KR950003196A - 액체 인듐 원 - Google Patents
액체 인듐 원 Download PDFInfo
- Publication number
- KR950003196A KR950003196A KR1019940013089A KR19940013089A KR950003196A KR 950003196 A KR950003196 A KR 950003196A KR 1019940013089 A KR1019940013089 A KR 1019940013089A KR 19940013089 A KR19940013089 A KR 19940013089A KR 950003196 A KR950003196 A KR 950003196A
- Authority
- KR
- South Korea
- Prior art keywords
- indium
- solvent
- solution
- trimethyl indium
- trimethyl
- Prior art date
Links
- 229910052738 indium Inorganic materials 0.000 title claims abstract 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 title claims abstract 4
- 239000007788 liquid Substances 0.000 title 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 claims abstract description 9
- 239000012159 carrier gas Substances 0.000 claims abstract 2
- 239000012808 vapor phase Substances 0.000 claims abstract 2
- 239000002904 solvent Substances 0.000 claims 5
- YMBBYINYHYQUGH-UHFFFAOYSA-N butylindium Chemical compound CCCC[In] YMBBYINYHYQUGH-UHFFFAOYSA-N 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- PHLVLJOQVQPFAW-UHFFFAOYSA-N tris(2-methylpropyl)indigane Chemical compound CC(C)C[In](CC(C)C)CC(C)C PHLVLJOQVQPFAW-UHFFFAOYSA-N 0.000 claims 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F5/00—Compounds containing elements of Groups 3 or 13 of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/301—AIII BV compounds, where A is Al, Ga, In or Tl and B is N, P, As, Sb or Bi
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
본 발명은 C3-C5트리알킬 인듐중에 트리메틸 인듐을 용해시키고 그 용액에 비활성 담체 가스의 기포를 통과시킴으로써 증기상 트리메틸 인듐의 균일한 방사선 측정법을 제공하는 것에 관한 것이다.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 하기 실시예의 증기확된 트리메틸 인듐을 전달하는데 사용되는 장치의 개략도이다.
Claims (5)
- C3-C5트리알킬 인듐 용매중에 트리메틸 인듐을 용해하여 용액을 얻고, 그 용액으로부터 트리메틸 인듐을 담체 가스에 비말 동반시키는 것을 포함하는 증기상 트리메틸 인듐을 제공하는 방법.
- 제1항에 있어서, 용매가 트리 n-부틸 인듐, 트리이소부틸 인듐 및 그 혼합물들로 이루어진 군으로부터 선택되는 방법.
- 제1항에 있어서, 트리메틸 인듐을 상기 용매에 대해 약 0.05이상의 몰비로 용해시키는 방법.
- C3-C5트리알킬 인듐 용매 및 그중에 용해된 트리메틸 인듐을 포함하는 용액.
- 제4항에 있어서, 트리메틸 인듐이 상기 용매에 대해 약 0.05 이상의 몰비로 용해되어 있는 용액.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US8/097,821 | 1993-07-27 | ||
US08/097,821 US5502227A (en) | 1993-07-27 | 1993-07-27 | Liquid indium source |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950003196A true KR950003196A (ko) | 1995-02-16 |
KR0144640B1 KR0144640B1 (ko) | 1998-07-15 |
Family
ID=22265288
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940013089A KR0144640B1 (ko) | 1993-07-27 | 1994-06-10 | 액체 인듐 공급원 |
Country Status (7)
Country | Link |
---|---|
US (1) | US5502227A (ko) |
EP (1) | EP0640610B1 (ko) |
JP (1) | JP2596713B2 (ko) |
KR (1) | KR0144640B1 (ko) |
CA (1) | CA2124052C (ko) |
DE (1) | DE69424007T2 (ko) |
TW (1) | TW253888B (ko) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5783716A (en) * | 1996-06-28 | 1998-07-21 | Advanced Technology Materials, Inc. | Platinum source compositions for chemical vapor deposition of platinum |
EP1335415B1 (en) * | 2002-01-17 | 2005-08-03 | Shipley Co. L.L.C. | Organoindium compounds for use in chemical vapour deposition processes |
JP4689969B2 (ja) * | 2003-04-05 | 2011-06-01 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | Iva族およびvia族化合物の調製 |
JP4714422B2 (ja) | 2003-04-05 | 2011-06-29 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | ゲルマニウムを含有するフィルムを堆積させる方法、及び蒸気送達装置 |
JP4954448B2 (ja) * | 2003-04-05 | 2012-06-13 | ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. | 有機金属化合物 |
AU2005245634B2 (en) * | 2004-05-20 | 2010-07-01 | Akzo Nobel Chemicals International B.V. | Bubbler for constant vapor delivery of a solid chemical |
US20060121192A1 (en) * | 2004-12-02 | 2006-06-08 | Jurcik Benjamin J | Liquid precursor refill system |
EP3173507A1 (de) * | 2015-11-25 | 2017-05-31 | Umicore AG & Co. KG | Verfahren zur metallorganischen gasphasenabscheidung unter verwendung von lösungen von indiumalkylverbindungen in kohlenwasserstoffen |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4720560A (en) * | 1984-10-25 | 1988-01-19 | Morton Thiokol, Inc. | Hybrid organometallic compounds, particularly for metal organic chemical vapor deposition |
US4847399A (en) * | 1987-01-23 | 1989-07-11 | Morton Thiokol, Inc. | Process for preparing or purifying Group III-A organometallic compounds |
GB9116381D0 (en) * | 1991-07-30 | 1991-09-11 | Shell Int Research | Method for deposition of a metal |
-
1993
- 1993-07-27 US US08/097,821 patent/US5502227A/en not_active Expired - Fee Related
-
1994
- 1994-05-16 TW TW083104412A patent/TW253888B/zh active
- 1994-05-19 EP EP94303593A patent/EP0640610B1/en not_active Expired - Lifetime
- 1994-05-19 DE DE69424007T patent/DE69424007T2/de not_active Expired - Fee Related
- 1994-05-20 CA CA002124052A patent/CA2124052C/en not_active Expired - Fee Related
- 1994-06-10 KR KR1019940013089A patent/KR0144640B1/ko not_active IP Right Cessation
- 1994-06-22 JP JP6139979A patent/JP2596713B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0640610A2 (en) | 1995-03-01 |
JP2596713B2 (ja) | 1997-04-02 |
KR0144640B1 (ko) | 1998-07-15 |
DE69424007D1 (de) | 2000-05-25 |
EP0640610B1 (en) | 2000-04-19 |
JPH07150357A (ja) | 1995-06-13 |
DE69424007T2 (de) | 2000-09-14 |
EP0640610A3 (en) | 1995-04-12 |
TW253888B (ko) | 1995-08-11 |
US5502227A (en) | 1996-03-26 |
CA2124052C (en) | 1996-11-26 |
CA2124052A1 (en) | 1995-01-28 |
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