ATE125392T1 - Gerät zur plasmabehandlung eines durchgehenden materials. - Google Patents

Gerät zur plasmabehandlung eines durchgehenden materials.

Info

Publication number
ATE125392T1
ATE125392T1 AT91909165T AT91909165T ATE125392T1 AT E125392 T1 ATE125392 T1 AT E125392T1 AT 91909165 T AT91909165 T AT 91909165T AT 91909165 T AT91909165 T AT 91909165T AT E125392 T1 ATE125392 T1 AT E125392T1
Authority
AT
Austria
Prior art keywords
entrance
exit
chamber
pct
plasma
Prior art date
Application number
AT91909165T
Other languages
English (en)
Inventor
Robert Winston Brown
Ian Henry Coopes
Joseph Fusca
Kenneth John Gifkins
John Andrew Irvin
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of ATE125392T1 publication Critical patent/ATE125392T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16JPISTONS; CYLINDERS; SEALINGS
    • F16J15/00Sealings
    • F16J15/16Sealings between relatively-moving surfaces
    • F16J15/168Sealings between relatively-moving surfaces which permits material to be continuously conveyed
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03CPHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00Photosensitive materials
    • G03C1/76Photosensitive materials characterised by the base or auxiliary layers
    • G03C1/91Photosensitive materials characterised by the base or auxiliary layers characterised by subbing layers or subbing means
    • G03C1/915Photosensitive materials characterised by the base or auxiliary layers characterised by subbing layers or subbing means using mechanical or physical means therefor, e.g. corona

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • ing And Chemical Polishing (AREA)
AT91909165T 1990-05-10 1991-05-09 Gerät zur plasmabehandlung eines durchgehenden materials. ATE125392T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPK006690 1990-05-10
AUPK283190 1990-10-19

Publications (1)

Publication Number Publication Date
ATE125392T1 true ATE125392T1 (de) 1995-08-15

Family

ID=25643865

Family Applications (1)

Application Number Title Priority Date Filing Date
AT91909165T ATE125392T1 (de) 1990-05-10 1991-05-09 Gerät zur plasmabehandlung eines durchgehenden materials.

Country Status (5)

Country Link
US (1) US5314539A (de)
EP (1) EP0527859B1 (de)
JP (1) JPH05507383A (de)
AT (1) ATE125392T1 (de)
WO (1) WO1991017561A1 (de)

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US6116185A (en) * 1996-05-01 2000-09-12 Rietzel; James G. Gas injector for plasma enhanced chemical vapor deposition
EP0884641A1 (de) * 1997-06-12 1998-12-16 Agfa-Gevaert N.V. Apparat zur Nassbehandlung von photographischem Blattmaterial
US6106659A (en) * 1997-07-14 2000-08-22 The University Of Tennessee Research Corporation Treater systems and methods for generating moderate-to-high-pressure plasma discharges for treating materials and related treated materials
AU742051B2 (en) * 1997-07-14 2001-12-13 University Of Tennessee Research Corporation, The Plasma treater systems and treatment methods
US6083355A (en) * 1997-07-14 2000-07-04 The University Of Tennessee Research Corporation Electrodes for plasma treater systems
US6054018A (en) * 1998-08-28 2000-04-25 Wisconsin Alumni Research Foundation Outside chamber sealing roller system for surface treatment gas reactors
EP0989455A1 (de) * 1998-09-22 2000-03-29 Agfa-Gevaert N.V. Gerät zur kontinuierlichen Vakuumbehandlung von Blattmaterial
US6250222B1 (en) 1998-09-22 2001-06-26 Agfa-Gevaert Apparatus for the continuous treatment of sheet material under reduced pressure
DK1004369T4 (da) 1998-11-26 2009-03-09 Cockerill Rech & Dev Forseglingssluse til et vakuumkammer
US6082292A (en) * 1999-01-05 2000-07-04 Wisconsin Alumni Research Foundation Sealing roller system for surface treatment gas reactors
US6528947B1 (en) 1999-12-06 2003-03-04 E. I. Du Pont De Nemours And Company Hollow cathode array for plasma generation
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US20040055698A1 (en) * 2002-09-24 2004-03-25 Tran Hai Q. Method of improving lamination quality by treating media with plasma
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AU2003234058A1 (en) * 2003-05-13 2004-12-03 Stazione Sperimentale Carta Cartoni E Paste Per Carte Method for plasma treating paper and cardboards
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US8709351B2 (en) * 2007-11-08 2014-04-29 Enercon Industris Corporation Atmospheric treater with roller confined discharge chamber
JP5315228B2 (ja) * 2009-12-25 2013-10-16 株式会社半導体エネルギー研究所 成膜装置及び太陽電池の作製方法
TWI477646B (zh) * 2010-08-09 2015-03-21 Hon Hai Prec Ind Co Ltd 化學氣相沉積設備
CN102390069B (zh) * 2011-10-28 2014-06-04 南京林业大学 木质薄板常压低温等离子体连续处理装置
JP6451129B2 (ja) * 2013-09-17 2019-01-16 株式会社リコー プラズマ処理装置、印刷装置、印刷システムおよび印刷物の製造方法
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Also Published As

Publication number Publication date
EP0527859A1 (de) 1993-02-24
WO1991017561A1 (en) 1991-11-14
JPH05507383A (ja) 1993-10-21
EP0527859B1 (de) 1995-07-19
US5314539A (en) 1994-05-24

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