuu Kogyo Kk | Collection of quinones |
JPH047335B2 (en) * | 1983-01-18 | 1992-02-10 | Nippon Joryu Kogyo Kk | |
JPH0524966A (en) * | 1991-07-16 | 1993-02-02 | Shin Etsu Handotai Co Ltd | Production of semiconductor silicon single crystal by fz method |
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