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Priority claimed from DE3915039Aexternal-prioritypatent/DE3915039A1/de
Priority claimed from FR8906057Aexternal-prioritypatent/FR2646861B1/fr
Application filed by Philips NvfiledCriticalPhilips Nv
Priority claimed from EP90908310Aexternal-prioritypatent/EP0423327B1/de
Application grantedgrantedCritical
Publication of ATE103645T1publicationCriticalpatent/ATE103645T1/de
AT90908310T1989-05-081990-05-07Vorrichtung und verfahren zur behandlung eines flachen, scheibenfoermigen substrates unter niedrigem druck.
ATE103645T1
(de)
Verfahren zum anpassen eines verdichterventils an unterschiedliche betriebsverhaeltnisse des verdichters und verdichterventil zur durchfuehrung des verfahrens.