AT365659B - Vorrichtung fuer die chemische-thermische behand- lung von metallwerkstuecken mittels einer glimm- entladung - Google Patents
Vorrichtung fuer die chemische-thermische behand- lung von metallwerkstuecken mittels einer glimm- entladungInfo
- Publication number
- AT365659B AT365659B AT0062880A AT62880A AT365659B AT 365659 B AT365659 B AT 365659B AT 0062880 A AT0062880 A AT 0062880A AT 62880 A AT62880 A AT 62880A AT 365659 B AT365659 B AT 365659B
- Authority
- AT
- Austria
- Prior art keywords
- chemical
- thermal treatment
- glow discharge
- metal workpieces
- workpieces
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
- C21D1/34—Methods of heating
- C21D1/38—Heating by cathodic discharges
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/12—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/125—Avoiding or suppressing excessive transient voltages or currents
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Power Engineering (AREA)
- Analytical Chemistry (AREA)
- Thermal Sciences (AREA)
- Arc Welding Control (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Control Of Resistance Heating (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Generation Of Surge Voltage And Current (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG7943198A BG29362A1 (en) | 1979-03-11 | 1979-03-11 | Apparatus for chemical- thermal processing of matal articles in the condition of electrical smouldering charge |
Publications (2)
Publication Number | Publication Date |
---|---|
ATA62880A ATA62880A (de) | 1981-06-15 |
AT365659B true AT365659B (de) | 1982-02-10 |
Family
ID=3905917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT0062880A AT365659B (de) | 1979-03-11 | 1980-02-05 | Vorrichtung fuer die chemische-thermische behand- lung von metallwerkstuecken mittels einer glimm- entladung |
Country Status (17)
Country | Link |
---|---|
JP (1) | JPS55125275A (ja) |
AT (1) | AT365659B (ja) |
BG (1) | BG29362A1 (ja) |
CH (1) | CH644398A5 (ja) |
CS (1) | CS215904B1 (ja) |
DD (1) | DD235802A3 (ja) |
DE (1) | DE3007420C2 (ja) |
FR (1) | FR2451629A1 (ja) |
GB (1) | GB2045553B (ja) |
GR (1) | GR68091B (ja) |
HU (1) | HU190769B (ja) |
IT (1) | IT1145262B (ja) |
NO (1) | NO153320C (ja) |
PL (1) | PL131348B1 (ja) |
SE (1) | SE440169B (ja) |
SU (1) | SU1198132A1 (ja) |
YU (1) | YU41906B (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BG41745A1 (en) * | 1984-12-29 | 1987-08-14 | Minchev | Device for discontinuing of arc dicharges in gas dicharge vessel |
DE3514690A1 (de) * | 1985-04-24 | 1986-10-30 | Aeg-Elotherm Gmbh, 5630 Remscheid | Gleichspannungsquelle fuer anlagen zur oberflaechenbearbeitung von werkstuecken, insbesondere fuer eine ionitrierhaertanlage |
US5281321A (en) * | 1991-08-20 | 1994-01-25 | Leybold Aktiengesellschaft | Device for the suppression of arcs |
DE4127505C2 (de) * | 1991-08-20 | 2003-05-08 | Unaxis Deutschland Holding | Einrichtung zur Unterdrückung von Lichtbögen in Gasentladungsvorrichtungen |
CH689767A5 (de) * | 1992-03-24 | 1999-10-15 | Balzers Hochvakuum | Verfahren zur Werkstueckbehandlung in einer Vakuumatmosphaere und Vakuumbehandlungsanlage. |
DE69322404T2 (de) * | 1992-09-30 | 1999-04-29 | Advanced Energy Industries, Inc., Fort Collins, Col. 80525 | Topographisch genaues duennfilm-beschichtungssystem |
DE4239218C2 (de) * | 1992-11-21 | 2000-08-10 | Leybold Ag | Anordnung zum Verhindern von Überschlägen in einem Plasma-Prozeßraum |
DE4242633C2 (de) * | 1992-12-17 | 1996-11-14 | Fraunhofer Ges Forschung | Verfahren zur Durchführung von stabilen Niederdruck-Glimmprozessen |
US5427669A (en) * | 1992-12-30 | 1995-06-27 | Advanced Energy Industries, Inc. | Thin film DC plasma processing system |
US5718813A (en) * | 1992-12-30 | 1998-02-17 | Advanced Energy Industries, Inc. | Enhanced reactive DC sputtering system |
US6217717B1 (en) * | 1992-12-30 | 2001-04-17 | Advanced Energy Industries, Inc. | Periodically clearing thin film plasma processing system |
RU2048601C1 (ru) * | 1993-12-20 | 1995-11-20 | Рыжов Николай Михайлович | Способ диагностики процесса химико-термической обработки сталей и сплавов в тлеющем разряде и устройство для его осуществления |
US5584972A (en) * | 1995-02-01 | 1996-12-17 | Sony Corporation | Plasma noise and arcing suppressor apparatus and method for sputter deposition |
WO1996031899A1 (en) | 1995-04-07 | 1996-10-10 | Advanced Energy Industries, Inc. | Adjustable energy quantum thin film plasma processing system |
US5576939A (en) * | 1995-05-05 | 1996-11-19 | Drummond; Geoffrey N. | Enhanced thin film DC plasma power supply |
US5584974A (en) * | 1995-10-20 | 1996-12-17 | Eni | Arc control and switching element protection for pulsed dc cathode sputtering power supply |
US5882492A (en) * | 1996-06-21 | 1999-03-16 | Sierra Applied Sciences, Inc. | A.C. plasma processing system |
US5682067A (en) * | 1996-06-21 | 1997-10-28 | Sierra Applied Sciences, Inc. | Circuit for reversing polarity on electrodes |
DE19651615C1 (de) * | 1996-12-12 | 1997-07-10 | Fraunhofer Ges Forschung | Verfahren zum Aufbringen von Kohlenstoffschichten durch reaktives Magnetron-Sputtern |
US5993613A (en) * | 1997-11-07 | 1999-11-30 | Sierra Applied Sciences, Inc. | Method and apparatus for periodic polarity reversal during an active state |
US5990668A (en) * | 1997-11-07 | 1999-11-23 | Sierra Applied Sciences, Inc. | A.C. power supply having combined regulator and pulsing circuits |
US6011704A (en) * | 1997-11-07 | 2000-01-04 | Sierra Applied Sciences, Inc. | Auto-ranging power supply |
US5889391A (en) * | 1997-11-07 | 1999-03-30 | Sierra Applied Sciences, Inc. | Power supply having combined regulator and pulsing circuits |
US5910886A (en) * | 1997-11-07 | 1999-06-08 | Sierra Applied Sciences, Inc. | Phase-shift power supply |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1068972B (de) * | 1959-11-12 | Dortmund-Hörder Hüttenunion Aktiengesellschaft, Dortmund | Vorrichtung zum Betreiben stromstarker Glimmentladungen in Entladungsgefäßen, insbesondere zur Behandlung von in das Entladungsgefäß eingebrachten Körpern | |
NL254957A (ja) * | 1959-08-17 | |||
CH561285A5 (ja) * | 1973-02-19 | 1975-04-30 | Berghaus Bernhard Elektrophysi | |
FR2297927A1 (fr) * | 1975-01-17 | 1976-08-13 | Anvar | Perfectionnements aux |
FR2423914A1 (fr) * | 1978-04-20 | 1979-11-16 | Aizenshtein Anatoly | Procede d'alimentation, en courant electrique, des installations de traitement d'articles, notamment au moyen de decharges luminescentes, et dispositif pour sa mise en oeuvre |
-
1979
- 1979-03-11 BG BG7943198A patent/BG29362A1/xx unknown
-
1980
- 1980-02-05 CS CS80915A patent/CS215904B1/cs unknown
- 1980-02-05 AT AT0062880A patent/AT365659B/de not_active IP Right Cessation
- 1980-02-05 YU YU298/80A patent/YU41906B/xx unknown
- 1980-02-06 SE SE8000931A patent/SE440169B/sv not_active IP Right Cessation
- 1980-02-07 CH CH100580A patent/CH644398A5/de not_active IP Right Cessation
- 1980-02-07 DD DD218967A patent/DD235802A3/xx not_active IP Right Cessation
- 1980-02-07 SU SU807771058A patent/SU1198132A1/ru active
- 1980-02-09 GR GR61174A patent/GR68091B/el unknown
- 1980-02-13 IT IT47884/80A patent/IT1145262B/it active
- 1980-02-21 PL PL1980222156A patent/PL131348B1/pl unknown
- 1980-02-27 DE DE3007420A patent/DE3007420C2/de not_active Expired
- 1980-03-04 NO NO800613A patent/NO153320C/no unknown
- 1980-03-10 FR FR8005341A patent/FR2451629A1/fr active Granted
- 1980-03-10 GB GB8007980A patent/GB2045553B/en not_active Expired
- 1980-03-10 JP JP3019380A patent/JPS55125275A/ja active Granted
- 1980-03-11 HU HU80568A patent/HU190769B/hu not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
BG29362A1 (en) | 1980-11-14 |
JPS55125275A (en) | 1980-09-26 |
PL131348B1 (en) | 1984-10-31 |
NO153320C (no) | 1986-02-19 |
DE3007420A1 (de) | 1980-09-25 |
JPS6253593B2 (ja) | 1987-11-11 |
YU29880A (en) | 1983-06-30 |
SU1198132A1 (ru) | 1985-12-15 |
CS215904B1 (en) | 1982-10-29 |
SE8000931L (sv) | 1980-09-12 |
FR2451629B1 (ja) | 1984-12-07 |
YU41906B (en) | 1988-02-29 |
NO153320B (no) | 1985-11-11 |
GB2045553A (en) | 1980-10-29 |
HU190769B (en) | 1986-11-28 |
GR68091B (ja) | 1981-10-30 |
DE3007420C2 (de) | 1984-08-30 |
IT8047884A0 (it) | 1980-02-13 |
ATA62880A (de) | 1981-06-15 |
DD235802A3 (de) | 1986-05-21 |
PL222156A1 (ja) | 1980-11-03 |
GB2045553B (en) | 1983-08-17 |
NO800613L (no) | 1980-09-12 |
SE440169B (sv) | 1985-07-15 |
CH644398A5 (de) | 1984-07-31 |
IT1145262B (it) | 1986-11-05 |
FR2451629A1 (fr) | 1980-10-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ELA | Expired due to lapse of time | ||
REN | Ceased due to non-payment of the annual fee |