ATE161520T1 - Nitridprodukte und methode und apparat zu ihrer herstellung - Google Patents
Nitridprodukte und methode und apparat zu ihrer herstellungInfo
- Publication number
- ATE161520T1 ATE161520T1 AT90118780T AT90118780T ATE161520T1 AT E161520 T1 ATE161520 T1 AT E161520T1 AT 90118780 T AT90118780 T AT 90118780T AT 90118780 T AT90118780 T AT 90118780T AT E161520 T1 ATE161520 T1 AT E161520T1
- Authority
- AT
- Austria
- Prior art keywords
- product
- nitride compound
- products
- injected
- combustion
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/064—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with boron
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
- B01J12/02—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor for obtaining at least one reaction product which, at normal temperature, is in the solid state
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/072—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with aluminium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/02—Amorphous compounds
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
- C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
- C01P2002/82—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by IR- or Raman-data
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2002/00—Crystal-structural characteristics
- C01P2002/80—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70
- C01P2002/86—Crystal-structural characteristics defined by measured data other than those specified in group C01P2002/70 by NMR- or ESR-data
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/51—Particles with a specific particle size distribution
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/61—Micrometer sized, i.e. from 1-100 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/60—Particles characterised by their size
- C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/10—Solid density
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2006/00—Physical properties of inorganic compounds
- C01P2006/12—Surface area
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Ceramic Products (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/416,190 US5176893A (en) | 1989-10-02 | 1989-10-02 | Silicon nitride products and method for their production |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE161520T1 true ATE161520T1 (de) | 1998-01-15 |
Family
ID=23648951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT90118780T ATE161520T1 (de) | 1989-10-02 | 1990-10-01 | Nitridprodukte und methode und apparat zu ihrer herstellung |
Country Status (12)
Country | Link |
---|---|
US (1) | US5176893A (de) |
EP (1) | EP0425825B1 (de) |
JP (1) | JP2644620B2 (de) |
KR (1) | KR970008980B1 (de) |
AT (1) | ATE161520T1 (de) |
AU (1) | AU625164B2 (de) |
CA (1) | CA2020508C (de) |
DE (1) | DE69031859T2 (de) |
DK (1) | DK0425825T3 (de) |
ES (1) | ES2110402T3 (de) |
GR (1) | GR3025939T3 (de) |
NO (1) | NO904274L (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5178844A (en) * | 1990-04-03 | 1993-01-12 | Phillips Petroleum Company | Method and apparatus for producing nitride products |
US5302366A (en) * | 1991-03-28 | 1994-04-12 | Phillips Petroleum Company | Production of silicon product containing both carbon and nitrogen |
DE69213898T2 (de) * | 1991-12-13 | 1997-02-06 | Ford Werke Ag | Metallnitridfilm |
US5352395A (en) * | 1992-07-17 | 1994-10-04 | Phillips Petroleum Company | Carbon and ceramic-containing layers for use in sintering of silicon nitride article |
FR2708924B1 (fr) * | 1993-08-12 | 1995-10-20 | Saint Gobain Vitrage Int | Procédé de dépôt d'une couche de nitrure métallique sur un substrat transparent. |
FR2759362B1 (fr) * | 1997-02-10 | 1999-03-12 | Saint Gobain Vitrage | Substrat transparent muni d'au moins une couche mince a base de nitrure ou d'oxynitrure de silicium et son procede d'obtention |
US6517341B1 (en) * | 1999-02-26 | 2003-02-11 | General Electric Company | Method to prevent recession loss of silica and silicon-containing materials in combustion gas environments |
US20030188475A1 (en) * | 2002-03-29 | 2003-10-09 | Shabbir Ahmed | Dynamic fuel processor with controlled declining temperatures |
JP2007301687A (ja) * | 2006-05-12 | 2007-11-22 | Naoetsu Electronics Co Ltd | ワーク切断装置 |
JP2008200772A (ja) * | 2007-02-16 | 2008-09-04 | Sharp Corp | ワイヤソーおよびそれを用いたスラリーの再使用方法 |
JP2008213111A (ja) * | 2007-03-06 | 2008-09-18 | Sharp Corp | マルチワイヤーソーおよびスラリー供給方法 |
US20100258233A1 (en) * | 2007-11-06 | 2010-10-14 | Mitsubishi Materials Corporation | Ceramic substrate, method of manufacturing ceramic substrate, and method of manufacturing power module substrate |
DE102012223195A1 (de) | 2012-12-14 | 2014-06-18 | Evonik Industries Ag | Hochreine pulverförmige Halbmetallcarbid- und Halbmetallnitridverbindungen, Verfahren zu deren Herstellung und dafür geeigneter Reaktor |
SG11201510759WA (en) * | 2013-07-11 | 2016-02-26 | Ube Industries | Silicon nitride powder for mold release agent of casting mold for casting polycrystalline silicon ingot and method for manufacturing said silicon nitride powder, slurry containing said silicon nitride powder, casting mold for casting polycrystalline silicon ingot and method for manufacturing same, and method for manufacturing polycrystalline silicon ingot using said casting mold |
Family Cites Families (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2632713A (en) * | 1948-10-29 | 1953-03-24 | Phillips Petroleum Co | Carbon black process |
US2614946A (en) * | 1950-03-17 | 1952-10-21 | Carborundum Co | Granular silicon carbide and method of making same |
US3025192A (en) * | 1959-01-02 | 1962-03-13 | Norton Co | Silicon carbide crystals and processes and furnaces for making them |
US3275722A (en) * | 1959-07-08 | 1966-09-27 | Power Jets Res & Dev Ltd | Production of dense bodies of silicon carbide |
US3085863A (en) * | 1960-11-01 | 1963-04-16 | Gen Electric | Method of making silicon carbide |
US3253886A (en) * | 1961-05-09 | 1966-05-31 | Union Carbide Corp | Process for producing ultrafine powders of refractory materials |
DE1187591B (de) * | 1961-09-08 | 1965-02-25 | Degussa | Verfahren zur Herstellung von Siliziumcarbid oder dieses enthaltenden Mischungen |
US3161473A (en) * | 1962-06-06 | 1964-12-15 | Corning Glass Works | Method of making beta-silicon carbide fibers |
GB1050932A (de) * | 1963-05-30 | |||
BE651736A (de) * | 1963-08-13 | |||
US3346338A (en) * | 1964-01-20 | 1967-10-10 | Continental Carbon Co | Production of finely divided silicon or titanium carbide |
NL132104C (de) * | 1965-02-15 | |||
US3399980A (en) * | 1965-12-28 | 1968-09-03 | Union Carbide Corp | Metallic carbides and a process of producing the same |
US3368871A (en) * | 1966-12-05 | 1968-02-13 | Ionics | Fluidized bed process for the preparation of colloidal silicon carbide |
US3839542A (en) * | 1971-01-04 | 1974-10-01 | American Cyanamid Co | Method of making sub-micron particles of metal carbides of enlarged and controlled particle size |
US3877876A (en) * | 1972-08-30 | 1975-04-15 | Phillips Petroleum Co | Carbon black apparatus |
US3979500A (en) * | 1973-05-02 | 1976-09-07 | Ppg Industries, Inc. | Preparation of finely-divided refractory powders of groups III-V metal borides, carbides, nitrides, silicides and sulfides |
US4036653A (en) * | 1975-05-28 | 1977-07-19 | E. I. Du Pont De Nemours And Company | Amorphous silicon nitride composition containing carbon, and vapor phase process |
CA1236853A (en) * | 1975-12-03 | 1988-05-17 | Frederick G. Stroke | SUBMICRON .beta. SILICON CARBIDE POWDER AND SINTERED ARTICLES OF HIGH DENSITY PREPARED THEREFROM |
CA1084235A (en) * | 1976-05-24 | 1980-08-26 | Ryo Enomoto | PROCESS AND AN APPARATUS FOR PRODUCING SILICON CARBIDE CONSISTING MAINLY OF .beta.-TYPE CRYSTAL |
JPS54122312A (en) * | 1978-03-15 | 1979-09-21 | Hiroshige Suzuki | Silicon carbide powder for sintering use and preparation thereof |
US4188368A (en) * | 1978-03-29 | 1980-02-12 | Nasa | Method of producing silicon |
JPS54132500A (en) * | 1978-04-05 | 1979-10-15 | Toshiba Ceramics Co | Manufacture of silicon nitride powder |
JPS5595605A (en) * | 1979-01-10 | 1980-07-21 | Toyo Soda Mfg Co Ltd | High purity silicon nitride and production thereof |
JPS5673616A (en) * | 1979-11-22 | 1981-06-18 | Toshiba Corp | Manufacture of silicon carbide |
US4284612A (en) * | 1980-01-28 | 1981-08-18 | Great Lakes Carbon Corporation | Preparation of SiC whiskers |
US4248844A (en) * | 1980-01-28 | 1981-02-03 | Great Lakes Carbon Corporation | Production of SiC from rice hulls and silica |
US4283375A (en) * | 1980-01-28 | 1981-08-11 | Great Lakes Carbon Corporation | Production of SiC whiskers |
DE3023297C2 (de) * | 1980-06-21 | 1988-05-05 | International Minerals & Chemical Luxembourg S.A., 2010 Luxembourg | Verfahren zur Herstellung eines Vorproduktes für die Erzeugung von Siliziumcarbid |
US4431749A (en) * | 1981-05-05 | 1984-02-14 | Ashland Oil, Inc. | Large pore catalysts for heavy hydrocarbon conversion |
JPS6044280B2 (ja) * | 1982-02-25 | 1985-10-02 | 東海カ−ボン株式会社 | 炭化けい素ウイスカ−の製造方法 |
DE3371295D1 (en) * | 1982-03-01 | 1987-06-11 | Toyota Motor Co Ltd | A method and apparatus for making a fine powder compound of a metal and another element |
US4419336A (en) * | 1982-03-29 | 1983-12-06 | Norton Company | Silicon carbide production and furnace |
JPS6052119B2 (ja) * | 1982-04-01 | 1985-11-18 | タテホ化学工業株式会社 | 窒化珪素ウイスカ−の製造方法 |
JPS6052120B2 (ja) * | 1982-06-04 | 1985-11-18 | タテホ化学工業株式会社 | 炭化珪素の製造方法 |
US4435476A (en) * | 1982-08-18 | 1984-03-06 | Foster Grant Corporation | Method of making an abrasion resistant coating on a solid substrate and articles produced thereby |
CA1214309A (en) * | 1982-09-14 | 1986-11-25 | Yukihiro Yoda | Process for preparing metal carbides and precursors thereof |
US4543344A (en) * | 1983-11-28 | 1985-09-24 | Dow Corning Corporation | Silicon nitride-containing ceramic material prepared by pyrolysis of hydrosilazane polymers from (R3 Si)2 NH and HSiCl3 |
US4571331A (en) * | 1983-12-12 | 1986-02-18 | Shin-Etsu Chemical Co., Ltd. | Ultrafine powder of silicon carbide, a method for the preparation thereof and a sintered body therefrom |
US4482669A (en) * | 1984-01-19 | 1984-11-13 | Massachusetts Institute Of Technology | Preceramic organosilazane polymers |
US4548798A (en) * | 1984-04-16 | 1985-10-22 | Exxon Research And Engineering Co. | Laser synthesis of refractory oxide powders |
JPS60221398A (ja) * | 1984-04-18 | 1985-11-06 | Toshiba Ceramics Co Ltd | キラを原料とするβ型窒化けい素ウイスカ−の製造方法 |
US4535007A (en) * | 1984-07-02 | 1985-08-13 | Dow Corning Corporation | Silicon nitride-containing ceramics |
US4668642A (en) * | 1984-09-11 | 1987-05-26 | Dow Corning Corporation | Ceramic materials from silazane polymers |
JPS6170013A (ja) * | 1984-09-13 | 1986-04-10 | Nikkiso Co Ltd | 微細繊維の製造方法 |
US4757035A (en) * | 1984-09-21 | 1988-07-12 | Dow Corning Corporation | Ceramic materials with increased crystallinity from silazane polymers |
US4622001A (en) * | 1985-03-12 | 1986-11-11 | Electra Form, Inc. | Cavity cooling system |
US4604273A (en) * | 1985-04-19 | 1986-08-05 | Gte Products Corporation | Process for the growth of alpha silicon nitride whiskers |
DE3644057A1 (de) * | 1986-12-22 | 1988-06-30 | Vaw Ver Aluminium Werke Ag | Verfahren und vorrichtung zur thermischen und/oder reduzierenden behandlung von festen, koernigen und/oder agglomerierten einsatzmaterialien |
US4891339A (en) * | 1987-10-23 | 1990-01-02 | Aerochem Research Laboratories, Inc. | Process and apparatus for the flame preparation of ceramic powders |
US5108729A (en) * | 1989-10-02 | 1992-04-28 | Phillips Petroleum Company | Production of carbide products |
-
1989
- 1989-10-02 US US07/416,190 patent/US5176893A/en not_active Expired - Fee Related
-
1990
- 1990-07-05 CA CA002020508A patent/CA2020508C/en not_active Expired - Fee Related
- 1990-09-12 AU AU62400/90A patent/AU625164B2/en not_active Ceased
- 1990-09-26 KR KR90015309A patent/KR970008980B1/ko not_active IP Right Cessation
- 1990-09-28 JP JP2260348A patent/JP2644620B2/ja not_active Expired - Lifetime
- 1990-10-01 EP EP90118780A patent/EP0425825B1/de not_active Expired - Lifetime
- 1990-10-01 DE DE69031859T patent/DE69031859T2/de not_active Expired - Fee Related
- 1990-10-01 NO NO90904274A patent/NO904274L/no unknown
- 1990-10-01 AT AT90118780T patent/ATE161520T1/de not_active IP Right Cessation
- 1990-10-01 DK DK90118780.7T patent/DK0425825T3/da active
- 1990-10-01 ES ES90118780T patent/ES2110402T3/es not_active Expired - Lifetime
-
1998
- 1998-01-16 GR GR980400109T patent/GR3025939T3/el unknown
Also Published As
Publication number | Publication date |
---|---|
CA2020508A1 (en) | 1991-04-03 |
AU6240090A (en) | 1991-08-01 |
US5176893A (en) | 1993-01-05 |
NO904274D0 (no) | 1990-10-01 |
NO904274L (no) | 1991-04-03 |
KR970008980B1 (en) | 1997-06-03 |
AU625164B2 (en) | 1992-07-02 |
DE69031859D1 (de) | 1998-02-05 |
JPH03126605A (ja) | 1991-05-29 |
ES2110402T3 (es) | 1998-02-16 |
CA2020508C (en) | 1998-09-29 |
KR910007799A (ko) | 1991-05-30 |
EP0425825B1 (de) | 1997-12-29 |
JP2644620B2 (ja) | 1997-08-25 |
EP0425825A1 (de) | 1991-05-08 |
DE69031859T2 (de) | 1998-04-16 |
GR3025939T3 (en) | 1998-04-30 |
DK0425825T3 (da) | 1998-01-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |