CA1214309A - Process for preparing metal carbides and precursors thereof - Google Patents

Process for preparing metal carbides and precursors thereof

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Publication number
CA1214309A
CA1214309A CA000436445A CA436445A CA1214309A CA 1214309 A CA1214309 A CA 1214309A CA 000436445 A CA000436445 A CA 000436445A CA 436445 A CA436445 A CA 436445A CA 1214309 A CA1214309 A CA 1214309A
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Prior art keywords
carbon
metal
mixture
aerosol
compound
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CA000436445A
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French (fr)
Inventor
Yukihiro Yoda
Makoto Horita
Kensaku Maruyama
Hideaki Miyashita
Norihiro Murakawa
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Mitsui Chemicals Inc
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Mitsui Toatsu Chemicals Inc
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Priority claimed from JP57158786A external-priority patent/JPS5949828A/en
Priority claimed from JP57159516A external-priority patent/JPS58213625A/en
Priority claimed from JP57192526A external-priority patent/JPS5983922A/en
Priority claimed from JP57211377A external-priority patent/JPS59102871A/en
Priority claimed from JP57227040A external-priority patent/JPS59121198A/en
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
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Abstract

A B S T R A C T

A carbon-containing mixture is obtained by collect-ing a dispersed phase mixture from an aerosol which has been formed by introducing a decomposable carbon compound and a decomposable metallic compound into a hot gas containing steam.
Since this carbon-containing mixture is extremely high in uniformity and consists of extremely fine particles, it can afford after heat treatment a metal carbide of high quality.

Description

~2~a3~

PROCESS FOR PREPARING METAL CARBIDES
~ND PRECU~SORS THEREOF

The present invention relates to a pxocess for preparing metal carbides and precursors thereof.
More particularly, it is concerned wi-th a process for preparing novel carbon-containing mixtures and metal carbides obtained therethrough.

Sintered metal carbides such as sintered silicon carbide are known to have superior characteristics as ceramic materials, etc.
Heretofore, metal carbides have been produced mainly by reac-ting metal elements or metal oxides and carbon under a strong heat. For example, a method in which one or more of, for example, such metal elements as silicon, titanium, tungsten, boron, aluminum, zirconium, hafnium, niobium, cobalt, molybdenum, tantalum, chromium and vanadium, or of oxides of these metals, and carbon are mixed and reacted under a strong heat, has already been practiced on an industrial scale. In this industrial method, the said mixture as it is, or together with an inert gas, e.g. argon or helium, is heated by using a high-frequency heating furnace, an Acheson type direct - electric resistance furnace, or the like, to allow a reducing reaction and a carburizing reaction to 3~

take place, whereby there are obtained powdered metal carbides according to the starting materials used, e.g. SiC, TiC, WC, B4Cr ZrC, HfC, NbC, Mo2C r TaC, Cr3C2 r VC, (SiTi)C, (WTi~C; (MoW)C, (WTiTaNb)C.
The thus obtained powders of metal carbides have a characteristic such that the finer the powders, the higher the strength of moldings obtained by subseguent sintering and the higher the sintering rate. This inevitably requires that the mixture of metal element or metal oxide and carbon, as an intermediate material, be of uniform and fine particles. In this connection, according to the prior art, the mixture in question is produced usually by pulveriæing and mix~ng a coarse-grained or agglomerated metal element or metal oxide and carbon mechanically simultaneously and batchwise by means of a ball mill, a hammer mill, or the like.
In this method, however, not only the material charging and product carrying out operations are troublesome because of the batch process, but also problems associated with working environment such as the formation of dust and the generation of noise during the pulverizing and mixing operation are unavoidable.
Moreover, the mechanical pulverization requires a long time for obtaining a finely divided powder, and this long-time pulverization inevitably results in an increased amount of impurities incorporated which is ascribable -to wear of the pulverizing machine i~self, which in turn requires an impurity removing ~Z~.43~
step as an after step such as chemical washing or adsorption. Because of these problems, it is next to impossible for the Jnechanical method to af~ord a finel~ divided mixture of below one micron.
There has also been known a method in which fine powders which have separately been obtained in advance by some suitable means are mixed together by using a mixer, a kneader, or the like. Even according to this method, however, biasing in the contents of the resultant mixture is unavoidable due to the difference in particle size, orientating property and specific gravity peculiar to each powder. In an effort to remedy this drawback, there has further been proposed a method in which a fine powder is dispersed in water in the form of colloid by means of a wet vibration mill or the like and then spray-dried by using a spray drier or the like.
However, even according to this method, biasing in the mixed contents is apt to occur, and there is a fundamental problem sùch that because silicon oxide powder, titanium oxide powder and carbon powder which are aggregates with each individual particle being incapable of separating easily remain as aggregates as they are, it is difficult for them to constitute a mixture consisting of individual particles. Further, also from economic aspects such as equipment and energy costs, such conventional method is not aesirable because it goes through Eine powder manufacturing, wet mixing and spray drying steps.

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On the other hand, as another method for obtaining metal carbides, U.S~ Patent 3,839,542 discloses a method of producing finely divided metal carbldes directly by a vapor phase reaction from S halides of metals such as boron, silicon, titanium, zirconium, hafnium, vanadium, tantalum, niobium, molybdenum, tungsten and thor.ium, and hydrocarbons in the presence of hydrogen. But this method cannot be considered economical in that it uses plasma for heating and requires both a large amount of hydrogen gas and a temperature of at least 1,300~C.
Furthermore, in Japanese Patent Publication No.36122J1981 there is disclosed a method of producing metal carbides directly by a vapor phase reaction from halides of metals selected from Group III through V metals of the Periodic Table, a carbon source and an anhydrous hydrogen halide. But this method cannot be considered economical, either, in that it requires both a large amount of hydrogen gas and the supply of an anhydrous hydrogen halide.
In the method of producing metal carbides directly by a vapor phase reaction according to the above-described prior arts, problems are also encountered in that the presence of oxygen and steam impedes the production of metal carbides, thus requiring control of the atmosphere and in that not a small quantity of metal halide vaporizes in gaseous state to the exterior of the reaction system.

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It is the ob~ect o:E the present invention to overcome the above-mentioned problems of the prior art methods.
More particularly, the object of the present invention is to provide a process for once obtained a carbon-containing mixture as a precursor of metal carbide which mixture is extremely high in uniformity and consists of extremely fine particles, and thereafter obtaining a metal carbide of high quality by heat-treating the carbon-containing mixture.

According to the present invention, firsta mixture of dispersed phases is collected from an aerosol of carbon element and an aerosol of metal oxide or metal element, to obtai~ a carbon-containing mixture. In this case, the aerosol of carbon element and that of metal oxide or metal element may be prepared separately. But preferably, a mixed aerosol containing both carbon element and metal oxide or metal element is formed by charging a decomposable carbon compound and a decomposable metallic compound, preferably simultaneously, into.a hot gas. As the hot gas it is desirable to use a steam-containing hot gas, and in this case the decomposable metallic compound is converted to a metal oxide.
Then, the carbon-containing mixture obtained by collecting the dispersed phases from the aerosols or the mixed dispersed phase from the mixed aerosol is heat-treated to produce a metal carbide.

In this case, if the formula weight ratio ~z~
of carbon (C) to metal (M), i.e~ C/M, in the carbon~
containing mixture is larger than 3, there will be obtained a finer powder of metal carbide. Preferably, ~or obtaining a finely divided metal carbide powder, a carbon-containing mixture having a formula weight ratio C/M of larger than 3 is heat-treated in a compressed state of not less than 0.15 g/cc in terms of bulk density. By heat-treating the carbon-containing mixture in a state of not more than 0.2 g/cc in terms of its bulk density, it is possible to produce a metal carbide whisker.
The metal carbide powder is then converted to a sintered product by a conventional method.

Fig.l is a sectional view showing an example of a mixing furnace for producing a carbon-containing mixture, in which the numeral 1 denotes a furnace body, 2 a duct, 3 a burner, 4, 5 and 6 nozzles, and 7 a duct.

As the decomposable carbon compound fed into the hot gas for producing the carbon-containing mixture in the invention, essentially there may be used any carbon-containing compound capable of being decomposed into carbon. But, hydrocarbons, halogenated hydrocarbons and halogenated carbons which normally ~2~10~

assume a gaseous or liquid phase or are capable of being easily changed to a liquid phase on heating, are preferred. Examples of hydrocarbons include petrochemical products such as methanol, ethanol, acetone, n-hexane, benzene and xylene, as well as petroleum such as naphtha, propane, light oil, kerosene and heavy oil. Even refining residues such as petroleum pitch, methyl oil, anthracene oil and creosote as well as petrochemical residues such as Cg fraction mixture and ethylene bottom are also employable.
Examples of halogenated hydrocarbons include chloroform, vinyl chloride and chlorobenzene. And carbon tetrachloride may be mentioned as an example of halogenated carbon.
Among the above-enumerated carbon compounds, particularly preferred are toluene, xylene, benzene, kerosene, light oil, heavy oil, Cg fraction mixture and ethylene bottom, from the aspects of easy handling and carbon yield.
As the decomposable metallic compound, there essentially may be used any metallic compound provided it can be converted to metal oxide or metal element on heating in the presence or absence of steam. For example, there may be used halides, alkylated compounds, alkoxides and acid esterified compounds of the following metals provided those compounds easily undergo thermal decomposition, oxidation or hydrolysis: Group I-A

metals such as lithium, sodium, potassium, rubidium and cesium: Group II-A metals such as beryllium, magnesium, calcium, strontium and barium; Group IV-A
metals such as titanium, zirconium and haEnium; Group V-A metals such as ~anadium, niobium and tantalum;
Group VI-A metals such as chromium, molybdenum and tungsten; Group VII-A metals such as manganese, technetium and rhenium; iron family metals such as iron, ruthenium and osmium; cobalt family metals such as cobalt, rhodium and iridium; nickel family metals such as nickel and palladium; Group I-B metals such as copper, silver and gold; Group II-B metals such as zinc, cadmium and mercury; Group III-B meta]s such as boron, aluminum, gallium and indium; Group IV-B
metals such as silicon, germanium, tin and lead; Group V-B metals such as phosphorus, arsenic, antimony and bismuth: Group VI-B metals such as sulfur, selenium and tellurium; a~d rare earth metals such as cerium, praseodymium, neodymium, thorium and uranium. The following are examples of such metallic compounds, which may be used each alone or in combination:
C5HllLi, C3H5Li, C5H5Li, LiH, LiCl, NaH, C2E~5Na, C H Na C6H5C2Rb, C6H5CH2Rb ~ C2H5CS ~ C6 5 2 2 BeI2, CH3BeBr, (C2H5)2Be, (CH3)2Be, MgCl~, MgBr2, 3 5 3)2Mg~ Mg(OCH3~2~ My(OC2H5)2, (C5H ) Ca 25 CaC12, CaH2, CaBr2, Sc (C5H7o2 ) 3 ' 3 3 3 Y (CH3) 3, Y (C5H5) 3, LaC13, La (C5H702 ) 3 ~ 3 3 La(C H5)3, TiC14, TiC13CH3, TiC13(C5HS), 4 3 TiBr4, TiI4, Ti (C5H5) 2 ~ ZrBr4, ZrC14, 4 2 , ~

3a~9 ZrH (C5H5)2~ ær IOC3H7)4, EIEC14, HflC3H5)4, 2 5 5 2 VF4, VF5, VC13, VC14, VC15, VC130, VC102, V(C5H5)2, V(C6H6)2, V~CO)6, NbF5, NbC14, NbC15, NbBr5, Nb(C3H5)4' NbH3(C5H5)2, TaF5, TaC14, 5 4 Tacl2(cH3)3, TaH3(cs~5)2~ Ta(C2H5)5~ CrC14' Cr2C12' Cr(CH3)4' Cr2(C3H5)4, MoF5, MoF6, 5 4
2~ 5 5~2' MoH2(C5H5)2, WF6, WC12, WC14, WC~5, WC16,
3 6' 2~C5H5)2' WC12(C5~i8)2, MnC12, Mn(C5H5)2, TcH(C5H5)2, ReH(C5EI5)2, FeC12, Fe~CH3C00)2, FeCO(C4H6)2, Ru(C5H5)2, CoC12, Co(C104)2, CoF3, Co2(CO)8, Co(C5H5)-6 8 ~ )2C5H5, Co(C3H5)3, RhC13, Rh(C5H5)(C H ) r ( 8 14)2~2' Ni~co)4, Ni(C3H5)2, Ni(C H ) Pd(C3H5)(C5H5)~ CaF2' CaCH3~ cac3H5~ ZnH2' ZntC2H3)2' 3 2 ( 2H3)2' HgF2~ Hg(CH3)2, BF3, BC13, BBr 15 B H , B(CH3)3, CH3B(OH)2~ AlH3~ (C2H5)3 ~ 3 3 ( 2 5)3~ Al(OC3H7)3, AlC13, GaC13, Ga~CH3)3, 6 5 3 2 5)2GaC2H5' InC12' TlF3, TlCl, Tl(CH ) SiH4, Si2H6, SiC14, SiF4, (CH3)2SiC12, CH3SiC13, (CH3)4Si, (C2H5)4Si, GeC12, GeC14, (CH3)4Ge, SnF2, 20 Sn2Cl(OH)3, Sn(CH3)4, PbF4, PbC14, (C4Hg)4Pb, PC13, PH3, AsF3, AsH3, AsF5, AsC13, SbF5, SbC15, BiF5, BiC13, BiH3, H2Se, CeC14, CeC13, Ce(C5H5)3, 3 3 SmC13, EuC13, ThC14, VF6, VC16.
Among the above enumerated compounds are included those which are solid at room temperature.
But even those compounds are employable provided they are beforehand heated up to temperatures required for their melting or dissolved in solvent~ As the g ~ ~J~ 3 ~

solvent, there may be used water, inorganie aeids and aqueous alkali solutions, but volatile solvents sueh as methanol, ethanol, toluene, xylene, n-hexane and earbon tetraehloride are easier to use.
5 As deseribed above, a wide variety of metals are employable as the metal component of the metallic eompound, but silicon, titanium, tungsten, boron, aluminum, zirconium, hafnium, niobium, molybdenum, tantalum, ehromium and vanadium are preferred in that they can finally afford ceramie materials superior in heat- and eorrosion resistaneel with silieon being espeeially preferred. Examples of decomposable eompounds of these metals inelude SiC14, SiF4, SiH4, HSiC13, CH3sicl3, (CH3)2SiC12, Si(OC2H5)4~ TiF4~ WC12~ WC15~ WC1 BF3, BC13, B2H6, AlC13, Al(OCH3)3, Al(OC2H5)3, Al(OC3H7)3, ZrC14, ZrC12O, ZrBr4, Zr(OC3H7)4, HfC14, NbC14~ Mocl5~ TaC14~ Ta(OC2H5)5' CrC14~ CrO2C12~ and VC14-Preferred silieon compounds are those of the following general formula: SinX2n+2 wherein n is an integer oE 1 to 4 and X is hydrogen, halogen, alkyl or alkoxy.
In supplying the above-exemplified decomposable earbon compound and metallic eompound, preferably simultaneously, into the hot gas, -there is used a furnace. As the furnace, there preferably is used a refractory-surrounded apparatus equipped with a heati.ng unit such as a burner or an electric heater, a metallic compound and carbon compound supply nozzle, a gas supply .3~

duct and a mi~ed aerosol discharge duc-t.
Within the furnace used in the invention there must be a spatial region held at a temperature of a~ le~st 700C, at which temperature there are obtained metall element and carbon element from the metallic compound and the carbon compound, respectively, and there is formed a mixed aerosol state as a gas~solid mixture. E~en if a metal element, a metal hydroxide and a metal halide are present in addition to metal oxide, they are not an obstacle to the final object of the invention, namely, the production of a metal carbide, etc. The maxium temperature in the furnace is no-t specially limited.
Usually, an intra-furnace temperature not higher than 1,500C suffices.
The steam-containing hot gas can be obtained by introducing steam into a hot gas which has been obtained by the electric heating method, high-frequency heating method or electric discharge method. But a simpler method is to burn with air a combustible material zo which produces steam on burning, such as hydrogen, methane, ethane, propane or the starting hydrocarbon. The lat-ter method is advantag~eous from the aspect of equipment structure and more economic from the aspect of thermal efficiency.
The metallic compound used in working the invention has not only the property of changing into a solid matter of metal element upon its thermal decomposi-tion reaction in the hot gas but also the property of - ~2~41 3~

changing into a solid matter of metal oxide or metal hydroxide upon its hydrolysis reaction with stea~.
Therefore, in an atmosphere wherein are present both heat and steamr it is possible to present the metallic .compound from vaporizing in a gasèous state to the exterior of the reaction system.
The mixed aerosol in the hot gas is conducted . to the exterior o~ the furnace and then the solid matter contained therein, namely, the dispersed phase, is collected by a collecting device such as bag filter, a cyclone, an electric precipitator, or the likei For diminishing the heat load of the collecting device, it is preferable that the mixed aerosol be cooled in advance.
The cooling may be effected by zone cooling after reaction or by pouring of water. In this way, the carbon-containing mixture is collected.
In the present invention, it is desirable to con~rol the weight ratio of the starting carbon compound to metallic compound so that the formula weight ratio C/M
in the collectea carbon-containing mixture is larger than 3. By so doingl the average particle diameter of the metal carbide obtained by heat-treating the carbon-containing mixture can be made smaller. But a too large value of this ratio would lead to loss of the carbon compound. Usually, 3 to 10, especial.ly 3.5 to 8, are preferred.
By heat-treating the thus obtaine~ carbon-containing mixture, there is obtained a metal carbide.

The heat treatment is usually effected by heating heavily the carbon-containing mixture in vacuo or in an inert gas atm~spherè by using a furnace such as, for examplej an Acheson type direct electric resistance furnace or a high-frequency heating furnace. A preferred range of the heating -temperature is from about 1,300 to 2,400C. There can remain a solid carbon after the ignition, which, however, can be burnt off by heating in air at 400 to l,000C.
In the heat treatment for obtaining a metal carbide, if the carbon-containing mixture is heat-treated in a compressed state of not less than 0.15 g/cc in terms of its bulk density, there can be obtained a fine spherical powder of metal carbide having a uniform average particle diameter. The compression may be effected by any suitable means, for example, a mere compressing or granulation under stirring.
On the other hand, by heat-treating the carbon-.
containing mixture in a state not higher than 0.2 g/cc, preferbly below 0.15 g/cc, in terms of its bulk density, there can be obtained a metal carbide in the form of whisker. Metal carbide whisker, for example, silicon carbide whisker, can be utilized as a reinforcing agent for metals, ceramics, etc. by being added directly thereto.
. The metal carbide powder is then sintered integrally in known manner to obtain a sintered metal carbide.
As the metal component of the metal carbide _ 13 o3~

obtained in the present invention, there may be used two or more metals in combination. This combined'use often afford.s better re'sults. As an example, mention may be made of a combined'use of silicon and boron. For example, a decomposable silicon compound such as silicon tetrachloride and a decomposable boron compound such as boron trichloride are fed into the steam-containing hot gas together with the decomposable carbon co~pound, followed by collection of the carbon-containing mixture, heat treatment and sintering in the manner as previously described, whereby there can be obtained a sintered product of high density and high quality. In -this case, it is desirable to'use -the two so that the weight ratio of boron to si.licon is 0.15 ^J 4.5 :
100 .
As set forth hereinabove, since the present invention adopts the method of obtaining the carbon-containing mixture as a metal carbide precursor from aerosol, the carbon-containing mixture is uniform and finely divided and capable of being easily converted to a metal carbide having superior characteristics. Besides, the operations are easy, and there is no likelihood of entry of impurity. Thus, various outstanding effects are attainable.
The following examples are given to Eurther il'lustrate the invention.

Example l Using the reaction 'furnace (300 mm dia. by ~ 14 ~

3~9 3 m long) shown in Fig.l, air was introduced through duct (2) continuously at a rate of lOa Nm3/h, while propane gas was fed from burner (3) at a rate of 3 Nm3/h and allowed to burn, to form a high-temperature gas stream at 1,600-1,800C. Then, SiC14 as .a silicon compound and heavy oil A as a hydrocarbon were fed respectively through nozzles (4) and l5) at rates of 20 kg/h and 25 kg/h and 25 kg/h, while water was fed through nozzle (6) at a rate of 55 ~/h, and the dispersed phase in the resultant 10: aerosol was collected by means of a bag filter. In the collected mixture, a siliceous substance was identified as silicon dioxide by a chemical analysis, and the formula weight ratio (C/Si) of carbon to silicon proved to be 7.5 by the oxidative gravimetric method.
The collected mixture was heated at 1,800C for 2 hours in a nitrogen gas atmosphere by using a high-frequency heating furnace, then once cooled and thereafter heated to 800C in air to burn oEf the remaining carbon, yielding about 1.5 kg. of a finely divided silicon carbide powder. This silicon carbide powder was measured for specific surface area ~the measurement of specific surface area was performed according to the BET method utilizing nitrogen gas adsorption), which proved to be 9.8 m2/g.
And its crystal form was found to be an ~-form by the powder X-ray diffraction method.

Example 2 n just the same way as in Example 1 except - lS

that SiC14 and heavy oil A were fed at rates of 10 kg/h and 15 lcg/h, respec-tively, there was obtained a collec-ted mixture having a formula weight ratio (CtSi) of 8.1, from which was obtained about 2 kg. oE silicon carbide powder, which proved to have a spècific surface area of 15.1 m2/g and the same ~ crystal form as that in Example.

Example 3 In just the same way as in Example 1 except that ethylene bottom was used as a hydrocarbon (fed at a rate of 15 kg/h), there was obtained a collected mixture having a formula weight ratio (C/Si) of 8.6, from which was obtained about 1.2 kg. of silicon carbide powder, which proved to have a specific surface area of 18.6 m2/g and an ~ crystal form.

Example 4 In just the same way as in Example 3 except that CH3SiC13 was used a silicon compound ~fed at a rate of 7 kg/h), there was obtained a collected mixture having a formula weight ratio (C/Si) of 14.1, from which was obtained about 1 kg. of silicon carbide powder, which proved to have a specific surface area of 14.1 m2/g and an ~ crystal form.

Comparative Example 1 Sio2 powder (specific surface area: 198.5 m2/g~

L3~

and carbon powder (specific surface area: 120.~ m2/g) were mixed at a formula weight ratio IC/Si~ of lO for S
hours by means of a ball mi~l, then the resultant mixture was heated at 1,800C for 2 hours in a nitrogen gas atmosphere by using a high-frequency heating furnace, then cooled and thereafter heated to 800C to burn off the remaining carbon, yielding about l kg. of silicon carbide powder. (This method is the prior art method.) Although the SiO2 and the carbon were each used in the form of a finely divided powder, the specific surface area of the silicon carbide powder obtained was as small as 1.1 m2/g. This silicon carbide powder proved to have an ~ crystal form~
Results of the experiments described hereinabove are as surnmarized in Table 1 below.

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Table 1 Example Comparative . 1 2 3 4 Example Air ~Nm ~h~ 100 100100. 100 .

Hot gas Propane 3 3 3 3 source gas (Nm3/h) .

Silicon SlCl~ 20 10 10 _ _ _ compound (kg/h) 3(kg/h)3 _ _ _ 7 . . ~ . .__ ._ _ . .__ Hydrocarbon Heavy oil 25 15 _ A tkg/h) E-thylene (kg/h) _ _ 15 15 Formula welght ratio 7.5 8.1 8.6 14.1 10 Specific surface area . .
of silicon carbide 9.8 15.1 18.6 35.6 1.1 powder (m2/g) - - - ---Example 5 Using the reaction mixing furnace (300 mm dia.
by 3 m long) shown in Fig.l, air was fed through duct (2) at a rate of 75 Nm3/h, propane as a hot air fuel was fed from burner (3) at a rate of 2 Nm3/h, and a 1 ~ 2.32 (weight ratio) mixture of TiC14 as a metallic compound and xylene as a carbon compound was fed through nozzle .
t5) into the Eurnace at a rate o~ 8.01 kg/h. The interior of the furnace was held at about l,500C in the position A of Fig.l.
The aerosol formed in the furnace interior was withdrawn from duct (7) and cooled, then the dispersed phase was collected by means of a bag filter to obtain a carbon-containing mixture at a rate of 2.52 kg/h (on dry weight basis). The mixture proved to contain 59.9 wt.~
carbon and 23.9 wt.~ titanium (as elemen~)(the rest being 16.0 wt.~ bonding oxygen, 0.1 wt.~ carbon-adhered hydrogen and not more than 0.1 wt.% others) and have a specific surface area of 73.2 m /g. The measurement of specific surface area was performed according to the BET method utilizing nitrogen gas adsorption. The ratio of titanium in the collected mixture to that in the fed TiC14 was 99.1%. (Such a ratio will hereinaf-ter be referred to as "percent collected metal"). As a result of ESCA (electron spectro-scopy for chemical analysis), only Ti-0 bond was observed as a bonding form of titanium with other element.

Examples 6 - 18 By using methane and hydrogen in addition to propane as the hot air fuel in Example 5 and using the metallic compounds and carbon compounds shown in Table 2, there were obtained such carbon-containing mixtures as shown in the same table. As a result of ESCA, there was observed metal-oxygen bond in all of the Examples as a - ~Z~3~

bonding form of metal with other element. As other bonding form of metal with other element, there merely was observed metal-chlorine bond in Examples 7, 11 and 14.
In Exampies 6 and 17 in Table 2, the metallic and carbon compounds using the same charging nozzle were mixed in advance and then fed. That is, in Example 6, (CH3~2SiC12 was fed through nozzle (4~, while a mixture of TiC14 and xylene was fed through nozzle (5).

_ 2~

Table 2 _ Example No. I _ 8 __ Air, Nm3/h . 75 75 75 50 l __ . Fuel for Name propane propane propane propane Hot Air Nm3/h - 1 2 2 _ Temperature at 860 1500 1500 1180 Point A, C
. ~
Metallic Name si C12 TiC14 WC12 3C13 AlC13 Compound kg/h 1.27: 1.86 2.40 2.88 1.23 Nozzle 4 5 4 4 4 Carbon Name xylene ethanol oil An-hexan 10 Compound kg/h 8 . 73 5. 84 6.50 4.04 Nozzle . 5 4 5 4 , ..
Amount of Collected 4.08 3.63 3.53 1.52 Mixture, kg/h .
. . .
Specific Surface Area of Mixture, 40. 29 102 51 m2/g Carbon ~ontent, 66;5 41.1 75.7 69.0 wt~
_ 15 Metal Si Ti W B Al . _ . Metal Content, 6.3 11.2 46.6 7.5 16.3 wt% _ __ Percent Collect- 94.2 97.5 97.7 99.6 99.8 ed Metal, ~ _ _ 21 ~2~30~

Table 2 (continued) _ .
Example No. 10 11 12 13 Air, Nm3~h 50 50 50 10~

Fuel for Name. propane methane methane methanc 5 Hot Air Nm3/h 1 2 2 5 _ _ . Point A, ue at 1180. . 960960 1150 Metallic Name. Zr(oc3H7)4 HfC14 NbC14 Ta(OC~H5)5 Compound kg/h 3.24 3.34 L2.42 3.46 .
Nozzle 4 4 4 4 Carbon Name . benzene benzene benzene n-hexane Compound kg/h 3.49 4.33 4.71 4.33 Nozzle 4 4 4 4 Amount of Collected 2.21 3.21 2.62 2.68 Mixture, kg/h __ _ Specific Surface . Area of Mixture, 74 62 48 140 15 Carbon Content, 47;5 34.4 47.9 . . 31.3 Metal Zr Hf Nb Ta Metal Content,38.8 .55.6 36.3 56.2 Percent Collected 95.1 95.9 99.3 97.7 .

~2~19~3g~

Table 2 (continued) . . . ~ ~
Example No. 14 15 16 17 . __ ~ _ _ Air, Nm3/h . 100. 75 75 75 _. _ _ ~ _ .__ Fuel Name nethane hydrogen hydrogen hydrogen for . _ . _ _ Hot Air Nm3/h 5 15 15 12 Temperature at Point A, 11501310 1310 1080 C
__ . ._ _ . _ ._ . _ _ __ . _ _ _ lic Name 'rC14 VC14 MoC15 (CH3)4Si Com- kg/h 6.36 2.15 6.35 0.830.81 pound _ .
Nozzle 4 4 4 4 5 .___ __ . ._ _ Carbon Name ylene Cg n-hexane ethanol __ _ ..
Com- kg/h 9.17 7.34 6.63 7.64 __ _ .. _.
pound Nozzle 4 5 4 5 _ ~
Amount of Collected6.19 3.68 4.83 2.28 Mixture,kg/h __ . ._ Specific Sur- .
face Area of Mixture, 5t 133 61 45 m jg - _ Carbon 15 Content,50.3 72.3 36.6 59.2 wt%
.. _ _ __ Metal ¦ r V Mo Si Mg _ _ _ . _ __ Metal Content, wt% 26.2 15.4 45.7 11.5 9.7 . _ .___ Percent CoIlected 95.199.9 99.1 99.6 97.1 Metal, ~ _. _ _ _ _ _ _ Tab.te 2 ~continued) ~ . . _ . _ Example No. 18 _ Air, Nm3/h 75 Fuel forLName ~ ;~o~

Hot Air Nm3/h 12 . _ ._ __ Temperature at 10 Point Al C . - . 80 . ..
Metallic Name SiC14 Compound kg/h 4.34 . . . . Nozzle . 4 . _ .. _ 10. Carbon Name . Cg Compound kg/h 9.57 .... ..._ ___ . __ . . . . Nozzle 4 . ... _ _ _ Amount of Collected Mixture, kg~h 4.48 ...._. .__ Specific Surface Area of Mixture, m2/g 81 _ . .............. ._ 15Carbon Content, wt~ 66.3 . . ._ __ __ Metal Si . _~ . .
Metal Contentl wt% 15.7 _ ._ . .. _._ _ Percent Collected Metal, ~ 97.9 _ 24 ~2~4;~0~

Example 19 The mixture of the present invention obtained ~n Example S was heated at ab'out 2,000C for 1 hour in an argon gas atmosphere by using a high-frequeney 'heating 'furnace, then onee cooled and thereafter heated to 700C in air -to burn off the remaining carbon, yielding 5.5 g. of a finely divided titanium carbide powder. This titan'ium earbide powder was measured for specific surface area, which proved to be 10.2 m2/g.
And its crystal form was found to be a cubic system by the powder X-ray diffraction method.

Comparative Example 2 A eommereially available industrial TiO2 powder (speeifie surfaee area: 50.5 m2/g) and earbon blaek '~speeifie 'surfaee area: 65.5 m2/g) were mixed in water for 2 hours by using a wet vibration mill at a weight ratio of 1 : 1.52 so as to give the same metal and earbon molar ratio as in Example~l, followed by drying with a spray drier to obtain a mixture of TiO2 and carbon black. The mixture was heated by using a high-frequeney heating 'furnaee in just the same way as in Example 13 and thereafter the carbon was burnt off to give 5.2 g. of titan'ium carbide powder of a eubic system in erystal ~orm. This titanium carbide powder was measured for speeifie surface area, whieh proved to be 0.7 m2/g.

_ 25 3~99 Example 20 - 29 The mixture ob-tained-in Example 5 and used in Example 19 was substituted by the mlxtures obtained ln Examples 7, 8, 10-16 and 18, which mixtures were hea-ted by using a high-frequency heating furnace under the conditions shown in Table 3 with respect to atmosphere, temperature and time, to obtain metal carbides. Then, the remaining carbon was burnt off in air at 700C, leaving powdered metal carbides having such crystal forms and specific surface areas as shown in Table 3.
That -the atmosphere in Example 25 and 26 is t'in vacuo" means that heating was performed at a reduced pressure of 10 1 to 10 2 mmHg.

~214~0~

Table 3 Example Mlx- Atm~- Tempe- Time, Ca rb i de Crystal Su r f ace No. ture sphere rature hr produc- Form Area, . C ed m2/g . _ .
. 3argon 1600 2 WC cubic 5.0 , . 21 4argon 1900 1 B4C rhomboded- 19.1 __ . ._ 22 . - 6 argon 2000 2 ZrC cubic 13.4 .23 7 . argon 2000 - 2 HfC cubic 10.1 . _ .. ~

24 8 argon 2000 2 NbC cubic 8.8 9 in 1800. 6 TaC cubic 14.1 . vacuo . __ 26 10 in 1600 6 Cr3C2 needle 17.6 . vacuo. . .
_ _ _ . ._ 10 27 11 argon 1200 9 . VC cubic 24.1 . .
. 28 12 argon. 1600 3 Mo2C hexagonal 12.3 __ _ 29 - 14 argon 1600 1 SiC cubic 18.7 Example 30 ~sing the reaction mixing furnace (300 mm dia.
by 3 m long) shown in Fig.l, air and hydrogen as a hot air fuel were fed through duct (2) and burner (3) at ra-tes of 75 Nm3/h and 12 Nm3/h, respectively, and a 1 : 2.2 _ 27 twei~ht ratio) mixture of SiC14 as a silicon compound and C~ as a carbon compound was fed through nozzle (4) at a rate of 14 kg/h. The temperature in the furnace was held at i,050-1,150C at the position A in Fig.l. The aerosol formed within the furnace was withdrawn from duct ~7), then cooled and thereafter passed through a bag filter to collect 4.5 kg/h (on dry weight basis) of a mixture containing 66.3 wt.~ carbon and 15.7 wt.
silicon (as elemen-t; formula weight ratio C/Si = 9.9 (the res-t being 17.9 wt.~ bonding oxygen, 0.1 wt.~
carbon-adhered hydrogen and not more than 0.1 wt.% others).
As a result of ESCA, only Si-O bond was observed as a bonding from of silicon with other element.
The bulk density of the mixture taken out of the bag filter was 0.095. 40 g. of the mixture was put in a cylindrical vessel and compressed uniaxially to obtain a compressed powder with a bulk density of 0.61. The compressed powder was charged into a graphite crucible and heated at 1,60~C for 3 hours in an argon atmosphere, then once cooled and thereafter heated in air at 750C to burn off the remaining carbon, yielding 8.8 g. of silicon carbide powder. As a result of X-ray diffraction spectral analysis, this powder proved -to have a B crystal form, and in an image analysis with an electron microscope it was observed that the average particle diameter of this powder was 0~19~
and that its particle shape was uniform and spherical.

3~9 Examples 31 - 34 The hydrogen used as a hot air fuel in Example 30 was substituted by methane and propane, and as silicon and ca~bon compounds were mixed those shown in Table 4 at the weight ratios set forth therein to thereby obtain mixtures having the formula weight ratios shown in Table 4. These mixtures in the respective amounts shown in the same Table were compressed in the same manner as in Example 30 into compressed powders having such bulk densities as set out in the same Table. The compressed mixtures were each placed in a graphite crucible and were heated at such temperatures for such time periods as shown in Table 4 in an argon atmosphere by using a high-frequency heating furnace, then once cooled and thereaftex heated in air at 750C to burn off the remaining carbon, leaving powdered silicon carbides in such amoun-ts as shown in Table 4. As a result oE powder X-ray diffraction spectral analysis, the powders obtained in Examples 3r and 32 were of a B
crystal form, and the powders obtained in Examples 33 and 34 were of an about 10% ~ and about 90% ~ crystal form and an about 3% ~ and about 97% B crystal form, respectively.

_ 29 31~

Table 4 Example No 31 32 33 34 Air, Nm3/h 75 75 100 100 Fue1 for Name propane propane methane methane 3 _ 5 Hot Air Nm /h 12 5 5 _ Temperature at 860 1500 1150 1150 Point A, C
;.~ _ . Silicon Compound SiC14 CH3SiC13 HSiC13 Si~OC2H5)4 . , Carbon Compound heavy Cg heavy n-hexane _ oil A oil A
Mixing Weight Ratio 1.89 1.58 2.22 1.54 _ _ Feed Amount, kg/h 15.5 12.3 2.22 1.54 Amount of Collected 4.12 5.23 7.33 3.72 Mixture, kg/h _ Formula Weight 5 9 8 8 9.6 7.2 Ratio, C/Si ~ ~-_ .

Heated Mixture, g 20 15 30 45 _ __ Bulk Density of 0 33 0 26 0.46 0.71 Compressed Powder 15 Heating Temperature, 1600 1700 1900 1800 _ Heating Time, h 4 1 Amount of Silicon 6.1 3.6 6.8 18.2 Carbide produced, g. _ _ _ Average Particle 0.55 0.42 0.77 0.35 Diameter, jU

_ 30 Example 35 Using the Eurnace (300 mm dia. by 3 m long) shown in Fig.l, air and hydrogen as a hot air fuel were fed through duct (2) and burner (3) at rates of 80 Nm3/h and 12 Nm3/h, respectively, while a 1 : 1.9 : 0.0077 (weight ratio) mixture of SiC14 as a silicon compound, Cg fraction mixture as a carbon compound and BC13 as a boron compound was fed through nozzle ~4) into the furnace at a rate of 14 kg/h. The temperature in the furnace was held at 1,000-1,100C at the position A in Fig.l. The aerosol formed within the furnace was withdrawn ~rom duct (7), then cooled and thereafter passed through a bag filter to collect 5.0 kg/h (on dry weight basis) of a carbon-containing mixture. In this mix~ure were contained as elements 15.8 wt.% silicon, 65.6 wt.~ carbon and 0.07 wt.~ boron (the rest being 18.4 wt.% bonding oxygen, 0.1 wt.~ carbon~adhered hydrogen and not more than O.l~wt.~ others). The formula weight ratio C/(Si~B) was 9.6. As a result of ESCA, there were observed only si-o and B-O bonds as bonding forms of sllicon and boron with other element.
The bulk density of the carbon-containing mixture of the invention taken out of the bag filter was D.096 g/cc. 500 g. of this mixture was placed in a cylindrical vessel and compressed uniaxially into a compressed powder with a bulk density of 0.35 g/cc.
The compressed powder was put in a graphite crucible and hea-ted heavily at 1,700C for 2 hours in an argon _ 31 ~2~

atmosphere, then once cooled and thereafter heated in air at 750C to burn ofE the remaining carbon, yielding - 115 g. of a composlte carbide.
As a result of ESCA, this composite carbide proved to contain Si-C and B-C bonds. Further, as a result of powder X-ray diffraction spectral analysis there were confirmed the existence of silicon carbide of a cubic system in crystal form and that of boron carbide of needle crystal, and in an image analysis with an elec-tron microscope it was observed that the average particle diame-ter of the composite carbide was 0.27u and tha-t its particle shape was uniform and spherical.
Upon chemical analysis this composite carbide proved to contain 1.6 wt.% oxygen. It was then immersed for 5 hours in an aqueous HF solution (concentrationO
10 wt.%) in an amount five times by weight as large as the composite carbide, followed by filtration and drying. Then, 110 g. of the product thus obtained was put in a liter vessel, into which was then added 300 cc. of an acetone solution having dissolved therein 2.7 g. of a resorcinol-~ormaldehyde condensate, ollowed by mixing for 10 hours at room temperature. The vessel was then immersed in a constant-temperature water bath held at 70C, and after evaporating off acetone under kneading, it was heated at 600C for 1 hour in a nitrogen gas atmosphere to obtain a mixture of the composite carbide and an additional carbon, of the following composition (as elements): 69.1 wt.% silicon, 30.5 wt.% carbon, 0.30 wt.% boron, 0.06 wt.~ oxygen, and _ 32 z~

not more than 0.1 wt.~ o-thers. The content of element carbon was 0.89 wt.~.
100 g. of the mixture was then placed in a cylindrical vessel and compressed uniaxially at a load of 0.5 T/cm2, then rubber-pressed at a hydrostatic pressure of 2 T/cm2 and sintered integrally at 2,100C
for 15 minutes in a nitrogen atmosphere of 10 1 to 1 mmHg to obtain a sintered composite carbide. The density of this sintered product was measured and Eound to be 3.11 g/cc, which corresponds to 97% of the -theore-ti-cal density 3.21 g/cc of silicon carbiae.
The sintered product was cut into 30 test pieces by means of a diamond cutter, which test pieces were measured for bending strength in ac~ordance with JIS R-1601 ('81). More particularly, the test pieces were subjected to a three-point bending test, 15 pieces at room temperature and the remaining 15 pieces at 1,400~C in a nitrogen atmosphere. As a result, the average bending strength at room temperature was 46 2Q kg/mm2 and standard deviation 2.6 kg/mm2, while the average bending strength at 1,400~C was 45 kg/mm2 and standard deviation 2.5 kg/mm2.

Example 36 Using the furnace (300 mm dia. by 3 m long) shown in Fig.l, air and hydrogen as a hot air fuel were fe~ through duct ~2) and burner (3) at rates of 80 - Nm3/h and 12 Nm3/h, respectively, while a 1 : 1 _ 33 3~9~

(weight ratio) mixture of SiC14 as a silicon compound and C9 fraction mixture as a carbon compound was fed through nozzle (4) into the furnace at a rate of 14 kg/h. The temperature ~n the furnace was held at 1,000-1,100C at the position A in Fig.l. The aerosol formed within the furnace was withdrawn from duct - ~7) and passed through a bag filter to collect 4.8 kg/h (on dry weight basis) of a finely divided carbon-containing mixture, in which were contained 48.5 wt.%
carbon and 24.0 wt~ silicon (as element)(the rest : being 27.4 wt.% bonding oxygen, 0.1 wt.% carbon-adhered hydrogen and not more than 0.1 wt.% others). As a result of ESCA, only Si-O bond was observed as a bonding form of silicon and other element. The mixture was measured for nitrogen adsorbed specific surface area in accordance with ASTM D3037-78, which specific surface area was found to be ~8.5 m2/g. The bulk density of the mixture taken out of a bag filter was 0.088 g/cc.
30 g. of the mi~ture was placed in a graphite crucible and heated at 1,600C for 2 hours in an argon atmosphere, then once cooled and thereafter heated to 700C in air to burn off the remaining carbon to obtain 9.7 g. of silicon carbide. As a result of powder X-ray diffraction spectral analysis, the silicon carbide proved to have a ~ crystal form, and in an image analysis with an electron microscope there was observed only a needle-like whisker, with L/D ratio being 62. The percent _ 34 3~

conversion of the sillcon in the finely divided carbon-containing mixture into silicon carbide was calculated to be 95% as element.

Examples 37 - 40 As the fuel for hot air in Example 36 there were used methane and propane in place of hydrogen, and as decomposable silicon compounds and carbon - compounds, those shown in Table 5 were mixed at the weight ratios shown in the same Tahle and the resultant mixtures were fed from nozzle (4) into the furnace, .;. .
then collected on bag filtrate to obtain finely divided carbon-containing mixtures having such compositions and buIk densities as set out in Table 5. Then, 30 g. of each of the mixtures thus obtained was heated at such temperature for such period of time as shown Table 6 in an argon atmosphere by using a high-frequency heating furnace in the same way as in Example 36, then once cooled and thereafter heated to 700C in air to burn off the remaining carbon. In this way 20. there were obtained silicon carbides in such amounts as shown in Table 6.
As a result of powder X-ray diffraction spectral analysis, the silicon carbides were all found to be B type in crystal form, and as a result of image observation with an electron microscope there were observed both a needle-like whisker and a particulate shape in Example 37, and only a needle-like whisker in all of Examples 38-40. The respective L/D ratios were as shown in Table 6. Further, the percent _ 35 .3~ -conversion of the silicon as element in each of the heated, finely dlvided carbon-containing mixtures into sillcon carb~de was as set out in Table 6.
Table 5 , 5Example 37 38 39 40 _ _ .. ._ .. _ Air (Nm3/h) 80 80 80 80 _ __ _ Fuel for Name methane methane propane propane Hot Air (Nm3/h) 4 4 2 2 _ _ .~, Temperature at Point 1150 1150 1450 1450 . ._ .. _ _ .. ._ 10 Silicon Compound.(a) SiC14 CH3SiC13 HSiC13 Si(OC2H5)~
__ . _ ..
Carbon Compound (b) heavy heavy toluene n-hexane . . . . oil A oil A
_ __ ._ (a/b) Mixing Welght 1 : 1 . 1 : 1.5 1 : 2 1 : 0.8 _ __ Feed Amount (kg/h) 20 17 15 12 . . ._ _ .
Finely ¦ ollected 7 Diviced mount(kg/h) .2 6.1 5.8 4.2 Carbon- _ _ 15 Contain- Com- Si 22.7 18.4 17.7 21.3 .
ing . .
Mixture posi- C 51.2 60.6 62.0 54.3 tio~ O 25.9 20.9 20.2 24.3 (wt%) Bulk _ . Density 0.081 0.079 0.091 0.11 (g/cc) . .. _ . . I _ . . _ Nitrogen Adsorbed Specific 2.2630.5 39.6 78.5 Surface _ . Area (m /g) _ _ _ Table 6 .
. _ _ . _ Example 37 ~8 39 40 Carbon-Containing Mixture (g) 30 30 30 30 _ _, Heat~ng Temperature (~C)1,650 1,500 1,600 1,60 5 Heating Time (h) 1 5 2 3 _ _ _ Amount of silicon carbide9.2 7.2 7.3 8.5 produced (g) . ~ _ ._ .. ..

-; Yield (% as silicon) 95 91 96 93 _ As set forth hereinabove, -the carbon-containing miXtures obtained according to the process of the present invention have superior characteristics as metal carbide precursors because they are highly uniform and consist mainly of fine particles. And from metal carbide powders obtained by heat treatment of those mixtures there can be produced ceramic materials of high quality. The process of the present invention can be carried out continuously and economically.

Claims (12)

The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows:
1. A process for preparing a carbon-containing mixture, characterized by collecting a mixture of dispersed phases from an aerosol of carbon element and an aerosol of a metal oxide or a metal element.
2. The process of claim 1, wherein said dispersed phase mixture is collected from a mixed aerosol containing said carbon element and said metal oxide or said metal element, said mixed aerosol having been obtained by introduc-ing a decomposable carbon compound and a decomposable metallic compound into a hot gas.
3. The process of claim 2, wherein said hot gas contains steam.
4. The process of claim 2, wherein said decomposable carbon compound and said decomposable metallic compound are introduced simultaneously into said hot gas.
5. A process for preparing a metal carbide, character-ized by collecting a mixture of dispersed phases from an aerosol of carbon element and an aerosol of a metal oxide or a metal element, and then heat-treating said mixture.
6. The process of claim 5, wherein said dispersed phase mixture is collected from a mixed aerosol, said mixed aerosol having been obtained by introducing a decompos-able carbon compound and a decomposable metallic compound into a hot gas, and then it is heat-treated.
7. The process of claim 6, wherein said hot gas contains steam.
8. The process of claim 5, wherein the formula weight ratio of the carbon C to the metal M in said dispersed phase mixture is larger than 3.
9. The process of claim 5, wherein the metal component is silicon, titanium, tungsten, boron, aluminum, zirconium, hafnium, niobium, molybdenum, tantalum, chromium, or vanadium.
10. The process of claim 5, wherein the metal component comprises silicon and boron.
11. The process of claim 5, wherein the formula weight ratio of the carbon C to the metal M in said dispersed phase mixture is larger than 3, and said dispersed phase mixture is compressed so as to give a bulk density thereof not lower than 0.15 g/cc and is heat-treated in this compress-ed state to obtain said metal carbide as a finely divided powder.
12. The process of claim 5, wherein said metal carbide is obtained as whisker by heat-treating said dispersed phase mixture under the condition of its bulk density being not higher than 0.2 g/cc.
CA000436445A 1982-09-14 1983-09-12 Process for preparing metal carbides and precursors thereof Expired CA1214309A (en)

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP158786/1982 1982-09-14
JP57158786A JPS5949828A (en) 1982-09-14 1982-09-14 Novel carbonous mixture and production of metallic carbide or metallic nitride using said mixture
JP159516/1982 1982-09-16
JP57159516A JPS58213625A (en) 1982-09-16 1982-09-16 Novel process for preparation of mixture of carbon and elemental silicon or silicon oxide
JP192526/1982 1982-11-04
JP57192526A JPS5983922A (en) 1982-11-04 1982-11-04 Preparation of silicon carbide powder
JP57211377A JPS59102871A (en) 1982-12-03 1982-12-03 Novel carbon-containing mixture, novel composite carbide andmanufacture of composite carbide sintered body
JP211377/1982 1982-12-03
JP57227040A JPS59121198A (en) 1982-12-27 1982-12-27 Preparation of silicon carbide whisker
JP227040/1982 1982-12-27

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5108729A (en) * 1989-10-02 1992-04-28 Phillips Petroleum Company Production of carbide products
US5165916A (en) * 1989-10-02 1992-11-24 Phillips Petroleum Company Method for producing carbide products
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5348718A (en) * 1990-04-04 1994-09-20 Phillips Petroleum Company Method and apparatus for producing carbride products

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5108729A (en) * 1989-10-02 1992-04-28 Phillips Petroleum Company Production of carbide products
US5165916A (en) * 1989-10-02 1992-11-24 Phillips Petroleum Company Method for producing carbide products
US5176893A (en) * 1989-10-02 1993-01-05 Phillips Petroleum Company Silicon nitride products and method for their production
US5348718A (en) * 1990-04-04 1994-09-20 Phillips Petroleum Company Method and apparatus for producing carbride products

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