DE69520687D1 - Verfahren und system zur aufbereitung von unter druck stehenden flüssigen lösungsmitteln zur reinigung von substraten - Google Patents
Verfahren und system zur aufbereitung von unter druck stehenden flüssigen lösungsmitteln zur reinigung von substratenInfo
- Publication number
- DE69520687D1 DE69520687D1 DE69520687T DE69520687T DE69520687D1 DE 69520687 D1 DE69520687 D1 DE 69520687D1 DE 69520687 T DE69520687 T DE 69520687T DE 69520687 T DE69520687 T DE 69520687T DE 69520687 D1 DE69520687 D1 DE 69520687D1
- Authority
- DE
- Germany
- Prior art keywords
- pressure liquid
- liquid solvents
- treating pressure
- cleaning substrates
- substrates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06F—LAUNDERING, DRYING, IRONING, PRESSING OR FOLDING TEXTILE ARTICLES
- D06F43/00—Dry-cleaning apparatus or methods using volatile solvents
- D06F43/08—Associated apparatus for handling and recovering the solvents
- D06F43/081—Reclaiming or recovering the solvent from a mixture of solvent and contaminants, e.g. by distilling
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06F—LAUNDERING, DRYING, IRONING, PRESSING OR FOLDING TEXTILE ARTICLES
- D06F43/00—Dry-cleaning apparatus or methods using volatile solvents
- D06F43/08—Associated apparatus for handling and recovering the solvents
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Cleaning By Liquid Or Steam (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US33658894A | 1994-11-09 | 1994-11-09 | |
US50650895A | 1995-07-25 | 1995-07-25 | |
PCT/US1995/014643 WO1996015304A1 (en) | 1994-11-09 | 1995-11-08 | Method and system for rejuvenating pressurized fluid solvents used in cleaning substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69520687D1 true DE69520687D1 (de) | 2001-05-17 |
DE69520687T2 DE69520687T2 (de) | 2001-08-23 |
Family
ID=26990280
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69520687T Expired - Fee Related DE69520687T2 (de) | 1994-11-09 | 1995-11-08 | Verfahren und system zur aufbereitung von unter druck stehenden flüssigen lösungsmitteln zur reinigung von substraten |
Country Status (5)
Country | Link |
---|---|
US (3) | US5772783A (de) |
EP (1) | EP0791093B1 (de) |
AU (1) | AU4106696A (de) |
DE (1) | DE69520687T2 (de) |
WO (1) | WO1996015304A1 (de) |
Families Citing this family (69)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5822818A (en) * | 1997-04-15 | 1998-10-20 | Hughes Electronics | Solvent resupply method for use with a carbon dioxide cleaning system |
TW539918B (en) * | 1997-05-27 | 2003-07-01 | Tokyo Electron Ltd | Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
AU8916898A (en) * | 1997-09-09 | 1999-03-29 | Snap-Tite Technologies, Inc. | Dry cleaning system using carbon dioxide |
US6009585A (en) * | 1997-09-23 | 2000-01-04 | Middleton; Richard G | Method and apparatus for washing shop cloths |
US5904737A (en) * | 1997-11-26 | 1999-05-18 | Mve, Inc. | Carbon dioxide dry cleaning system |
US6216302B1 (en) | 1997-11-26 | 2001-04-17 | Mve, Inc. | Carbon dioxide dry cleaning system |
US6442980B2 (en) * | 1997-11-26 | 2002-09-03 | Chart Inc. | Carbon dioxide dry cleaning system |
WO1999032206A1 (en) * | 1997-12-19 | 1999-07-01 | R.R. Street & Co. Inc. | Assembly for filtering pressurized fluids and method and system of using the same |
US6012307A (en) * | 1997-12-24 | 2000-01-11 | Ratheon Commercial Laundry Llc | Dry-cleaning machine with controlled agitation |
US6129451A (en) * | 1998-01-12 | 2000-10-10 | Snap-Tite Technologies, Inc. | Liquid carbon dioxide cleaning system and method |
US6474111B1 (en) * | 1998-03-11 | 2002-11-05 | Harley J. Pattee | Recycling system for laundry wash water |
US6098430A (en) * | 1998-03-24 | 2000-08-08 | Micell Technologies, Inc. | Cleaning apparatus |
JP4322327B2 (ja) * | 1998-04-14 | 2009-08-26 | 月島環境エンジニアリング株式会社 | 目的成分の分離方法 |
US6161311A (en) | 1998-07-10 | 2000-12-19 | Asm America, Inc. | System and method for reducing particles in epitaxial reactors |
US6073292A (en) | 1998-09-28 | 2000-06-13 | Aga Ab | Fluid based cleaning method and system |
SE9901002D0 (sv) * | 1999-03-19 | 1999-03-19 | Electrolux Ab | Anordning för rengöring av textilföremål med en förtätad vätskeformig behandlingsgas |
US6558622B1 (en) | 1999-05-04 | 2003-05-06 | Steris Corporation | Sub-critical fluid cleaning and antimicrobial decontamination system and process |
US7044143B2 (en) * | 1999-05-14 | 2006-05-16 | Micell Technologies, Inc. | Detergent injection systems and methods for carbon dioxide microelectronic substrate processing systems |
US6536450B1 (en) * | 1999-07-07 | 2003-03-25 | Semitool, Inc. | Fluid heating system for processing semiconductor materials |
WO2001002108A1 (en) | 1999-07-06 | 2001-01-11 | Semitool, Inc. | Fluid heating system for processing semiconductor materials |
US6612317B2 (en) | 2000-04-18 | 2003-09-02 | S.C. Fluids, Inc | Supercritical fluid delivery and recovery system for semiconductor wafer processing |
US6397421B1 (en) * | 1999-09-24 | 2002-06-04 | Micell Technologies | Methods and apparatus for conserving vapor and collecting liquid carbon dioxide for carbon dioxide dry cleaning |
US6314601B1 (en) * | 1999-09-24 | 2001-11-13 | Mcclain James B. | System for the control of a carbon dioxide cleaning apparatus |
US6558432B2 (en) | 1999-10-15 | 2003-05-06 | R. R. Street & Co., Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
US6755871B2 (en) | 1999-10-15 | 2004-06-29 | R.R. Street & Co. Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
US7097715B1 (en) * | 2000-10-11 | 2006-08-29 | R. R. Street Co. Inc. | Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent |
KR100742473B1 (ko) * | 1999-11-02 | 2007-07-25 | 동경 엘렉트론 주식회사 | 제 1 및 제 2 소재를 초임계 처리하는 장치 및 방법 |
US6748960B1 (en) | 1999-11-02 | 2004-06-15 | Tokyo Electron Limited | Apparatus for supercritical processing of multiple workpieces |
AU2001253650A1 (en) * | 2000-04-18 | 2001-10-30 | S. C. Fluids, Inc. | Supercritical fluid delivery and recovery system for semiconductor wafer processing |
US20040025908A1 (en) * | 2000-04-18 | 2004-02-12 | Stephen Douglas | Supercritical fluid delivery system for semiconductor wafer processing |
US6493964B1 (en) * | 2000-05-25 | 2002-12-17 | Tousimis Research Corp. | Supercritical point drying apparatus for semiconductor device manufacturing and bio-medical sample processing |
AU2001290171A1 (en) * | 2000-07-26 | 2002-02-05 | Tokyo Electron Limited | High pressure processing chamber for semiconductor substrate |
GB0030521D0 (en) * | 2000-12-14 | 2001-01-31 | Monotub Ind Plc | Washing machine |
US6536059B2 (en) | 2001-01-12 | 2003-03-25 | Micell Technologies, Inc. | Pumpless carbon dioxide dry cleaning system |
TW544797B (en) * | 2001-04-17 | 2003-08-01 | Kobe Steel Ltd | High-pressure processing apparatus |
DE10231598A1 (de) * | 2001-08-07 | 2003-02-20 | Heidelberger Druckmasch Ag | Vorrichtung zum Wiederbefeuchten einer Warenbahn |
US6763840B2 (en) | 2001-09-14 | 2004-07-20 | Micell Technologies, Inc. | Method and apparatus for cleaning substrates using liquid carbon dioxide |
JP2005506694A (ja) * | 2001-10-17 | 2005-03-03 | プラクスエア・テクノロジー・インコーポレイテッド | 中央二酸化炭素精製器 |
JP3557588B2 (ja) * | 2001-10-26 | 2004-08-25 | 株式会社東北テクノアーチ | 超・亜臨界流体処理システム及び装置 |
US20040016450A1 (en) * | 2002-01-25 | 2004-01-29 | Bertram Ronald Thomas | Method for reducing the formation of contaminants during supercritical carbon dioxide processes |
WO2003071173A1 (en) * | 2002-02-15 | 2003-08-28 | Supercritical Systems Inc. | Pressure enchanced diaphragm valve |
NL1021142C2 (nl) * | 2002-07-24 | 2004-01-27 | Stork Prints Bv | Inrichting en werkwijze voor het stuksgewijs of partij-gewijs onder hoge druk veredelen van stukken substraat, in het bijzonder textiel substraat. |
US6889508B2 (en) * | 2002-10-02 | 2005-05-10 | The Boc Group, Inc. | High pressure CO2 purification and supply system |
US6960242B2 (en) * | 2002-10-02 | 2005-11-01 | The Boc Group, Inc. | CO2 recovery process for supercritical extraction |
MXPA02010824A (es) * | 2002-11-04 | 2004-05-10 | Peredo Asdrubal Flores | Metodo y aparato de lavado utilizando dioxido de carbono. |
US6722642B1 (en) | 2002-11-06 | 2004-04-20 | Tokyo Electron Limited | High pressure compatible vacuum chuck for semiconductor wafer including lift mechanism |
US6880560B2 (en) * | 2002-11-18 | 2005-04-19 | Techsonic | Substrate processing apparatus for processing substrates using dense phase gas and sonic waves |
US7270137B2 (en) | 2003-04-28 | 2007-09-18 | Tokyo Electron Limited | Apparatus and method of securing a workpiece during high-pressure processing |
US20050022850A1 (en) * | 2003-07-29 | 2005-02-03 | Supercritical Systems, Inc. | Regulation of flow of processing chemistry only into a processing chamber |
JP4248989B2 (ja) * | 2003-10-10 | 2009-04-02 | 大日本スクリーン製造株式会社 | 高圧処理装置および高圧処理方法 |
US20050091755A1 (en) * | 2003-10-31 | 2005-05-05 | Conrad Daniel C. | Non-aqueous washing machine & methods |
US7076970B2 (en) * | 2004-01-19 | 2006-07-18 | Air Products And Chemicals, Inc. | System for supply and delivery of carbon dioxide with different purity requirements |
US7076969B2 (en) * | 2004-01-19 | 2006-07-18 | Air Products And Chemicals, Inc. | System for supply and delivery of high purity and ultrahigh purity carbon dioxide |
US7069742B2 (en) * | 2004-01-19 | 2006-07-04 | Air Products And Chemicals, Inc. | High-pressure delivery system for ultra high purity liquid carbon dioxide |
US20060027512A1 (en) * | 2004-08-05 | 2006-02-09 | Sharkey James P | Methods and apparatus for removing fine particulate contaminants from commercial laundry waste water |
JP4267604B2 (ja) * | 2004-09-01 | 2009-05-27 | 三洋電機株式会社 | 洗浄装置 |
US7461663B2 (en) * | 2004-09-01 | 2008-12-09 | Sanyo Electric Co., Ltd. | Cleaning apparatus |
JP4644565B2 (ja) * | 2004-09-01 | 2011-03-02 | 三洋電機株式会社 | 洗浄装置 |
US7767145B2 (en) | 2005-03-28 | 2010-08-03 | Toyko Electron Limited | High pressure fourier transform infrared cell |
US7789971B2 (en) | 2005-05-13 | 2010-09-07 | Tokyo Electron Limited | Treatment of substrate using functionalizing agent in supercritical carbon dioxide |
US8293105B2 (en) * | 2008-05-29 | 2012-10-23 | Perry Equipment Corporation | Contaminant adsorption filtration media, elements, systems and methods employing wire or other lattice support |
DE102009035389A1 (de) * | 2009-07-30 | 2011-02-03 | Siemens Aktiengesellschaft | Verfahren zur Schadstoffentfernung aus Kohlendioxid und Vorrichtung zur dessen Durchführung |
KR101761960B1 (ko) * | 2010-01-05 | 2017-07-26 | 씨오2넥서스, 아이엔씨. | 고밀도화된 세정액을 이용하는 세탁품들을 위한 시스템 및 방법, 및 그 안에서의 유체 이동 장치의 이용 방법 |
WO2018069778A1 (es) * | 2016-09-20 | 2018-04-19 | Universidad Industrial De Santander | Sistema de recirculación de dióxido de carbono supercrítico que usa un dispositivo integrado de licuado y almacenamiento del fluido |
CN110998802B (zh) * | 2017-08-10 | 2023-08-29 | 株式会社富士金 | 流体供给装置和流体供给方法 |
CN107583925A (zh) * | 2017-08-29 | 2018-01-16 | 湖北工程学院 | 试剂瓶清洗方法、试剂瓶试剂回收方法及试剂瓶清洗系统 |
US11624556B2 (en) | 2019-05-06 | 2023-04-11 | Messer Industries Usa, Inc. | Impurity control for a high pressure CO2 purification and supply system |
US11485647B2 (en) * | 2019-05-23 | 2022-11-01 | Bsh Home Appliances Corporation | Changeable water filter in combination with a mixing valve for pretreatment of water in a home appliance and method of pretreating water |
CN110899248A (zh) * | 2019-06-21 | 2020-03-24 | 杭州杭氧股份有限公司 | 一种利用超临界流体批量清洗超高纯气体钢瓶的系统及其方法 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2053103A (en) * | 1929-09-26 | 1936-09-01 | Columbia Appliance Corp | Dry cleaning apparatus |
US2140623A (en) * | 1930-06-18 | 1938-12-20 | American Laundry Mach Co | Apparatus for reclaiming solvent |
US2011083A (en) * | 1931-03-11 | 1935-08-13 | American Laundry Mach Co | Apparatus for cleaning fabrics |
US1995064A (en) * | 1931-08-03 | 1935-03-19 | American Laundry Mach Co | Vent for garment cleaning systems |
US2114776A (en) * | 1934-05-02 | 1938-04-19 | Prosperity Co Inc | Dry cleaning machine |
US2070204A (en) * | 1935-03-14 | 1937-02-09 | American Laundry Mach Co | Liquid seal vent |
US3542200A (en) * | 1967-03-17 | 1970-11-24 | Carborundum Co | Apparatus for reconditioning drycleaning fluid |
GB1408263A (en) * | 1971-08-27 | 1975-10-01 | Neil & Spencer Ltd | Dry cleaning apparatus |
US4012194A (en) * | 1971-10-04 | 1977-03-15 | Maffei Raymond L | Extraction and cleaning processes |
US4630625A (en) * | 1981-01-22 | 1986-12-23 | Quadrex Hps, Inc. | Tool decontamination apparatus |
US4513590A (en) * | 1983-03-08 | 1985-04-30 | Dual Filtrex, Inc. | Combination filter apparatus for use with a dry cleaning machine |
US4770197A (en) * | 1986-02-21 | 1988-09-13 | Westinghouse Electric Corp. | Apparatus for recovering solvent |
US4824487A (en) * | 1987-07-10 | 1989-04-25 | Hewlett-Packard Company | Cleaning of polyurethane foam reservoir |
US5013366A (en) * | 1988-12-07 | 1991-05-07 | Hughes Aircraft Company | Cleaning process using phase shifting of dense phase gases |
IT1239006B (it) * | 1989-11-08 | 1993-09-18 | Cobarr Spa | Procedimento per il riciclaggio di bottiglie di pet. |
DE4004111C2 (de) * | 1989-02-15 | 1999-08-19 | Deutsches Textilforschzentrum | Verfahren zur Vorbehandlung von textilen Flächengebilden oder Garnen |
DE3904514C2 (de) * | 1989-02-15 | 1999-03-11 | Oeffentliche Pruefstelle Und T | Verfahren zum Reinigen bzw. Waschen von Bekleidungsteilen o. dgl. |
US5068040A (en) * | 1989-04-03 | 1991-11-26 | Hughes Aircraft Company | Dense phase gas photochemical process for substrate treatment |
JPH03122598A (ja) * | 1989-10-04 | 1991-05-24 | Kobe Steel Ltd | 汚染衣類の洗濯方法 |
US5213619A (en) * | 1989-11-30 | 1993-05-25 | Jackson David P | Processes for cleaning, sterilizing, and implanting materials using high energy dense fluids |
US5269850A (en) * | 1989-12-20 | 1993-12-14 | Hughes Aircraft Company | Method of removing organic flux using peroxide composition |
US5108378A (en) * | 1990-05-09 | 1992-04-28 | Safety Syringes, Inc. | Disposable self-shielding hypodermic syringe |
US5306350A (en) * | 1990-12-21 | 1994-04-26 | Union Carbide Chemicals & Plastics Technology Corporation | Methods for cleaning apparatus using compressed fluids |
US5201960A (en) * | 1991-02-04 | 1993-04-13 | Applied Photonics Research, Inc. | Method for removing photoresist and other adherent materials from substrates |
US5279615A (en) * | 1991-06-14 | 1994-01-18 | The Clorox Company | Method and composition using densified carbon dioxide and cleaning adjunct to clean fabrics |
US5431843A (en) * | 1991-09-04 | 1995-07-11 | The Clorox Company | Cleaning through perhydrolysis conducted in dense fluid medium |
KR930019861A (ko) * | 1991-12-12 | 1993-10-19 | 완다 케이. 덴슨-로우 | 조밀상 기체를 이용한 코팅 방법 |
US5313965A (en) * | 1992-06-01 | 1994-05-24 | Hughes Aircraft Company | Continuous operation supercritical fluid treatment process and system |
US5267455A (en) * | 1992-07-13 | 1993-12-07 | The Clorox Company | Liquid/supercritical carbon dioxide dry cleaning system |
US5370742A (en) * | 1992-07-13 | 1994-12-06 | The Clorox Company | Liquid/supercritical cleaning with decreased polymer damage |
US5344493A (en) * | 1992-07-20 | 1994-09-06 | Jackson David P | Cleaning process using microwave energy and centrifugation in combination with dense fluids |
US5368171A (en) * | 1992-07-20 | 1994-11-29 | Jackson; David P. | Dense fluid microwave centrifuge |
US5316591A (en) * | 1992-08-10 | 1994-05-31 | Hughes Aircraft Company | Cleaning by cavitation in liquefied gas |
US5339844A (en) * | 1992-08-10 | 1994-08-23 | Hughes Aircraft Company | Low cost equipment for cleaning using liquefiable gases |
WO1994006163A1 (en) * | 1992-09-10 | 1994-03-17 | Pita Witehira | Electrode frame having structural members and additional web material |
US5348588A (en) * | 1993-06-29 | 1994-09-20 | Church & Dwight Co., Inc. | Evaporative treatment of inorganic saponifier wash water |
-
1995
- 1995-11-08 EP EP95939116A patent/EP0791093B1/de not_active Expired - Lifetime
- 1995-11-08 DE DE69520687T patent/DE69520687T2/de not_active Expired - Fee Related
- 1995-11-08 AU AU41066/96A patent/AU4106696A/en not_active Abandoned
- 1995-11-08 WO PCT/US1995/014643 patent/WO1996015304A1/en active IP Right Grant
-
1996
- 1996-07-12 US US08/680,909 patent/US5772783A/en not_active Expired - Lifetime
-
1998
- 1998-01-27 US US09/014,197 patent/US5937675A/en not_active Expired - Fee Related
-
1999
- 1999-07-30 US US09/364,402 patent/US6082150A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US5937675A (en) | 1999-08-17 |
US5772783A (en) | 1998-06-30 |
EP0791093B1 (de) | 2001-04-11 |
DE69520687T2 (de) | 2001-08-23 |
AU4106696A (en) | 1996-06-06 |
WO1996015304A1 (en) | 1996-05-23 |
EP0791093A1 (de) | 1997-08-27 |
US6082150A (en) | 2000-07-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition | ||
8339 | Ceased/non-payment of the annual fee |