DE69225299T2 - Beschichtungsverfahren unter Verwendung von dichten Gasphasen - Google Patents

Beschichtungsverfahren unter Verwendung von dichten Gasphasen

Info

Publication number
DE69225299T2
DE69225299T2 DE69225299T DE69225299T DE69225299T2 DE 69225299 T2 DE69225299 T2 DE 69225299T2 DE 69225299 T DE69225299 T DE 69225299T DE 69225299 T DE69225299 T DE 69225299T DE 69225299 T2 DE69225299 T2 DE 69225299T2
Authority
DE
Germany
Prior art keywords
coating process
gas phases
dense gas
dense
phases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69225299T
Other languages
English (en)
Other versions
DE69225299D1 (de
Inventor
David P Jackson
Orval F Buck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raytheon Co
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Application granted granted Critical
Publication of DE69225299D1 publication Critical patent/DE69225299D1/de
Publication of DE69225299T2 publication Critical patent/DE69225299T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/18—Processes for applying liquids or other fluent materials performed by dipping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2401/00—Form of the coating product, e.g. solution, water dispersion, powders or the like
    • B05D2401/90—Form of the coating product, e.g. solution, water dispersion, powders or the like at least one component of the composition being in supercritical state or close to supercritical state

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
DE69225299T 1991-12-12 1992-12-03 Beschichtungsverfahren unter Verwendung von dichten Gasphasen Expired - Lifetime DE69225299T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US80575391A 1991-12-12 1991-12-12

Publications (2)

Publication Number Publication Date
DE69225299D1 DE69225299D1 (de) 1998-06-04
DE69225299T2 true DE69225299T2 (de) 1998-12-17

Family

ID=25192423

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69225299T Expired - Lifetime DE69225299T2 (de) 1991-12-12 1992-12-03 Beschichtungsverfahren unter Verwendung von dichten Gasphasen

Country Status (7)

Country Link
US (1) US5403621A (de)
EP (1) EP0546452B1 (de)
JP (1) JPH05345985A (de)
KR (1) KR930019861A (de)
CA (1) CA2079629A1 (de)
DE (1) DE69225299T2 (de)
MX (1) MX9207221A (de)

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US7399708B2 (en) * 2005-03-30 2008-07-15 Tokyo Electron Limited Method of treating a composite spin-on glass/anti-reflective material prior to cleaning
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US20060283529A1 (en) * 2005-06-17 2006-12-21 Amit Ghosh Apparatus and Method of Producing Net-Shaped Components from Alloy Sheets
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Also Published As

Publication number Publication date
JPH05345985A (ja) 1993-12-27
DE69225299D1 (de) 1998-06-04
CA2079629A1 (en) 1993-06-13
KR930019861A (ko) 1993-10-19
US5403621A (en) 1995-04-04
EP0546452A1 (de) 1993-06-16
MX9207221A (es) 1993-12-01
EP0546452B1 (de) 1998-04-29

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: RAYTHEON CO. (N.D.GES.D. STAATES DELAWARE), LEXING