KR930019861A - 조밀상 기체를 이용한 코팅 방법 - Google Patents
조밀상 기체를 이용한 코팅 방법 Download PDFInfo
- Publication number
- KR930019861A KR930019861A KR1019920023912A KR920023912A KR930019861A KR 930019861 A KR930019861 A KR 930019861A KR 1019920023912 A KR1019920023912 A KR 1019920023912A KR 920023912 A KR920023912 A KR 920023912A KR 930019861 A KR930019861 A KR 930019861A
- Authority
- KR
- South Korea
- Prior art keywords
- coating
- substrate
- dense gas
- mixture
- pressure
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D2401/00—Form of the coating product, e.g. solution, water dispersion, powders or the like
- B05D2401/90—Form of the coating product, e.g. solution, water dispersion, powders or the like at least one component of the composition being in supercritical state or close to supercritical state
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- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
본 발명에서는 기판을 코팅 챔버에 넣고, 이 기판을 선택된 온도 및 조밀상 기체의 임계 압력 이상의 기판의 전체 표면내에 조밀상 기체중의 선택된 코팅 물질의 혼합물을 완전히 침투시키기에 충분한 기간동안 상기 혼합물과 접촉시키는 것으로 이루어지는 선택된 물질로 기판을 코팅시키는 방법이 제공된다. 이어서, 조밀상 기체의 상을 전이시켜 조밀상 기체로부터 선택된 물질을 용해시킴으로써 기판상에 선택된 물질의 코팅을 형성시킨다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 따른 예시적 방법의 단계를 나타내는 순서도.
제2도는 본 발명에 따라서 이용하기 위한 예시적 시스템에 대한 도면.
Claims (8)
- (a)선택된 물질 및 이 선택된 물질이 용해될 수 있는 선택된 조밀상 기체의 혼합물을 제공하고; (b)기판을 코팅 챔버에 놓고; (c)예정된 온도 및 조밀상 기체의 임계 압력 이상의 압력에서 기판의 전체 표면내에 상기 혼합물을 완전히 침투시키기에 충분한 예정된 기간동안 상기 챔버중에서 상기 기판을 혼합물과 접촉시키고; (d)상기 조밀상 기체의 상을 전이시켜 상기 조밀상 기체로부터 상기 선택된 물질을 용해시킴으로써 상기 기판 상에 코팅을 형성시키는 것으로 이루어지는 선택된 물질로 기판을 코팅시키는 방법.
- 제1항에 있어서, 상기 온도를 조밀상 기체의 임계 온도 미만의 온도로 감소시키거나 또는 상기 압력을 조밀상 기체의 임계 압력 미만의 압력으로 감소시킴으로써 조밀상 기체를 초임계 상태로 부터 액체상태로 전이시키는 방법.
- 제1항에 있어서, 상기 조밀상 기체를 액체 상태로부터 초임계 상태로 전이시키는 방법.
- 제1항에 있어서, 상기 조밀상 기체가 이산화탄소, 아산화질소, 암모니아, 헬륨, 크립톤, 아르곤, 메탄, 에탄, 프로판, 부탄, 펜탄, 헥산, 에틸렌, 프로필렌, 테트라플루오로메탄, 클로로디플루오르메탄, 육불화황, 퍼플루오로프로판 및 이들의 혼합물로부터 선택되는 방법.
- 제1항에 있어서, 상기 코팅이 기판의 외부 표면 또는 기판의 간극 표면 상에 형성되는 방법.
- 제5항에 있어서, 상기 기판의 외부 표면상의 코팅을 자외선에 노출시키는 방법.
- 제1항에 있어서, 상기 코팅에 대해 그의 특성을 변화시키기 위한 처리를 수행하는 것을 더 포함하는 방법.
- 제7항에 있어서, 상기 코팅과 화학적으로 반응하여 코팅을 변화시키는 선택된 반응 물질에 상기 코팅을 노출시키는 것을 더 포함하는 방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US80575391A | 1991-12-12 | 1991-12-12 | |
US805,753 | 1991-12-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR930019861A true KR930019861A (ko) | 1993-10-19 |
Family
ID=25192423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019920023912A KR930019861A (ko) | 1991-12-12 | 1992-02-11 | 조밀상 기체를 이용한 코팅 방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5403621A (ko) |
EP (1) | EP0546452B1 (ko) |
JP (1) | JPH05345985A (ko) |
KR (1) | KR930019861A (ko) |
CA (1) | CA2079629A1 (ko) |
DE (1) | DE69225299T2 (ko) |
MX (1) | MX9207221A (ko) |
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1992
- 1992-02-11 KR KR1019920023912A patent/KR930019861A/ko not_active Application Discontinuation
- 1992-10-01 CA CA002079629A patent/CA2079629A1/en not_active Abandoned
- 1992-12-03 EP EP92120667A patent/EP0546452B1/en not_active Expired - Lifetime
- 1992-12-03 DE DE69225299T patent/DE69225299T2/de not_active Expired - Lifetime
- 1992-12-11 MX MX9207221A patent/MX9207221A/es unknown
- 1992-12-14 JP JP4333306A patent/JPH05345985A/ja active Pending
-
1993
- 1993-10-01 US US08/130,671 patent/US5403621A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69225299T2 (de) | 1998-12-17 |
US5403621A (en) | 1995-04-04 |
DE69225299D1 (de) | 1998-06-04 |
EP0546452A1 (en) | 1993-06-16 |
CA2079629A1 (en) | 1993-06-13 |
JPH05345985A (ja) | 1993-12-27 |
MX9207221A (es) | 1993-12-01 |
EP0546452B1 (en) | 1998-04-29 |
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