ATA348471A - Verfahren zur herstellung mehrerer halbleiterbauelemente - Google Patents

Verfahren zur herstellung mehrerer halbleiterbauelemente

Info

Publication number
ATA348471A
ATA348471A AT348471A AT348471A ATA348471A AT A348471 A ATA348471 A AT A348471A AT 348471 A AT348471 A AT 348471A AT 348471 A AT348471 A AT 348471A AT A348471 A ATA348471 A AT A348471A
Authority
AT
Austria
Prior art keywords
semiconductor components
several semiconductor
manufacturing several
manufacturing
components
Prior art date
Application number
AT348471A
Other languages
English (en)
Other versions
AT334978B (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA348471A publication Critical patent/ATA348471A/de
Application granted granted Critical
Publication of AT334978B publication Critical patent/AT334978B/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/306Chemical or electrical treatment, e.g. electrolytic etching
    • H01L21/308Chemical or electrical treatment, e.g. electrolytic etching using masks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Bipolar Transistors (AREA)
AT348471A 1970-05-08 1971-04-22 Verfahren zur herstellung mehrerer halbleiterbauelemente AT334978B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702022551 DE2022551A1 (de) 1970-05-08 1970-05-08 Verfahren zur Herstellung eines pn-UEbergangs in Planartechnologie

Publications (2)

Publication Number Publication Date
ATA348471A true ATA348471A (de) 1976-06-15
AT334978B AT334978B (de) 1977-02-10

Family

ID=5770606

Family Applications (1)

Application Number Title Priority Date Filing Date
AT348471A AT334978B (de) 1970-05-08 1971-04-22 Verfahren zur herstellung mehrerer halbleiterbauelemente

Country Status (7)

Country Link
AT (1) AT334978B (de)
CH (1) CH521668A (de)
DE (1) DE2022551A1 (de)
FR (1) FR2088436B1 (de)
GB (1) GB1309228A (de)
NL (1) NL7106312A (de)
SE (1) SE360217B (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116487413B (zh) * 2023-04-13 2024-04-12 锦州辽晶电子科技股份有限公司 一种低放大倍数变化率的功率晶体管及其制作方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328651A (en) * 1963-10-29 1967-06-27 Sylvania Electric Prod Semiconductor switching device and method of manufacture
US3491434A (en) * 1965-01-28 1970-01-27 Texas Instruments Inc Junction isolation diffusion

Also Published As

Publication number Publication date
FR2088436B1 (de) 1976-05-28
CH521668A (de) 1972-04-15
AT334978B (de) 1977-02-10
SE360217B (de) 1973-09-17
GB1309228A (en) 1973-03-07
DE2022551A1 (de) 1971-11-25
FR2088436A1 (de) 1972-01-07
NL7106312A (de) 1971-11-10

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee